[Scan]
initial_time=2016-01-27T18:45:25
final_time=2016-01-27T18:45:45
ip_count=19
run=1025
dataset=1
scan=24
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.74001E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.69689E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.5923E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.73615E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=9.27186E-10
mult1=-9.57341E-9
mult2=-2.59176E-9
rf_tmon=-5.66023E-3
rf_agc=3.28019E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.98676E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.79102E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19818E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53546E1
cs_ef1b_imon=2.86262E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.01891E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=2.55813E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98936E0
lens1_imon=2.03712E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64475E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.48675E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84099E1
cs_ef1a_imon=2.93143E-5
olens2_vset=0.0E0
olens2_vmon=1.52588E-3
olens2_imon=4.31538E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11071E1
os_restr1_imon=2.88E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15317E1
os_ea1_imon=2.0035E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63508E1
os_ef1bup_imon=3.09164E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25387E0
cs_ionrep_imon=1.16077E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91922E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=2.97175E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.2778E-10
tplens_vset=0.0E0
tplens_vmon=-1.65028E0
tplens_imon=-2.42257E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99267E1
iondef3_imon=8.83633E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98404E1
iondef2_imon=9.28229E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=5.10132E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24797E0
ionrepsh_imon=1.78123E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30389E-1
os_ea2_imon=-7.41313E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63145E0
os_ef2alow_imon=-2.63366E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98389E-1
os_ef2bup_imon=-5.41039E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.87096E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23013E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01282E1
cs_anode2_imon=2.21901E-5
iondef1_vset=1.6E1
iondef1_vmon=1.59324E1
iondef1_imon=4.94652E-6
iondef4_vset=1.53E1
iondef4_vmon=1.47884E1
iondef4_imon=5.32814E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.4109E-9
olens1_vset=0.0E0
olens1_vmon=1.64509E-3
olens1_imon=3.8625E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17879E0
cs_ionaccel_imon=-1.744E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56857E1
einzel_imon=7.73649E-6
window_vset=0.0E0
window_vmon=2.64602E-1
window_imon=-1.04895E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39112E-4
mask2_vset=0.0E0
mask2_vmon=-1.86535E1
mask2_imon=-7.18797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.78158E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.57111E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.82594E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53699E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33707E1
os_fil1_imon=4.54776E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.19677E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63783E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30333E1
cs_fil1_imon=9.98123E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63102E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65827E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.57651E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.71315E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32035E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33397E-1
cs_fil2_imon=-2.46646E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.07602E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.26059E-2
chamber_ion_pmon=2.15992E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.18662E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.39E2	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80024E1	-7.62939E-4	-8.80001E1	9.53674E-5	5.03063E-3	9.35555E-2	1.59324E1	-1.98706E1	-1.99614E1	1.49061E1	2.15808E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.25289E-2
