[Scan]
initial_time=2016-01-27T18:41:53
final_time=2016-01-27T18:42:12
ip_count=19
run=1025
dataset=1
scan=16
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.77158E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.40535E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=4.3776E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.7343E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=9.40382E-10
mult1=-9.66815E-9
mult2=-2.69665E-9
rf_tmon=-5.04716E-3
rf_agc=3.25705E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.78041E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=2.87458E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.59015E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01612E0
lens1_imon=1.36614E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.52885E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84028E1
cs_ef1a_imon=2.93729E-5
olens2_vset=0.0E0
olens2_vmon=1.69277E-3
olens2_imon=4.04012E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.88071E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1548E1
os_ea1_imon=1.87132E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19322E0
cs_ionrep_imon=1.20152E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91916E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=2.96324E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.07825E-10
tplens_vset=0.0E0
tplens_vmon=-1.60238E0
tplens_imon=-3.35395E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99714E1
iondef3_imon=8.80316E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98501E1
iondef2_imon=9.4845E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.76348E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31518E0
ionrepsh_imon=1.7866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.18387E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.03657E-1
os_ea2_imon=-6.23792E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00313E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62038E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47569E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.86341E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.022E1
cs_anode2_imon=2.26443E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56737E1
iondef1_imon=4.95668E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49373E1
iondef4_imon=5.27679E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.34485E-9
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=4.33457E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.88429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86903E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.77935E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.24943E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.44042E0
defgridb_imon=5.98048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33654E1
os_fil1_imon=5.27477E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.85761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63582E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30375E1
cs_fil1_imon=9.98288E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63231E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65859E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.4571E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21852E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.2572E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.73708E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.18E2	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80023E1	-6.67572E-4	-8.8E1	3.57628E-4	4.62532E-3	9.35078E-2	1.5708E1	-1.98765E1	-1.9969E1	1.51229E1	2.15533E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.26059E-2
2.0E0	1.923E3	1.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80025E1	-7.86781E-4	-8.79999E1	1.90735E-4	4.76837E-3	9.32693E-2	1.59458E1	-1.98466E1	-1.9982E1	1.50446E1	2.158E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.25524E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80025E1	-7.39098E-4	-8.80001E1	3.33786E-4	4.86374E-3	9.33886E-2	1.56529E1	-1.98567E1	-1.99744E1	1.49437E1	2.15879E-9	2.52066E-3	2.52066E-3	6.27901E-3	2.26431E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80023E1	-4.76837E-4	-8.79998E1	2.86102E-4	5.00679E-3	9.33886E-2	1.59094E1	-1.98558E1	-1.99915E1	1.49055E1	2.15365E-9	2.52342E-3	2.52342E-3	6.3074E-3	2.26956E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80028E1	-8.82149E-4	-8.80002E1	3.8147E-4	5.00679E-3	9.34839E-2	1.56711E1	-1.98505E1	-1.99709E1	1.50543E1	2.15519E-9	2.52647E-3	2.52647E-3	6.3514E-3	2.26113E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80025E1	-6.91414E-4	-8.80004E1	3.57628E-4	4.88758E-3	9.37223E-2	1.5917E1	-1.98723E1	-1.99612E1	1.49596E1	2.15624E-9	2.52599E-3	2.52599E-3	6.32896E-3	2.27802E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80021E1	-5.72205E-4	-8.8E1	3.09944E-4	4.86374E-3	9.34839E-2	1.56893E1	-1.98687E1	-1.99654E1	1.49938E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.25524E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80022E1	-4.29153E-4	-8.8E1	3.09944E-4	4.79221E-3	9.37939E-2	1.5884E1	-1.98705E1	-1.99582E1	1.5001E1	2.15808E-9	2.51632E-3	2.51632E-3	6.32896E-3	2.26059E-2
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80023E1	-9.05991E-4	-8.79999E1	1.66893E-4	4.95911E-3	9.35555E-2	1.59777E1	-1.98555E1	-1.99804E1	1.50773E1	2.16081E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.2769E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.8002E1	-7.39098E-4	-8.80003E1	7.15256E-5	5.14984E-3	9.34362E-2	1.59471E1	-1.98392E1	-1.99967E1	1.49265E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.2631E-2
1.4E1	7.2E1	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80024E1	-5.24521E-4	-8.80006E1	1.43051E-4	5.10216E-3	9.33409E-2	1.57247E1	-1.98187E1	-2.00015E1	1.50387E1	2.15791E-9	2.52473E-3	2.52473E-3	6.31299E-3	2.26569E-2
1.5E1	3.0E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80023E1	-7.62939E-4	-8.80004E1	3.33786E-4	5.43594E-3	9.34124E-2	1.56201E1	-1.98553E1	-1.99988E1	1.49798E1	2.15636E-9	2.51919E-3	2.51919E-3	6.32328E-3	2.26008E-2
1.6E1	1.68E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80024E1	-8.10623E-4	-8.80003E1	4.05312E-4	5.126E-3	9.34124E-2	1.56509E1	-1.99149E1	-1.99552E1	1.50022E1	2.15685E-9	2.51838E-3	2.51838E-3	6.33021E-3	2.25819E-2
1.7E1	2.06E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80022E1	-7.62939E-4	-8.80005E1	5.48363E-4	4.74453E-3	9.34839E-2	1.57371E1	-1.98883E1	-1.99325E1	1.5001E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2631E-2
1.8E1	7.97E2	1.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80019E1	-7.86781E-4	-8.80001E1	4.52995E-4	5.24521E-3	9.34124E-2	1.59389E1	-1.98399E1	-1.99644E1	1.49433E1	2.15706E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.25917E-2
1.9E1	9.86E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80019E1	-6.4373E-4	-8.80001E1	3.33786E-4	5.10216E-3	9.33886E-2	1.57464E1	-1.98567E1	-1.99636E1	1.50593E1	2.15636E-9	2.52131E-3	2.52131E-3	6.30212E-3	2.26387E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.8002E1	-7.86781E-4	-8.80004E1	3.33786E-4	5.126E-3	9.35793E-2	1.56677E1	-1.98519E1	-1.993E1	1.50757E1	2.15613E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.2572E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80023E1	-1.00136E-3	-8.80002E1	5.24521E-4	4.88758E-3	9.34839E-2	1.56202E1	-1.98362E1	-1.99558E1	1.49662E1	2.15332E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.26113E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80023E1	-9.29832E-4	-8.80003E1	3.33786E-4	5.05447E-3	9.34839E-2	1.56858E1	-1.98523E1	-1.99473E1	1.50509E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.2631E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80022E1	-7.86781E-4	-8.80004E1	1.43051E-4	5.45979E-3	9.34362E-2	1.56737E1	-1.98501E1	-1.99714E1	1.49373E1	2.158E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.2572E-2