[Scan]
initial_time=2016-01-27T18:43:38
final_time=2016-01-27T18:43:58
ip_count=19
run=1025
dataset=1
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17007E-2
qbias_imon=-3.86811E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.46377E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=4.32444E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.68912E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=9.44734E-10
mult1=-9.71215E-9
mult2=-2.84868E-9
rf_tmon=-3.70131E-3
rf_agc=3.38577E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=4.94742E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66016E0
bslens_imon=2.63445E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19993E1
lens5a_imon=1.9853E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.04997E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53697E1
cs_ef1b_imon=2.86984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02361E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05083E1
cs_ea1_imon=2.59106E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99902E0
lens1_imon=1.41682E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64693E1
os_ef1alow_imon=2.98038E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03748E1
cs_ea2_imon=1.53604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84362E1
cs_ef1a_imon=2.93445E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=4.21512E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11422E1
os_restr1_imon=2.88152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1516E1
os_ea1_imon=1.904E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.08547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23174E0
cs_ionrep_imon=1.19403E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93508E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0175E1
cs_anode1_imon=2.9652E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=1.25885E-10
tplens_vset=0.0E0
tplens_vmon=-1.64461E0
tplens_imon=-1.0998E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9965E1
iondef3_imon=8.84854E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98611E1
iondef2_imon=9.26841E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98426E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.33624E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29281E0
ionrepsh_imon=1.79788E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33747E1
lens5b_imon=2.18187E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.13529E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.97331E-1
os_ea2_imon=-3.69537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19134E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62153E0
os_ef2alow_imon=-2.54497E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.38175E-1
os_ef2bup_imon=-5.30071E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10825E1
os_restr2_imon=2.86089E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29088E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.2424E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56817E1
iondef1_imon=5.05825E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49662E1
iondef4_imon=5.27073E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.43735E-9
olens1_vset=0.0E0
olens1_vmon=1.50204E-3
olens1_imon=4.19414E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1256E0
cs_ionaccel_imon=-1.94167E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5599E1
einzel_imon=7.61778E-6
window_vset=0.0E0
window_vmon=1.91274E-1
window_imon=-1.11651E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86571E1
mask2_imon=-6.41647E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.61946E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.19572E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.28357E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51649E0
defgridb_imon=6.00487E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33678E1
os_fil1_imon=5.52152E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=6.62434E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63973E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30323E1
cs_fil1_imon=9.98372E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63539E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66288E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44015E-2
os_fil2_imon=-2.71066E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.72936E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.30174E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3105E-1
cs_fil2_imon=-2.2371E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83218E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21711E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.25329E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.82189E-1
