[Scan]
initial_time=2016-01-27T18:41:26
final_time=2016-01-27T18:41:45
ip_count=19
run=1025
dataset=1
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.15461E-2
qbias_imon=-3.78947E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.63531E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=4.11975E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.744E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=8.63409E-10
mult1=-9.02999E-9
mult2=-2.76452E-9
rf_tmon=-4.25407E-3
rf_agc=3.40786E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.21255E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62528E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04887E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.85512E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=2.59483E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01312E0
lens1_imon=1.55721E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.99207E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0354E1
cs_ea2_imon=1.54435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84574E1
cs_ef1a_imon=2.93116E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=3.95727E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.88611E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=1.86952E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.96396E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99974E1
olens4_imon=1.13928E-10
tplens_vset=0.0E0
tplens_vmon=-1.62161E0
tplens_imon=-1.55148E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.999E1
iondef3_imon=8.6842E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98579E1
iondef2_imon=9.47729E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=5.08821E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=1.77687E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.19036E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.00052E-1
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62399E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50572E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10715E1
os_restr2_imon=2.86918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01401E1
cs_anode2_imon=2.23956E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56635E1
iondef1_imon=4.92063E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49415E1
iondef4_imon=5.38491E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.33713E-9
olens1_vset=0.0E0
olens1_vmon=1.71661E-3
olens1_imon=3.91638E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17219E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.01725E-1
window_imon=-1.05899E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.42967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.93219E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53065E0
defgridb_imon=6.27969E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33641E1
os_fil1_imon=4.64408E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58131E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63494E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30322E1
cs_fil1_imon=9.97957E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62132E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65961E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17866E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.6324E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21798E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.26703E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.04942E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.05E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80023E1	-9.29832E-4	-8.80002E1	3.8147E-4	4.76837E-3	9.35078E-2	1.59356E1	-1.98985E1	-1.99686E1	1.50132E1	2.15441E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.25674E-2
2.0E0	2.003E3	2.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80024E1	-7.86781E-4	-8.8E1	6.4373E-4	4.45843E-3	9.34124E-2	1.57158E1	-1.98561E1	-1.99864E1	1.49962E1	2.15808E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.25482E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80022E1	-9.05991E-4	-8.80003E1	3.09944E-4	4.95911E-3	9.3317E-2	1.58474E1	-1.98951E1	-1.99504E1	1.49614E1	2.158E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.25917E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80026E1	-9.05991E-4	-8.80003E1	4.76837E-4	5.126E-3	9.34839E-2	1.58008E1	-1.9844E1	-1.9975E1	1.50607E1	2.15441E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.26252E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80024E1	-9.29832E-4	-8.80003E1	3.33786E-4	4.69685E-3	9.3317E-2	1.58389E1	-1.98645E1	-1.99804E1	1.49307E1	2.159E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.26252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80025E1	-1.12057E-3	-8.80002E1	5.24521E-4	4.79221E-3	9.32693E-2	1.57819E1	-1.98416E1	-1.99768E1	1.50796E1	2.15987E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.24937E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80023E1	-7.62939E-4	-8.8E1	3.09944E-4	4.60148E-3	9.3174E-2	1.57674E1	-1.98483E1	-1.99324E1	1.49599E1	2.156E-9	2.52585E-3	2.52585E-3	6.32978E-3	2.26169E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80025E1	-5.48363E-4	-8.80001E1	1.43051E-4	4.45843E-3	9.3317E-2	1.56811E1	-1.98656E1	-1.99935E1	1.50164E1	2.15624E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.25482E-2
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80027E1	-1.09673E-3	-8.80003E1	1.43051E-4	4.55379E-3	9.3317E-2	1.57951E1	-1.98513E1	-1.99288E1	1.50497E1	2.15462E-9	2.52333E-3	2.52333E-3	6.31599E-3	2.26087E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80024E1	-8.34465E-4	-8.80003E1	3.33786E-4	4.33922E-3	9.34124E-2	1.58365E1	-1.98543E1	-1.99396E1	1.49561E1	2.15624E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.26252E-2
1.4E1	7.1E1	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80026E1	-4.29153E-4	-8.80001E1	3.57628E-4	4.52995E-3	9.31025E-2	1.56719E1	-1.98633E1	-1.99708E1	1.50022E1	2.15791E-9	2.51804E-3	2.51804E-3	6.30182E-3	2.2677E-2
1.5E1	1.8E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80027E1	-8.10623E-4	-8.80001E1	4.05312E-4	4.55379E-3	9.35555E-2	1.58425E1	-1.9823E1	-1.999E1	1.49848E1	2.15716E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.25482E-2
1.6E1	1.57E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80027E1	-5.24521E-4	-8.80003E1	4.52995E-4	4.93526E-3	9.36031E-2	1.56569E1	-1.98469E1	-1.99819E1	1.50257E1	2.15505E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.25968E-2
1.7E1	1.87E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80025E1	-9.53674E-4	-8.79999E1	5.00679E-4	5.05447E-3	9.34601E-2	1.59228E1	-1.98689E1	-1.99663E1	1.49354E1	2.15647E-9	2.52717E-3	2.52717E-3	6.30221E-3	2.26517E-2
1.8E1	8.02E2	1.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80026E1	-9.29832E-4	-8.8E1	1.19209E-4	4.93526E-3	9.32932E-2	1.56977E1	-1.98717E1	-1.99594E1	1.50262E1	2.15772E-9	2.5199E-3	2.5199E-3	6.3016E-3	2.25248E-2
1.9E1	9.41E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80022E1	-8.82149E-4	-8.79999E1	1.43051E-4	4.60148E-3	9.34362E-2	1.59483E1	-1.98635E1	-1.99384E1	1.49651E1	2.16081E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.26113E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80026E1	-1.21593E-3	-8.8E1	9.53674E-5	4.60148E-3	9.34124E-2	1.57011E1	-1.98464E1	-2.00133E1	1.50412E1	2.15992E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.26639E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80024E1	-1.00136E-3	-8.8E1	1.43051E-4	4.79221E-3	9.37223E-2	1.56504E1	-1.98558E1	-1.99437E1	1.499E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27295E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80021E1	-9.77516E-4	-8.80001E1	4.52995E-4	4.88758E-3	9.33886E-2	1.56339E1	-1.986E1	-1.99655E1	1.50346E1	2.15726E-9	2.51603E-3	2.51603E-3	6.32328E-3	2.26008E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.15461E-2	-8.80025E1	-8.82149E-4	-8.80001E1	6.19888E-4	4.64916E-3	9.36985E-2	1.56635E1	-1.98579E1	-1.999E1	1.49415E1	2.15894E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.26703E-2