[Scan]
initial_time=2016-01-27T18:44:32
final_time=2016-01-27T18:44:51
ip_count=19
run=1025
dataset=1
scan=22
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.78512E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.31404E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=4.68671E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.72061E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=9.53817E-10
mult1=-9.17448E-9
mult2=-2.7226E-9
rf_tmon=-4.52444E-3
rf_agc=3.32795E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.8027E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64644E0
bslens_imon=2.70054E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20201E1
lens5a_imon=1.98654E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.05045E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53841E1
cs_ef1b_imon=2.87965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04634E2
lens23_imon=1.02278E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05267E1
cs_ea1_imon=2.59821E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98077E0
lens1_imon=1.24908E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98565E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.54222E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=2.93734E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=3.88253E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=2.87027E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15402E1
os_ea1_imon=1.89194E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.0906E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.18943E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93372E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.97314E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=7.33972E-11
tplens_vset=0.0E0
tplens_vmon=-1.65908E0
tplens_imon=-1.13596E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99558E1
iondef3_imon=8.83086E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98368E1
iondef2_imon=9.25776E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98441E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.53639E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30674E0
ionrepsh_imon=1.79905E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.17438E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34363E-1
os_ea2_imon=-6.22464E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00746E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.18756E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62045E0
os_ef2alow_imon=-2.57111E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4684E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=2.8661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29416E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02111E1
cs_anode2_imon=2.25098E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58137E1
iondef1_imon=5.09461E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5028E1
iondef4_imon=5.14743E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.36124E-9
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=3.67713E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11508E0
cs_ionaccel_imon=-1.89343E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55994E1
einzel_imon=7.70869E-6
window_vset=0.0E0
window_vmon=1.96834E-1
window_imon=-1.00377E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86622E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.39989E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.59731E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.23254E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.22419E0
defgridb_imon=5.98599E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33685E1
os_fil1_imon=4.28711E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.03256E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63975E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30312E1
cs_fil1_imon=9.99009E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62945E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66462E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41787E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.28349E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.32166E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04933E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2182E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=2.2517E-2
chamber_ion_pmon=2.15314E-9
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.66736E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=239
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.67E2	1.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80024E1	-6.91414E-4	-8.80002E1	1.66893E-4	4.91142E-3	9.34124E-2	1.59317E1	-1.98594E1	-1.99618E1	1.49947E1	2.15913E-9	2.52197E-3	2.52197E-3	6.3074E-3	2.2689E-2
2.0E0	1.999E3	1.0E0	3.16E2	1.6E2	-7.39421E-2	-8.80023E1	-8.58307E-4	-8.80002E1	3.8147E-4	4.79221E-3	9.35555E-2	1.5704E1	-1.98355E1	-1.99628E1	1.50634E1	2.15574E-9	2.51758E-3	2.51758E-3	6.32483E-3	2.26078E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80025E1	-8.82149E-4	-8.80001E1	3.57628E-4	4.74453E-3	9.38177E-2	1.58799E1	-1.98482E1	-1.99785E1	1.49506E1	2.15982E-9	2.52585E-3	2.52585E-3	6.29624E-3	2.25369E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80021E1	-5.72205E-4	-8.79999E1	3.57628E-4	4.76837E-3	9.37223E-2	1.57183E1	-1.98753E1	-1.99315E1	1.50636E1	2.15949E-9	2.52309E-3	2.52309E-3	6.29143E-3	2.26607E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80023E1	-1.0252E-3	-8.80003E1	3.8147E-4	4.64916E-3	9.37939E-2	1.58728E1	-1.98682E1	-1.99644E1	1.49722E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80022E1	-8.10623E-4	-8.80002E1	3.57628E-4	4.69685E-3	9.34601E-2	1.58534E1	-1.98458E1	-1.99576E1	1.49626E1	2.15716E-9	2.52599E-3	2.52599E-3	6.3074E-3	2.25482E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80023E1	-6.67572E-4	-8.80002E1	5.00679E-4	4.88758E-3	9.35793E-2	1.57156E1	-1.98649E1	-1.99371E1	1.50581E1	2.15624E-9	2.52276E-3	2.52276E-3	6.33436E-3	2.25674E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80021E1	-6.19888E-4	-8.80002E1	4.05312E-4	4.76837E-3	9.36747E-2	1.59619E1	-1.98617E1	-1.99596E1	1.49493E1	2.15982E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.2677E-2
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80021E1	-8.34465E-4	-8.80002E1	9.53674E-5	4.81606E-3	9.35078E-2	1.5753E1	-1.98507E1	-1.99666E1	1.50533E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.2631E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80022E1	-1.04904E-3	-8.80001E1	1.66893E-4	4.79221E-3	9.36747E-2	1.56971E1	-1.98561E1	-1.99624E1	1.49716E1	2.158E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.2769E-2
1.4E1	8.2E1	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.8002E1	-1.23978E-3	-8.80001E1	2.86102E-4	5.07832E-3	9.35793E-2	1.59525E1	-1.98561E1	-1.99756E1	1.50605E1	2.158E-9	2.53196E-3	2.53196E-3	6.31288E-3	2.26703E-2
1.5E1	2.3E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80022E1	-6.4373E-4	-8.80002E1	3.57628E-4	4.88758E-3	9.35793E-2	1.57783E1	-1.98747E1	-1.99816E1	1.49884E1	2.15613E-9	2.51771E-3	2.51771E-3	6.3074E-3	2.2631E-2
1.6E1	1.24E2	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80025E1	-7.86781E-4	-8.8E1	6.19888E-4	4.88758E-3	9.35078E-2	1.5746E1	-1.98712E1	-1.99602E1	1.50178E1	2.15706E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.2631E-2
1.7E1	1.94E2	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80023E1	-1.00136E-3	-8.80004E1	5.00679E-4	5.126E-3	9.34601E-2	1.58781E1	-1.98841E1	-1.99962E1	1.49818E1	2.15073E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.26252E-2
1.8E1	7.46E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80023E1	-7.86781E-4	-8.8E1	5.72205E-4	5.00679E-3	9.33647E-2	1.57146E1	-1.98711E1	-1.99318E1	1.50971E1	2.15441E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.26252E-2
1.9E1	1.0E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80025E1	-7.86781E-4	-8.79998E1	2.86102E-4	4.98295E-3	9.3627E-2	1.59765E1	-1.98747E1	-1.99486E1	1.49085E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.2631E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80025E1	-6.19888E-4	-8.79998E1	4.05312E-4	5.19753E-3	9.37223E-2	1.57236E1	-1.98629E1	-1.99738E1	1.50635E1	2.15613E-9	2.51334E-3	2.51334E-3	6.3074E-3	2.26113E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80025E1	-8.82149E-4	-8.8E1	1.43051E-4	4.81606E-3	9.35078E-2	1.58954E1	-1.98591E1	-2.00129E1	1.49385E1	2.15716E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.25674E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80025E1	-8.10623E-4	-8.80001E1	4.52995E-4	4.91142E-3	9.33886E-2	1.56953E1	-1.98422E1	-1.99606E1	1.49602E1	2.15716E-9	2.52492E-3	2.52492E-3	6.33436E-3	2.25289E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80021E1	-9.29832E-4	-8.8E1	4.29153E-4	4.95911E-3	9.31025E-2	1.58137E1	-1.98368E1	-1.99558E1	1.5028E1	2.15314E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.2517E-2