[Scan]
initial_time=2016-01-27T18:46:45
final_time=2016-01-27T18:47:04
ip_count=19
run=1025
dataset=1
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.77881E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.43742E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.52232E-10
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-1.71903E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=9.64797E-10
mult1=-8.84917E-9
mult2=-2.69582E-9
rf_tmon=-4.99909E-3
rf_agc=3.33032E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.07736E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05164E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=2.88179E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=2.56981E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01295E0
lens1_imon=1.27261E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=3.00072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.56815E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=2.92576E-5
olens2_vset=0.0E0
olens2_vmon=1.26362E-3
olens2_imon=4.12893E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11232E1
os_restr1_imon=2.86954E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=1.86405E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63731E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23322E0
cs_ionrep_imon=1.20289E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.92553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01671E1
cs_anode1_imon=2.97045E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99982E1
olens4_imon=1.00613E-10
tplens_vset=0.0E0
tplens_vmon=-1.65854E0
tplens_imon=-3.23663E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9949E1
iondef3_imon=8.69475E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98782E1
iondef2_imon=9.38494E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.82368E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30637E0
ionrepsh_imon=1.78972E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.40417E-1
os_ea2_imon=-7.30695E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00347E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71108E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60777E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47569E-1
os_ef2bup_imon=-5.26481E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86161E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.24749E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56622E1
iondef1_imon=4.85803E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51748E1
iondef4_imon=5.32003E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.39271E-9
olens1_vset=0.0E0
olens1_vmon=1.26362E-3
olens1_imon=4.03798E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15417E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.83921E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.45596E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.48262E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.0914E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4484E0
defgridb_imon=6.11452E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33679E1
os_fil1_imon=4.3017E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.67741E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63971E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30331E1
cs_fil1_imon=9.98234E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63177E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65711E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33189E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.43298E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.67701E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21843E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.24714E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.47879E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.61E2	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80025E1	-9.53674E-4	-8.80001E1	3.8147E-4	4.86374E-3	9.33886E-2	1.57114E1	-1.98475E1	-1.99448E1	1.50705E1	2.16085E-9	2.51632E-3	2.51632E-3	6.30202E-3	2.25289E-2
2.0E0	1.945E3	1.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80026E1	-8.10623E-4	-8.8E1	4.05312E-4	5.03063E-3	9.35793E-2	1.59052E1	-1.99133E1	-1.9992E1	1.48974E1	2.16085E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.26252E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80027E1	-7.86781E-4	-8.80001E1	3.57628E-4	4.64916E-3	9.35316E-2	1.58104E1	-1.98799E1	-1.99552E1	1.49362E1	2.15887E-9	2.5147E-3	2.5147E-3	6.29067E-3	2.26569E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80027E1	-9.29832E-4	-8.79996E1	2.86102E-4	4.93526E-3	9.36031E-2	1.57338E1	-1.98657E1	-1.99546E1	1.49986E1	2.15716E-9	2.51632E-3	2.51632E-3	6.2752E-3	2.25867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80027E1	-7.39098E-4	-8.8E1	6.19888E-4	4.93526E-3	9.33886E-2	1.59618E1	-1.98501E1	-1.99659E1	1.501E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.25097E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80027E1	-9.29832E-4	-8.80001E1	6.4373E-4	4.95911E-3	9.35555E-2	1.56899E1	-1.98707E1	-1.99473E1	1.50542E1	2.15825E-9	2.52197E-3	2.52197E-3	6.3074E-3	2.26517E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80028E1	-1.12057E-3	-8.80001E1	2.86102E-4	5.17368E-3	9.33886E-2	1.56683E1	-1.98599E1	-1.99664E1	1.49518E1	2.15358E-9	2.52029E-3	2.52029E-3	6.32518E-3	2.25289E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80026E1	-1.0252E-3	-8.79999E1	2.86102E-4	5.17368E-3	9.33647E-2	1.58041E1	-1.98365E1	-1.99303E1	1.49732E1	2.15658E-9	2.51549E-3	2.51549E-3	6.29211E-3	2.25545E-2
1.2E1	3.4E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80024E1	-1.14441E-3	-8.79998E1	1.43051E-4	4.95911E-3	9.35793E-2	1.59495E1	-1.98615E1	-1.99546E1	1.50653E1	2.159E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.26059E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80024E1	-9.77516E-4	-8.79999E1	4.52995E-4	4.95911E-3	9.36985E-2	1.56815E1	-1.98663E1	-1.99762E1	1.49343E1	2.15808E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.26059E-2
1.4E1	8.4E1	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80023E1	-6.91414E-4	-8.8E1	4.76837E-4	4.93526E-3	9.32932E-2	1.59371E1	-1.98588E1	-1.99266E1	1.49698E1	2.158E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.25917E-2
1.5E1	3.2E1	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80025E1	-1.14441E-3	-8.80003E1	2.86102E-4	4.93526E-3	9.3627E-2	1.56722E1	-1.98508E1	-1.99726E1	1.5147E1	2.15894E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.25917E-2
1.6E1	1.49E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80024E1	-9.53674E-4	-8.80003E1	6.19888E-4	4.93526E-3	9.30786E-2	1.56728E1	-1.98346E1	-1.99496E1	1.48532E1	2.16081E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.25524E-2
1.7E1	2.12E2	2.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80023E1	-7.39098E-4	-8.80005E1	5.00679E-4	5.10216E-3	9.35078E-2	1.59597E1	-1.98603E1	-1.9966E1	1.52821E1	2.15987E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.25329E-2
1.8E1	7.96E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80026E1	-7.39098E-4	-8.80004E1	4.52995E-4	4.98295E-3	9.33886E-2	1.59501E1	-1.98507E1	-2.00658E1	1.50863E1	2.15533E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.26639E-2
1.9E1	9.7E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80026E1	-9.53674E-4	-8.80002E1	2.38419E-4	4.64916E-3	9.36031E-2	1.59489E1	-1.98181E1	-1.99296E1	1.48487E1	2.15706E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25524E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80023E1	-1.40667E-3	-8.79998E1	1.90735E-4	4.69685E-3	9.36747E-2	1.59669E1	-1.98561E1	-1.99432E1	1.49632E1	2.15992E-9	2.52169E-3	2.52169E-3	6.29665E-3	2.26059E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80025E1	-8.34465E-4	-8.79999E1	3.33786E-4	4.79221E-3	9.34362E-2	1.59147E1	-1.97561E1	-2.00015E1	1.48707E1	2.15425E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.2631E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80025E1	-1.19209E-3	-8.79997E1	1.90735E-4	4.673E-3	9.32693E-2	1.56929E1	-1.98723E1	-1.99708E1	1.49854E1	2.15894E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.25524E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80026E1	-9.53674E-4	-8.79996E1	4.52995E-4	4.93526E-3	9.34124E-2	1.56622E1	-1.98782E1	-1.9949E1	1.51748E1	2.15716E-9	2.51739E-3	2.51739E-3	6.29665E-3	2.24714E-2