[Scan]
initial_time=2016-01-27T18:46:18
final_time=2016-01-27T18:46:38
ip_count=19
run=1025
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.7614E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.55627E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=4.13406E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.82983E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.64506E-10
mult1=-9.86079E-9
mult2=-2.81043E-9
rf_tmon=-4.09185E-3
rf_agc=3.39765E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.74417E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63912E0
bslens_imon=2.50633E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1948E1
lens5a_imon=1.99346E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05034E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53358E1
cs_ef1b_imon=2.86521E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0511E1
cs_ea1_imon=2.59619E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00778E0
lens1_imon=1.27588E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03782E1
cs_ea2_imon=1.53397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8425E1
cs_ef1a_imon=2.94089E-5
olens2_vset=0.0E0
olens2_vmon=1.4782E-3
olens2_imon=3.96395E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=2.87566E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15355E1
os_ea1_imon=1.8987E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64248E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22884E0
cs_ionrep_imon=1.19826E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=2.96937E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99975E1
olens4_imon=1.02818E-10
tplens_vset=0.0E0
tplens_vmon=-1.63531E0
tplens_imon=-3.51244E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99744E1
iondef3_imon=8.87159E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98452E1
iondef2_imon=9.04789E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02914E2
lens6_imon=2.98669E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.93252E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27597E0
ionrepsh_imon=1.78961E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33597E1
lens5b_imon=2.19106E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75198E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.15096E-1
os_ea2_imon=-5.16527E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00682E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70687E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58074E0
os_ef2alow_imon=-2.63752E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36757E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10757E1
os_restr2_imon=2.8562E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30516E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.25326E-5
iondef1_vset=1.6E1
iondef1_vmon=1.5714E1
iondef1_imon=5.04068E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50316E1
iondef4_imon=5.19029E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.36682E-9
olens1_vset=0.0E0
olens1_vmon=1.19209E-3
olens1_imon=3.95477E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15897E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.01725E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-8.1752E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.56768E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.9543E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.17467E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.62212E0
defgridb_imon=5.9883E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3369E1
os_fil1_imon=3.73708E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.96573E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6388E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30438E1
cs_fil1_imon=1.00007E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63441E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66298E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3577E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.09747E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.39019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.19745E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=-2.99364E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21882E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.27097E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.56599E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.43E2	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80023E1	-9.53674E-4	-8.80004E1	6.19888E-4	5.03063E-3	9.35078E-2	1.58398E1	-1.98682E1	-1.99773E1	1.5004E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.27492E-2
2.0E0	1.977E3	3.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80024E1	-6.67572E-4	-8.80003E1	3.33786E-4	5.10216E-3	9.35316E-2	1.57973E1	-1.98505E1	-1.99768E1	1.49884E1	2.15624E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.27026E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80023E1	-8.58307E-4	-8.80002E1	4.29153E-4	4.95911E-3	9.35793E-2	1.57843E1	-1.98529E1	-1.99638E1	1.4979E1	2.15987E-9	2.52647E-3	2.52647E-3	6.32386E-3	2.25133E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80026E1	-1.0252E-3	-8.80001E1	2.14577E-4	4.72069E-3	9.35793E-2	1.58504E1	-1.98487E1	-1.99189E1	1.50143E1	2.15546E-9	2.52131E-3	2.52131E-3	6.31798E-3	2.26577E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80027E1	-9.05991E-4	-8.80001E1	3.33786E-4	4.62532E-3	9.32932E-2	1.57026E1	-1.98585E1	-1.99822E1	1.49947E1	2.15425E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.25917E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80025E1	-8.58307E-4	-8.80002E1	6.67572E-4	4.98295E-3	9.36031E-2	1.59165E1	-1.98539E1	-1.99581E1	1.49132E1	2.16081E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80025E1	-8.82149E-4	-8.8E1	5.48363E-4	5.07832E-3	9.35793E-2	1.57118E1	-1.98846E1	-1.99595E1	1.51657E1	2.15997E-9	2.52342E-3	2.52342E-3	6.33388E-3	2.26387E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80027E1	-6.19888E-4	-8.79999E1	5.48363E-4	4.62532E-3	9.35793E-2	1.58886E1	-1.98491E1	-1.99453E1	1.48452E1	2.16171E-9	2.51952E-3	2.51952E-3	6.29603E-3	2.25208E-2
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80027E1	-6.19888E-4	-8.80001E1	4.76837E-4	5.03063E-3	9.36508E-2	1.58397E1	-1.98603E1	-1.99314E1	1.52156E1	2.15832E-9	2.5216E-3	2.5216E-3	6.34322E-3	2.25727E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80025E1	-6.4373E-4	-8.79999E1	4.52995E-4	4.8399E-3	9.37223E-2	1.57389E1	-1.98546E1	-1.99614E1	1.50707E1	2.15977E-9	2.52066E-3	2.52066E-3	6.3131E-3	2.25615E-2
1.4E1	7.4E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80025E1	-8.58307E-4	-8.79997E1	5.96046E-4	5.17368E-3	9.377E-2	1.58149E1	-1.98513E1	-1.99546E1	1.49265E1	2.158E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.2572E-2
1.5E1	1.7E1	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80028E1	-6.91414E-4	-8.80001E1	5.24521E-4	5.10216E-3	9.37462E-2	1.58251E1	-1.98567E1	-2.00009E1	1.50039E1	2.15425E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.269E-2
1.6E1	1.56E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80026E1	-6.67572E-4	-8.79998E1	1.90735E-4	5.126E-3	9.33409E-2	1.59014E1	-1.98969E1	-1.99816E1	1.48917E1	2.15808E-9	2.52599E-3	2.52599E-3	6.34518E-3	2.25867E-2
1.7E1	1.86E2	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80026E1	-5.96046E-4	-8.80002E1	1.66893E-4	4.86374E-3	9.34601E-2	1.57354E1	-1.98605E1	-1.99856E1	1.49926E1	2.15332E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.27097E-2
1.8E1	7.93E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80026E1	-4.05312E-4	-8.80002E1	4.76837E-5	4.57764E-3	9.34362E-2	1.58779E1	-1.98288E1	-1.99634E1	1.49668E1	2.158E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.26703E-2
1.9E1	9.5E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80027E1	-9.77516E-4	-8.80003E1	1.19209E-4	4.74453E-3	9.36031E-2	1.57614E1	-1.98591E1	-1.99804E1	1.49794E1	2.15706E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.25524E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80026E1	-9.05991E-4	-8.79999E1	3.57628E-4	4.72069E-3	9.3627E-2	1.57365E1	-1.9916E1	-1.99184E1	1.50016E1	2.15696E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.26569E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.15461E-2	-8.80026E1	-6.19888E-4	-8.79997E1	5.00679E-4	5.19753E-3	9.35316E-2	1.58994E1	-1.98499E1	-1.99897E1	1.50259E1	2.15441E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.25674E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80028E1	-1.0252E-3	-8.80001E1	4.05312E-4	4.81606E-3	9.37223E-2	1.57626E1	-1.98657E1	-1.9972E1	1.49938E1	2.159E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.27802E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80026E1	-1.07288E-3	-8.8E1	2.6226E-4	4.95911E-3	9.33886E-2	1.5714E1	-1.98452E1	-1.99744E1	1.50316E1	2.15519E-9	2.52867E-3	2.52867E-3	6.31837E-3	2.27097E-2