[Scan]
initial_time=2016-01-27T18:45:52
final_time=2016-01-27T18:46:11
ip_count=19
run=1025
dataset=1
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.84352E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.06716E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.58848E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.73171E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=9.26662E-10
mult1=-1.00775E-8
mult2=-2.97611E-9
rf_tmon=-6.98783E-3
rf_agc=3.05337E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.30279E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19869E1
lens5a_imon=1.96901E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.04841E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=2.85908E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=2.59195E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00891E0
lens1_imon=1.52476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.52668E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.93224E-5
olens2_vset=0.0E0
olens2_vmon=9.53674E-4
olens2_imon=4.33111E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=2.87819E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=1.90124E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23107E0
cs_ionrep_imon=1.1871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.97405E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=1.07539E-10
tplens_vset=0.0E0
tplens_vmon=-1.615E0
tplens_imon=-2.34457E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99756E1
iondef3_imon=8.80316E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.97948E1
iondef2_imon=9.44484E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.8939E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.78444E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30695E-1
os_ea2_imon=-5.19248E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3976E-1
os_ef2bup_imon=-5.39816E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29207E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25614E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57765E1
iondef1_imon=4.94586E-6
iondef4_vset=1.53E1
iondef4_vmon=1.48765E1
iondef4_imon=5.24075E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.50365E-9
olens1_vset=0.0E0
olens1_vmon=1.28746E-3
olens1_imon=4.18043E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13194E0
cs_ionaccel_imon=-1.90592E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.22059E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.48878E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.20256E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.30809E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33706E1
os_fil1_imon=4.0254E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.91167E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64146E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30304E1
cs_fil1_imon=9.98744E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62984E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66616E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.15753E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.40425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.2572E-2
chamber_ion_pmon=2.16081E-9
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.83028E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80025E1	-9.05991E-4	-8.80001E1	3.33786E-4	4.91142E-3	9.35078E-2	1.57141E1	-1.98464E1	-1.99638E1	1.51686E1	2.15894E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.28284E-2
2.0E0	1.947E3	1.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80029E1	-8.82149E-4	-8.80002E1	2.38419E-5	4.69685E-3	9.35555E-2	1.56544E1	-1.98679E1	-1.99414E1	1.51239E1	2.15817E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.2544E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80028E1	-5.96046E-4	-8.79997E1	3.57628E-4	4.55379E-3	9.38416E-2	1.56372E1	-1.98614E1	-1.99662E1	1.48139E1	2.15685E-9	2.51725E-3	2.51725E-3	6.30171E-3	2.25819E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80027E1	-7.62939E-4	-8.80003E1	-1.19209E-4	4.88758E-3	9.35555E-2	1.56642E1	-1.98386E1	-1.99653E1	1.52479E1	2.15726E-9	2.52553E-3	2.52553E-3	6.3074E-3	2.25819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80028E1	-1.00136E-3	-8.80004E1	1.19209E-4	4.64916E-3	9.377E-2	1.56852E1	-1.98712E1	-1.99614E1	1.48749E1	2.15887E-9	2.51804E-3	2.51804E-3	6.3074E-3	2.25569E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80025E1	-8.34465E-4	-8.8E1	3.09944E-4	4.98295E-3	9.3174E-2	1.5791E1	-1.9854E1	-1.99492E1	1.51204E1	2.15716E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.25674E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80026E1	-7.86781E-4	-8.79999E1	-1.19209E-4	5.19753E-3	9.3317E-2	1.59598E1	-1.98691E1	-1.99609E1	1.48658E1	2.15594E-9	2.52384E-3	2.52384E-3	6.31234E-3	2.27413E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80027E1	-9.77516E-4	-8.80001E1	1.43051E-4	5.126E-3	9.35793E-2	1.5933E1	-1.98551E1	-1.99279E1	1.51008E1	2.15531E-9	2.51621E-3	2.51621E-3	6.31357E-3	2.2626E-2
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.45602E-2	-8.80028E1	-9.53674E-4	-8.80002E1	3.8147E-4	5.14984E-3	9.29356E-2	1.57914E1	-1.98493E1	-1.99555E1	1.49986E1	2.158E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.2572E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80029E1	-9.29832E-4	-8.80004E1	2.86102E-4	5.36442E-3	9.31978E-2	1.57276E1	-1.98539E1	-1.99523E1	1.49796E1	2.16081E-9	2.51662E-3	2.51662E-3	6.33486E-3	2.25524E-2
1.4E1	6.5E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80027E1	-8.58307E-4	-8.8E1	2.86102E-4	5.126E-3	9.31978E-2	1.56588E1	-1.98486E1	-1.99885E1	1.49342E1	2.15817E-9	2.52131E-3	2.52131E-3	6.28103E-3	2.26956E-2
1.5E1	1.9E1	1.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80025E1	-9.05991E-4	-8.80003E1	2.6226E-4	5.22137E-3	9.30786E-2	1.57483E1	-1.98835E1	-2.00192E1	1.50425E1	2.15685E-9	2.51952E-3	2.51952E-3	6.3245E-3	2.25208E-2
1.6E1	1.44E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80024E1	-9.53674E-4	-8.79998E1	2.14577E-4	5.34058E-3	9.32455E-2	1.59441E1	-1.98314E1	-1.99648E1	1.51139E1	2.15887E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.26169E-2
1.7E1	2.08E2	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80023E1	-1.00136E-3	-8.79999E1	2.6226E-4	5.34058E-3	9.32455E-2	1.56697E1	-1.98886E1	-1.99825E1	1.49004E1	2.16085E-9	2.51525E-3	2.51525E-3	6.3074E-3	2.25674E-2
1.8E1	8.12E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80024E1	-1.12057E-3	-8.80003E1	4.05312E-4	5.14984E-3	9.32693E-2	1.58474E1	-1.98794E1	-1.99349E1	1.49866E1	2.15455E-9	2.51393E-3	2.51393E-3	6.32328E-3	2.25063E-2
1.9E1	9.5E2	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80026E1	-8.34465E-4	-8.80003E1	4.52995E-4	4.79221E-3	9.32932E-2	1.56665E1	-1.98513E1	-1.99684E1	1.50178E1	2.159E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.24905E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80025E1	-5.48363E-4	-8.80003E1	2.6226E-4	5.19753E-3	9.33886E-2	1.57987E1	-1.98807E1	-1.99552E1	1.50334E1	2.15808E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.25289E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80025E1	-6.67572E-4	-8.80001E1	3.57628E-4	4.91142E-3	9.33647E-2	1.5792E1	-1.98328E1	-2.00133E1	1.49993E1	2.156E-9	2.52139E-3	2.52139E-3	6.31858E-3	2.25968E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80026E1	-7.39098E-4	-8.80004E1	3.09944E-4	5.19753E-3	9.32217E-2	1.58636E1	-1.98633E1	-1.99564E1	1.50247E1	2.15716E-9	2.51203E-3	2.51203E-3	6.33977E-3	2.26059E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80026E1	-5.72205E-4	-8.8E1	4.52995E-4	5.03063E-3	9.32217E-2	1.57765E1	-1.97948E1	-1.99756E1	1.48765E1	2.16081E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.2572E-2