2.0E0	1.973E3	4.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80023E1	-3.09944E-4	-8.80002E1	3.57628E-4	5.24521E-3	9.33886E-2	1.5794E1	-1.98907E1	-1.99263E1	1.50063E1	2.15808E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.26639E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80021E1	-1.14441E-3	-8.80001E1	3.57628E-4	5.00679E-3	9.33409E-2	1.58557E1	-1.98482E1	-1.99337E1	1.49506E1	2.15305E-9	2.51615E-3	2.51615E-3	6.30271E-3	2.25861E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80023E1	-1.00136E-3	-8.8E1	7.86781E-4	5.03063E-3	9.33647E-2	1.57909E1	-1.98489E1	-1.99804E1	1.5034E1	2.159E-9	2.51739E-3	2.51739E-3	6.32896E-3	2.26445E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80023E1	-5.72205E-4	-8.80001E1	3.33786E-4	4.76837E-3	9.34839E-2	1.57068E1	-1.98717E1	-1.99528E1	1.49836E1	2.15706E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.269E-2
6.0E0	0.0E0	1.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80025E1	-4.76837E-4	-8.80002E1	5.48363E-4	4.62532E-3	9.36031E-2	1.58645E1	-1.98694E1	-1.99614E1	1.51338E1	2.15808E-9	2.52707E-3	2.52707E-3	6.32356E-3	2.25867E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80021E1	-7.15256E-4	-8.80001E1	6.4373E-4	4.93526E-3	9.35078E-2	1.5702E1	-1.98633E1	-1.99624E1	1.484E1	2.158E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.2631E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80023E1	-8.82149E-4	-8.8E1	6.19888E-4	5.17368E-3	9.33647E-2	1.57279E1	-1.9852E1	-1.99855E1	1.51109E1	2.15519E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.2572E-2
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80023E1	-1.19209E-3	-8.79999E1	4.52995E-4	4.93526E-3	9.3317E-2	1.58563E1	-1.98629E1	-1.99419E1	1.50535E1	2.15425E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.26506E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80023E1	-1.12057E-3	-8.80001E1	6.4373E-4	5.22137E-3	9.32455E-2	1.60138E1	-1.98639E1	-1.9957E1	1.49774E1	2.15613E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.25524E-2
1.4E1	6.6E1	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80025E1	-1.09673E-3	-8.79999E1	5.72205E-4	5.03063E-3	9.33886E-2	1.57152E1	-1.98663E1	-1.99732E1	1.49572E1	2.15894E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.2631E-2
1.5E1	1.7E1	0.0E0	6.06E2	4.11E2	-7.14689E-2	-8.80026E1	-1.04904E-3	-8.79999E1	1.66893E-4	5.05447E-3	9.32693E-2	1.57381E1	-1.9838E1	-1.99937E1	1.4993E1	2.16081E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.25917E-2
1.6E1	1.37E2	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80027E1	-1.23978E-3	-8.80002E1	1.66893E-4	5.07832E-3	9.32693E-2	1.5963E1	-1.98807E1	-1.99632E1	1.51638E1	2.15762E-9	2.52384E-3	2.52384E-3	6.31727E-3	2.25819E-2
1.7E1	1.98E2	1.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80023E1	-8.34465E-4	-8.79999E1	5.00679E-4	5.00679E-3	9.35078E-2	1.58936E1	-1.98404E1	-1.99894E1	1.4843E1	2.15531E-9	2.5199E-3	2.5199E-3	6.31357E-3	2.27147E-2
1.8E1	7.96E2	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80025E1	-9.29832E-4	-8.80001E1	5.00679E-4	5.05447E-3	9.31978E-2	1.56365E1	-1.98633E1	-1.99612E1	1.49325E1	2.15992E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.25482E-2
1.9E1	9.84E2	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80025E1	-1.14441E-3	-8.80004E1	3.57628E-4	4.93526E-3	9.3317E-2	1.59595E1	-1.9903E1	-1.9965E1	1.50659E1	2.15791E-9	2.51359E-3	2.51359E-3	6.32978E-3	2.2517E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80026E1	-8.58307E-4	-8.80002E1	1.66893E-4	4.76837E-3	9.37223E-2	1.5792E1	-1.987E1	-1.99885E1	1.50937E1	2.15726E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.26577E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80024E1	-7.39098E-4	-8.80003E1	1.43051E-4	5.24521E-3	9.34839E-2	1.57483E1	-1.9867E1	-2.00098E1	1.48977E1	2.15425E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.2572E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80026E1	-7.39098E-4	-8.80003E1	2.38419E-4	5.38826E-3	9.32932E-2	1.57047E1	-1.98906E1	-1.99467E1	1.5147E1	2.16177E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.25674E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80025E1	-9.53674E-4	-8.80004E1	4.05312E-4	5.22137E-3	9.30786E-2	1.59324E1	-1.98404E1	-1.99267E1	1.47884E1	2.15992E-9	2.52384E-3	2.52384E-3	6.32896E-3	2.26059E-2