[Scan]
initial_time=2016-01-27T18:42:45
final_time=2016-01-27T18:43:05
ip_count=19
run=1025
dataset=1
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.83246E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.69272E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=4.25172E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.728E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.95488E-10
mult1=-8.44951E-9
mult2=-3.23886E-9
rf_tmon=-4.15667E-3
rf_agc=3.26139E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=4.92966E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64092E0
bslens_imon=2.40143E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19723E1
lens5a_imon=1.99441E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05209E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53691E1
cs_ef1b_imon=2.89229E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.59788E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02448E0
lens1_imon=1.27417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64512E1
os_ef1alow_imon=2.97633E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03766E1
cs_ea2_imon=1.56479E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84261E1
cs_ef1a_imon=2.93785E-5
olens2_vset=0.0E0
olens2_vmon=1.64509E-3
olens2_imon=3.85547E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.88389E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15013E1
os_ea1_imon=1.87535E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6365E1
os_ef1bup_imon=3.07452E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25813E0
cs_ionrep_imon=1.18405E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93538E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.96925E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=1.14703E-10
tplens_vset=0.0E0
tplens_vmon=-1.61955E0
tplens_imon=-2.69584E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99237E1
iondef3_imon=8.67607E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9918E1
iondef2_imon=9.38683E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.79114E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24153E0
ionrepsh_imon=1.76262E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3375E1
lens5b_imon=2.18863E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.12229E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49334E-1
os_ea2_imon=-5.81958E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00519E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71073E1
cs_ef2a_imon=3.2081E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62587E0
os_ef2alow_imon=-2.54267E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47787E-1
os_ef2bup_imon=-5.24958E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=2.86398E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30607E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.24166E-5
iondef1_vset=1.6E1
iondef1_vmon=1.59307E1
iondef1_imon=4.99096E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50184E1
iondef4_imon=5.37901E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27956E1
olens3_imon=2.33719E-9
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=4.10056E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-2.02075E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.4727E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56302E1
einzel_imon=7.72765E-6
window_vset=0.0E0
window_vmon=2.09261E-1
window_imon=-9.14991E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39106E-4
mask2_vset=0.0E0
mask2_vmon=-1.86499E1
mask2_imon=-6.58454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=7.44015E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.41702E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.26812E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52449E0
defgridb_imon=6.25857E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33691E1
os_fil1_imon=4.59357E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.9256E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64163E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30368E1
cs_fil1_imon=9.99367E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62549E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66163E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58751E-2
os_fil2_imon=-2.55703E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.60257E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.31078E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30764E-1
cs_fil2_imon=-2.43908E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21805E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.2769E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.16601E-1
res40_imon=-2.39671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=372
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.24E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.8002E1	-5.72205E-4	-8.79999E1	1.19209E-4	5.26905E-3	9.35793E-2	1.57659E1	-1.98723E1	-1.99748E1	1.49006E1	2.15578E-9	2.52572E-3	2.52572E-3	6.28726E-3	2.26784E-2
2.0E0	1.972E3	3.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80022E1	-9.29832E-4	-8.8E1	0.0E0	4.93526E-3	9.35316E-2	1.56707E1	-1.98416E1	-1.9972E1	1.4983E1	2.15464E-9	2.52303E-3	2.52303E-3	6.29396E-3	2.26301E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80023E1	-1.04904E-3	-8.79999E1	1.66893E-4	4.95911E-3	9.34601E-2	1.58852E1	-1.98576E1	-1.9952E1	1.50286E1	2.15409E-9	2.5225E-3	2.5225E-3	6.29624E-3	2.26971E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80023E1	-6.19888E-4	-8.80003E1	4.52995E-4	5.24521E-3	9.33647E-2	1.58065E1	-1.98567E1	-1.99582E1	1.49922E1	2.159E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.27219E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80024E1	-1.09673E-3	-8.8E1	2.14577E-4	4.673E-3	9.35316E-2	1.57716E1	-1.98615E1	-1.99768E1	1.49768E1	2.15992E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.25867E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80026E1	-8.10623E-4	-8.80005E1	5.96046E-4	4.88758E-3	9.36031E-2	1.58732E1	-1.98525E1	-1.9978E1	1.50659E1	2.15894E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.26703E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80023E1	-1.00136E-3	-8.80002E1	3.8147E-4	4.86374E-3	9.34839E-2	1.57272E1	-1.98549E1	-1.99816E1	1.49878E1	2.15894E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.27492E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80024E1	-1.0252E-3	-8.80002E1	-4.76837E-5	5.07832E-3	9.34601E-2	1.58726E1	-1.98801E1	-1.99498E1	1.49602E1	2.15332E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.26506E-2
1.2E1	4.2E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80023E1	-1.0252E-3	-8.80004E1	9.53674E-5	4.95911E-3	9.32455E-2	1.5841E1	-1.98364E1	-1.99148E1	1.50521E1	2.158E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.25329E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80024E1	-9.05991E-4	-8.80006E1	1.90735E-4	5.17368E-3	9.31501E-2	1.58359E1	-1.98513E1	-1.9945E1	1.49758E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.26639E-2
1.4E1	7.5E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80024E1	-9.05991E-4	-8.80005E1	1.43051E-4	5.29289E-3	9.34124E-2	1.57767E1	-1.98511E1	-1.99756E1	1.49794E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.26113E-2
1.5E1	1.4E1	0.0E0	6.06E2	4.11E2	-7.16233E-2	-8.80025E1	-9.29832E-4	-8.8E1	1.19209E-4	5.4121E-3	9.36747E-2	1.57674E1	-1.98711E1	-1.99468E1	1.50046E1	2.15519E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.26113E-2
1.6E1	1.44E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80024E1	-1.3113E-3	-8.8E1	1.90735E-4	5.07832E-3	9.38654E-2	1.59091E1	-1.98441E1	-1.99273E1	1.50406E1	2.15613E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.25133E-2
1.7E1	1.9E2	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80022E1	-1.09673E-3	-8.80004E1	1.19209E-4	5.34058E-3	9.34124E-2	1.57737E1	-1.98664E1	-1.99484E1	1.50124E1	2.15519E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.24937E-2
1.8E1	8.08E2	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80023E1	-9.05991E-4	-8.80002E1	5.48363E-4	5.55515E-3	9.3627E-2	1.56575E1	-1.98543E1	-1.99738E1	1.49819E1	2.159E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.25482E-2
1.9E1	1.021E3	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80021E1	-7.86781E-4	-8.80002E1	2.38419E-5	5.07832E-3	9.36747E-2	1.5649E1	-1.98662E1	-1.99851E1	1.49808E1	2.15519E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.2631E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80023E1	-9.77516E-4	-8.80004E1	1.90735E-4	5.29289E-3	9.3627E-2	1.56626E1	-1.98727E1	-1.99434E1	1.50548E1	2.15647E-9	2.51886E-3	2.51886E-3	6.29703E-3	2.25772E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80023E1	-5.72205E-4	-8.80004E1	2.86102E-4	4.93526E-3	9.34601E-2	1.58451E1	-1.98641E1	-1.99484E1	1.50705E1	2.15772E-9	2.51642E-3	2.51642E-3	6.31902E-3	2.26078E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80023E1	-9.53674E-4	-8.8E1	5.24521E-4	4.79221E-3	9.34601E-2	1.5756E1	-1.9841E1	-1.9951E1	1.49638E1	2.15349E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.26445E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80021E1	-1.07288E-3	-8.8E1	3.09944E-4	4.81606E-3	9.35078E-2	1.59307E1	-1.9918E1	-1.99237E1	1.50184E1	2.158E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.2769E-2