res40_imon=-2.44377E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.2E2	1.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80022E1	-8.10623E-4	-8.80003E1	9.53674E-5	4.93526E-3	9.34601E-2	1.57014E1	-1.98609E1	-1.99318E1	1.5031E1	2.15661E-9	2.51911E-3	2.51911E-3	6.30149E-3	2.26987E-2
2.0E0	2.082E3	3.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80023E1	-8.58307E-4	-8.80001E1	2.14577E-4	5.24521E-3	9.3317E-2	1.5903E1	-1.98465E1	-1.99353E1	1.50461E1	2.15533E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.26252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80021E1	-1.16825E-3	-8.80001E1	4.29153E-4	5.126E-3	9.31263E-2	1.5884E1	-1.98365E1	-1.99888E1	1.50122E1	2.15887E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.25769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80022E1	-1.00136E-3	-8.80002E1	3.33786E-4	5.31673E-3	9.31978E-2	1.56581E1	-1.98663E1	-1.99606E1	1.49302E1	2.15636E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.26197E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80023E1	-1.19209E-3	-8.80007E1	2.86102E-4	4.57764E-3	9.31025E-2	1.59106E1	-1.98428E1	-1.99974E1	1.49902E1	2.15519E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.25917E-2
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80023E1	-1.09673E-3	-8.80003E1	3.33786E-4	4.79221E-3	9.34839E-2	1.57573E1	-1.98832E1	-1.99585E1	1.50388E1	2.15716E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.25867E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80023E1	-8.82149E-4	-8.80001E1	5.00679E-4	5.00679E-3	9.30786E-2	1.58486E1	-1.98741E1	-1.99414E1	1.50052E1	2.156E-9	2.52362E-3	2.52362E-3	6.31299E-3	2.26369E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80023E1	-6.4373E-4	-8.80001E1	5.00679E-4	4.98295E-3	9.33409E-2	1.58897E1	-1.9836E1	-1.99521E1	1.49457E1	2.15992E-9	2.52599E-3	2.52599E-3	6.3074E-3	2.25674E-2
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.8002E1	-8.58307E-4	-8.80001E1	2.14577E-4	5.29289E-3	9.31978E-2	1.58515E1	-1.98624E1	-1.99751E1	1.5016E1	2.15558E-9	2.51783E-3	2.51783E-3	6.3126E-3	2.26517E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80021E1	-5.00679E-4	-8.8E1	3.33786E-4	5.22137E-3	9.33647E-2	1.57128E1	-1.98867E1	-1.99185E1	1.50437E1	2.15409E-9	2.51693E-3	2.51693E-3	6.29624E-3	2.26169E-2
1.4E1	7.5E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80023E1	-5.72205E-4	-8.80002E1	6.19888E-4	4.98295E-3	9.31501E-2	1.56875E1	-1.98458E1	-1.99222E1	1.50382E1	2.15332E-9	2.52209E-3	2.52209E-3	6.34037E-3	2.25524E-2
1.5E1	2.2E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80023E1	-8.58307E-4	-8.80002E1	4.52995E-4	4.86374E-3	9.35316E-2	1.57194E1	-1.98759E1	-1.99791E1	1.49385E1	2.14958E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.2572E-2
1.6E1	1.54E2	1.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80024E1	-9.29832E-4	-8.80003E1	2.86102E-4	4.74453E-3	9.37223E-2	1.59459E1	-1.98687E1	-1.99774E1	1.50294E1	2.15624E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.26639E-2
1.7E1	1.78E2	0.0E0	6.87E2	4.7E2	-7.11597E-2	-8.80023E1	-9.77516E-4	-8.80003E1	5.00679E-4	4.93526E-3	9.36031E-2	1.59873E1	-1.98807E1	-1.99684E1	1.49938E1	2.15987E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.27097E-2
1.8E1	8.3E2	0.0E0	7.27E2	5.0E2	-7.08504E-2	-8.80026E1	-9.53674E-4	-8.8E1	8.10623E-4	4.91142E-3	9.34601E-2	1.57548E1	-1.98765E1	-1.99582E1	1.5034E1	2.15706E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.269E-2
1.9E1	9.3E2	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.80024E1	-8.58307E-4	-8.80004E1	6.67572E-4	5.19753E-3	9.33647E-2	1.56587E1	-1.98576E1	-1.99732E1	1.50659E1	2.158E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.26506E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80024E1	-8.10623E-4	-8.80006E1	2.14577E-4	4.79221E-3	9.34601E-2	1.56905E1	-1.98459E1	-1.99641E1	1.50196E1	2.15992E-9	2.51525E-3	2.51525E-3	6.28592E-3	2.26445E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80025E1	-6.4373E-4	-8.80002E1	1.66893E-4	4.88758E-3	9.32932E-2	1.57311E1	-1.9837E1	-1.9972E1	1.49842E1	2.15696E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.25369E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80024E1	-8.82149E-4	-8.80002E1	-1.90735E-4	4.76837E-3	9.34362E-2	1.59273E1	-1.98579E1	-1.99648E1	1.50112E1	2.15997E-9	2.51709E-3	2.51709E-3	6.30212E-3	2.26197E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.17007E-2	-8.80023E1	-7.62939E-4	-8.80001E1	-4.76837E-5	4.98295E-3	9.34124E-2	1.56817E1	-1.98611E1	-1.9965E1	1.49662E1	2.15519E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.25329E-2