[Scan]
initial_time=2016-01-27T18:44:58
final_time=2016-01-27T18:45:18
ip_count=19
run=1025
dataset=1
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.81433E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.13821E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=4.29928E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.72046E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=9.27043E-10
mult1=-9.84219E-9
mult2=-2.75069E-9
rf_tmon=-4.26762E-3
rf_agc=3.31911E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.52166E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63011E0
bslens_imon=2.46681E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19856E1
lens5a_imon=1.98195E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05081E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53194E1
cs_ef1b_imon=2.86837E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04956E1
cs_ea1_imon=2.6006E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03395E0
lens1_imon=1.54798E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6487E1
os_ef1alow_imon=2.9814E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03937E1
cs_ea2_imon=1.53616E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.93948E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=4.62365E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11847E1
os_restr1_imon=2.87586E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15202E1
os_ea1_imon=1.90719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64053E1
os_ef1bup_imon=3.09592E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2495E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93397E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01684E1
cs_anode1_imon=2.97129E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=1.09541E-10
tplens_vset=0.0E0
tplens_vmon=-1.64143E0
tplens_imon=-4.29845E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99596E1
iondef3_imon=8.68059E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9847E1
iondef2_imon=9.27238E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98202E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.73928E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29103E0
ionrepsh_imon=1.79974E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33833E1
lens5b_imon=2.18713E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74851E1
cs_ef2b_imon=3.1165E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.99596E-1
os_ea2_imon=-6.28406E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70852E1
cs_ef2a_imon=3.17788E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62593E0
os_ef2alow_imon=-2.65665E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48355E-1
os_ef2bup_imon=-5.31388E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10768E1
os_restr2_imon=2.86388E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.31291E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01709E1
cs_anode2_imon=2.25534E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56988E1
iondef1_imon=4.91572E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49848E1
iondef4_imon=5.19902E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.44149E-9
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=3.93081E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1657E0
cs_ionaccel_imon=-1.7472E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56337E1
einzel_imon=7.59802E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.30558E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39271E-4
mask2_vset=0.0E0
mask2_vmon=-1.86525E1
mask2_imon=-8.45243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.84352E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.67162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=7.16997E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48E0
defgridb_imon=5.99418E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33695E1
os_fil1_imon=5.53375E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.04128E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64015E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30307E1
cs_fil1_imon=9.98821E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62634E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66259E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38634E-2
os_fil2_imon=-2.5627E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.3681E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32376E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30055E-1
cs_fil2_imon=-2.21963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.36612E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21818E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3016E-3
