[Scan]
initial_time=2016-01-27T18:44:05
final_time=2016-01-27T18:44:25
ip_count=19
run=1025
dataset=1
scan=21
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.79245E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.42049E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=4.42791E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.66464E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=9.36341E-10
mult1=-1.04508E-8
mult2=-2.78249E-9
rf_tmon=-4.32617E-3
rf_agc=3.38142E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.95744E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20584E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12415E2
lens4a_imon=2.04833E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.87855E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0524E1
cs_ea1_imon=2.61971E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03355E0
lens1_imon=1.12101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.9845E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03642E1
cs_ea2_imon=1.53029E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=2.93909E-5
olens2_vset=0.0E0
olens2_vmon=1.12057E-3
olens2_imon=4.17113E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=2.88575E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=1.89655E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26472E0
cs_ionrep_imon=1.19935E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91828E2
cs_nozzle_imon=1.93204E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.96828E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99981E1
olens4_imon=1.61123E-10
tplens_vset=0.0E0
tplens_vmon=-1.64143E0
tplens_imon=-5.06042E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.9951E1
iondef3_imon=8.78874E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.99065E1
iondef2_imon=9.39077E-6
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=5.40113E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30257E0
ionrepsh_imon=1.80499E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.97048E-1
os_ea2_imon=-6.12977E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00908E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.19569E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61738E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.43364E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.86629E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.2845E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.24533E-5
iondef1_vset=1.6E1
iondef1_vmon=1.59363E1
iondef1_imon=4.8305E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49825E1
iondef4_imon=5.16146E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.4436E-9
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=3.842E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14215E0
cs_ionaccel_imon=-1.76536E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02061E2
cs_ionfocb_imon=1.47262E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56183E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.65679E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.60414E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.41886E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.35019E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33708E1
os_fil1_imon=4.1215E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.41312E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64019E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30239E1
cs_fil1_imon=9.9833E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6278E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66788E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.31991E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.21864E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21813E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=2.26059E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.41873E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.73E2	1.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80025E1	-8.58307E-4	-8.80001E1	3.09944E-4	4.88758E-3	9.36985E-2	1.59813E1	-1.98765E1	-1.99258E1	1.50178E1	2.15706E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.26506E-2
2.0E0	1.965E3	1.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80026E1	-1.19209E-3	-8.80002E1	1.43051E-4	5.03063E-3	9.36508E-2	1.59698E1	-1.98379E1	-1.99473E1	1.5E1	2.15145E-9	2.52209E-3	2.52209E-3	6.33486E-3	2.2769E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80025E1	-1.16825E-3	-8.80002E1	2.6226E-4	5.31673E-3	9.35555E-2	1.57399E1	-1.98435E1	-1.99862E1	1.4988E1	2.15497E-9	2.51323E-3	2.51323E-3	6.3275E-3	2.27667E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80024E1	-8.58307E-4	-8.80001E1	-1.19209E-4	5.34058E-3	9.35078E-2	1.57991E1	-1.98641E1	-1.99638E1	1.5016E1	2.15762E-9	2.51557E-3	2.51557E-3	6.33706E-3	2.25501E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80021E1	-7.86781E-4	-8.80002E1	2.14577E-4	5.00679E-3	9.38177E-2	1.57662E1	-1.98585E1	-1.99618E1	1.50659E1	2.15624E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.25674E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80021E1	-8.82149E-4	-8.80005E1	2.38419E-4	4.95911E-3	9.35793E-2	1.58929E1	-1.98482E1	-1.99797E1	1.4965E1	2.15332E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.26703E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80023E1	-1.04904E-3	-8.80001E1	3.57628E-4	5.22137E-3	9.34601E-2	1.57957E1	-1.98338E1	-1.9939E1	1.50418E1	2.15992E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.25674E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80024E1	-9.05991E-4	-8.79998E1	4.05312E-4	5.126E-3	9.3317E-2	1.58017E1	-1.98693E1	-1.99095E1	1.49582E1	2.15425E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.25524E-2
1.2E1	3.3E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80027E1	-1.3113E-3	-8.79998E1	5.24521E-4	5.34058E-3	9.36985E-2	1.58522E1	-1.98194E1	-1.99462E1	1.50418E1	2.158E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.25133E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80025E1	-8.34465E-4	-8.80003E1	9.53674E-5	4.98295E-3	9.41277E-2	1.56605E1	-1.98092E1	-1.99726E1	1.49336E1	2.15987E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.25524E-2
1.4E1	8.4E1	1.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80025E1	-1.0252E-3	-8.80001E1	2.38419E-4	4.8399E-3	9.36031E-2	1.58091E1	-1.98676E1	-1.99425E1	1.5012E1	2.15706E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.25917E-2
1.5E1	1.5E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80029E1	-8.82149E-4	-8.80004E1	4.52995E-4	5.126E-3	9.35316E-2	1.59611E1	-1.98514E1	-1.9961E1	1.49812E1	2.159E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.25097E-2
1.6E1	1.29E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80024E1	-1.23978E-3	-8.80001E1	5.24521E-4	5.26905E-3	9.35793E-2	1.58758E1	-1.98594E1	-1.9988E1	1.49962E1	2.16078E-9	2.52473E-3	2.52473E-3	6.3074E-3	2.26569E-2
1.7E1	1.82E2	0.0E0	6.87E2	4.7E2	-7.47923E-2	-8.80023E1	-1.04904E-3	-8.80002E1	3.33786E-4	5.03063E-3	9.35555E-2	1.59728E1	-1.98477E1	-1.99659E1	1.49884E1	2.15624E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.25097E-2
1.8E1	8.27E2	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80023E1	-8.82149E-4	-8.80001E1	1.90735E-4	5.05447E-3	9.34839E-2	1.58681E1	-1.98688E1	-1.99526E1	1.50286E1	2.15791E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.26169E-2
1.9E1	9.12E2	0.0E0	7.68E2	5.29E2	-7.43285E-2	-8.80023E1	-9.05991E-4	-8.80003E1	1.66893E-4	5.126E-3	9.36747E-2	1.56737E1	-1.98428E1	-1.99672E1	1.49578E1	2.159E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.26059E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.47923E-2	-8.80023E1	-9.29832E-4	-8.80001E1	2.38419E-5	5.29289E-3	9.3317E-2	1.56875E1	-1.98627E1	-2.00081E1	1.50485E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80026E1	-6.91414E-4	-8.80002E1	2.86102E-4	5.17368E-3	9.32693E-2	1.59717E1	-1.98705E1	-1.9945E1	1.4953E1	2.158E-9	2.52099E-3	2.52099E-3	6.28006E-3	2.2572E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80024E1	-8.58307E-4	-8.80002E1	2.38419E-5	5.26905E-3	9.36747E-2	1.59094E1	-1.98346E1	-1.99803E1	1.50503E1	2.15425E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.2631E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80023E1	-6.67572E-4	-8.80001E1	2.14577E-4	5.07832E-3	9.33647E-2	1.59363E1	-1.99065E1	-1.9951E1	1.49825E1	2.15716E-9	2.51417E-3	2.51417E-3	6.28592E-3	2.26059E-2