inlet_lpb_pmon=2.26078E-2
chamber_ion_pmon=2.15772E-9
chamber_cvt_pmon=2.52106E-3
foreline_cvt_pmon=2.52106E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.78097E-1
res40_imon=-2.3797E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.36E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80024E1	-7.86781E-4	-8.80003E1	2.86102E-4	5.19753E-3	9.31501E-2	1.575E1	-1.98639E1	-1.9951E1	1.50136E1	2.15685E-9	2.52749E-3	2.52749E-3	6.3245E-3	2.24802E-2
2.0E0	1.931E3	1.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80027E1	-7.15256E-4	-8.8E1	5.00679E-4	4.88758E-3	9.30786E-2	1.59648E1	-1.9852E1	-1.99659E1	1.50072E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.25329E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80026E1	-6.91414E-4	-8.80001E1	5.72205E-4	4.79221E-3	9.34601E-2	1.58736E1	-1.98567E1	-1.99796E1	1.50091E1	2.15791E-9	2.52585E-3	2.52585E-3	6.28511E-3	2.26369E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80023E1	-8.58307E-4	-8.80001E1	3.09944E-4	4.98295E-3	9.33409E-2	1.57146E1	-1.9844E1	-1.9966E1	1.49241E1	2.15817E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.24498E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80026E1	-7.15256E-4	-8.79999E1	4.29153E-4	4.93526E-3	9.35793E-2	1.56839E1	-1.98531E1	-1.99618E1	1.4995E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.25674E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80025E1	-6.4373E-4	-8.80001E1	3.8147E-4	4.95911E-3	9.34362E-2	1.57029E1	-1.98641E1	-1.99408E1	1.49808E1	2.158E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.25524E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80023E1	-7.62939E-4	-8.79997E1	5.48363E-4	4.93526E-3	9.35555E-2	1.57044E1	-1.98603E1	-1.99438E1	1.50214E1	2.15519E-9	2.52428E-3	2.52428E-3	6.35692E-3	2.25133E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80022E1	-1.00136E-3	-8.79999E1	5.48363E-4	5.34058E-3	9.35316E-2	1.56465E1	-1.98765E1	-1.99567E1	1.49723E1	2.15706E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.26113E-2
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80024E1	-1.04904E-3	-8.79998E1	5.72205E-4	4.98295E-3	9.33409E-2	1.58769E1	-1.98517E1	-1.99602E1	1.50274E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.2769E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80024E1	-8.58307E-4	-8.80002E1	5.24521E-4	4.98295E-3	9.32932E-2	1.56449E1	-1.98531E1	-1.9966E1	1.50201E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.2769E-2
1.4E1	9.0E1	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80026E1	-1.07288E-3	-8.79998E1	3.33786E-4	4.98295E-3	9.33647E-2	1.5687E1	-1.98493E1	-1.99655E1	1.50461E1	2.15613E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.269E-2
1.5E1	2.4E1	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80027E1	-9.05991E-4	-8.79999E1	3.33786E-4	5.03063E-3	9.36031E-2	1.58311E1	-1.98212E1	-1.99522E1	1.49968E1	2.15716E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.26059E-2
1.6E1	1.23E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80028E1	-9.05991E-4	-8.80002E1	5.24521E-4	4.673E-3	9.3317E-2	1.58022E1	-1.9848E1	-1.99639E1	1.50021E1	2.15716E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.24905E-2
1.7E1	2.06E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80027E1	-9.53674E-4	-8.79999E1	4.05312E-4	4.81606E-3	9.33647E-2	1.58407E1	-1.9832E1	-1.9951E1	1.49247E1	2.1586E-9	2.51926E-3	2.51926E-3	6.3074E-3	2.26246E-2
1.8E1	7.73E2	0.0E0	7.27E2	5.0E2	-7.40192E-2	-8.80029E1	-7.15256E-4	-8.80001E1	3.57628E-4	4.74453E-3	9.33886E-2	1.58209E1	-1.98814E1	-1.99683E1	1.49517E1	2.15706E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.25329E-2
1.9E1	9.13E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80027E1	-1.09673E-3	-8.80002E1	2.6226E-4	4.72069E-3	9.33886E-2	1.57873E1	-1.98776E1	-1.99667E1	1.51111E1	2.15791E-9	2.52585E-3	2.52585E-3	6.26289E-3	2.26569E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80027E1	-9.53674E-4	-8.79999E1	1.90735E-4	4.8399E-3	9.34124E-2	1.56581E1	-1.97846E1	-2.00393E1	1.49866E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.25867E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80024E1	-1.04904E-3	-8.80001E1	3.09944E-4	4.88758E-3	9.31263E-2	1.58635E1	-1.98821E1	-1.99573E1	1.50033E1	2.15894E-9	2.5199E-3	2.5199E-3	6.34037E-3	2.25917E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80025E1	-8.58307E-4	-8.8E1	1.66893E-4	4.93526E-3	9.35793E-2	1.5665E1	-1.9841E1	-1.99389E1	1.49791E1	2.15571E-9	2.52058E-3	2.52058E-3	6.3074E-3	2.26459E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80026E1	-1.04904E-3	-8.8E1	2.38419E-4	4.86374E-3	9.32932E-2	1.56988E1	-1.9847E1	-1.99596E1	1.49848E1	2.15772E-9	2.52106E-3	2.52106E-3	6.3016E-3	2.26078E-2