[Scan]
initial_time=2016-01-27T18:47:12
final_time=2016-01-27T18:47:31
ip_count=19
run=1025
dataset=1
scan=28
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.83262E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-5.75078E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=4.37379E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.68505E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=9.84967E-10
mult1=-9.82916E-9
mult2=-2.68363E-9
rf_tmon=-7.54517E-3
rf_agc=3.11959E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=4.87375E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.63033E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=2.0057E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05131E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53476E1
cs_ef1b_imon=2.87178E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.0223E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04962E1
cs_ea1_imon=2.56712E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99891E0
lens1_imon=1.47011E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64693E1
os_ef1alow_imon=2.9761E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03872E1
cs_ea2_imon=1.54394E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=2.94146E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=4.31108E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11136E1
os_restr1_imon=2.86906E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1541E1
os_ea1_imon=1.86982E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6383E1
os_ef1bup_imon=3.09481E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24496E0
cs_ionrep_imon=1.18926E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01796E1
cs_anode1_imon=2.96831E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.16038E-10
tplens_vset=0.0E0
tplens_vmon=-1.65376E0
tplens_imon=-2.89685E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99726E1
iondef3_imon=8.75457E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98582E1
iondef2_imon=9.35025E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98603E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.88377E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.78845E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33639E1
lens5b_imon=2.19374E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7489E1
cs_ef2b_imon=3.12284E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.99596E-1
os_ea2_imon=-6.907E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00409E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71355E1
cs_ef2a_imon=3.19445E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62024E0
os_ef2alow_imon=-2.67342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.39472E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=2.85777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29383E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01692E1
cs_anode2_imon=2.24941E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56338E1
iondef1_imon=5.31285E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5038E1
iondef4_imon=5.18121E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.36638E-9
olens1_vset=0.0E0
olens1_vmon=1.16825E-3
olens1_imon=4.19736E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18009E0
cs_ionaccel_imon=-1.71981E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47425E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56379E1
einzel_imon=7.65281E-6
window_vset=0.0E0
window_vmon=2.10087E-1
window_imon=-1.0698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.38925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86312E1
mask2_imon=-6.88354E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.86688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.57429E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.07653E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55146E0
defgridb_imon=6.31344E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33695E1
os_fil1_imon=5.03499E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.50659E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63915E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30268E1
cs_fil1_imon=9.9808E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62307E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4142E-2
os_fil2_imon=-2.39927E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83218E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.42121E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31889E-1
cs_fil2_imon=-2.48361E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25947E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.26252E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40009E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.75053E-1
res40_imon=-2.47491E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.78E2	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.8003E1	-9.53674E-4	-8.79998E1	7.62939E-4	5.126E-3	9.32455E-2	1.57637E1	-1.98812E1	-1.99927E1	1.49686E1	2.15673E-9	2.52106E-3	2.52106E-3	6.32483E-3	2.25248E-2
2.0E0	2.022E3	6.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80028E1	-9.53674E-4	-8.79998E1	4.29153E-4	5.17368E-3	9.34601E-2	1.58246E1	-1.98606E1	-1.99604E1	1.52196E1	2.158E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.26703E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80031E1	-5.24521E-4	-8.79998E1	3.8147E-4	4.93526E-3	9.34601E-2	1.56679E1	-1.98741E1	-1.99442E1	1.49223E1	2.15982E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.26169E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80028E1	-3.57628E-4	-8.79998E1	4.29153E-4	4.88758E-3	9.35793E-2	1.57686E1	-1.98627E1	-1.99828E1	1.51283E1	2.15817E-9	2.52025E-3	2.52025E-3	6.31798E-3	2.26387E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80025E1	-7.15256E-4	-8.80003E1	6.4373E-4	5.22137E-3	9.34124E-2	1.5947E1	-1.98667E1	-1.99083E1	1.47746E1	2.15519E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.25917E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80025E1	-1.0252E-3	-8.80002E1	2.38419E-4	4.95911E-3	9.3627E-2	1.59381E1	-1.98501E1	-1.99492E1	1.51301E1	2.15613E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10051E-2	-8.80025E1	-1.07288E-3	-8.79999E1	3.8147E-4	4.91142E-3	9.37939E-2	1.59943E1	-1.9883E1	-1.99826E1	1.50977E1	2.158E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.2631E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13915E-2	-8.80024E1	-1.12057E-3	-8.80001E1	3.33786E-4	5.26905E-3	9.33647E-2	1.59728E1	-1.9849E1	-1.99812E1	1.50346E1	2.15425E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.25917E-2
1.2E1	4.2E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80023E1	-1.19209E-3	-8.8E1	4.05312E-4	4.8399E-3	9.35555E-2	1.58167E1	-1.9826E1	-1.9993E1	1.50563E1	2.15791E-9	2.5225E-3	2.5225E-3	6.3074E-3	2.25968E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80027E1	-9.53674E-4	-8.79999E1	4.29153E-4	5.07832E-3	9.34839E-2	1.56705E1	-1.98682E1	-1.99319E1	1.51169E1	2.15441E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.26445E-2
1.4E1	7.1E1	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80027E1	-1.21593E-3	-8.80001E1	2.86102E-4	5.24521E-3	9.31978E-2	1.56575E1	-1.98501E1	-1.99288E1	1.49385E1	2.15613E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.24742E-2
1.5E1	1.3E1	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80024E1	-1.07288E-3	-8.80004E1	2.14577E-4	5.45979E-3	9.36747E-2	1.57106E1	-1.986E1	-1.99591E1	1.50196E1	2.15992E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.27219E-2
1.6E1	1.62E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80032E1	-8.58307E-4	-8.80003E1	4.29153E-4	4.93526E-3	9.33647E-2	1.57098E1	-1.98597E1	-1.99979E1	1.50418E1	2.15706E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.26703E-2
1.7E1	2.25E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80028E1	-1.09673E-3	-8.80003E1	2.6226E-4	5.36442E-3	9.35316E-2	1.56893E1	-1.98705E1	-1.9954E1	1.49542E1	2.16085E-9	2.52384E-3	2.52384E-3	6.3074E-3	2.25289E-2
1.8E1	7.93E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80025E1	-6.4373E-4	-8.80005E1	6.67572E-4	4.98295E-3	9.34362E-2	1.56491E1	-1.98651E1	-1.9975E1	1.50983E1	2.15409E-9	2.51581E-3	2.51581E-3	6.30182E-3	2.25769E-2
1.9E1	9.38E2	0.0E0	7.68E2	5.29E2	-7.17007E-2	-8.80027E1	-8.58307E-4	-8.80003E1	6.4373E-4	5.03063E-3	9.35078E-2	1.57236E1	-1.98597E1	-1.99666E1	1.4849E1	2.15441E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.26832E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.13915E-2	-8.80028E1	-9.77516E-4	-8.80002E1	7.15256E-4	4.88758E-3	9.32455E-2	1.58894E1	-1.98699E1	-1.9975E1	1.51369E1	2.15706E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.269E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80027E1	-7.15256E-4	-8.80004E1	4.76837E-4	5.26905E-3	9.32693E-2	1.59049E1	-1.9862E1	-1.99819E1	1.49597E1	2.15851E-9	2.51972E-3	2.51972E-3	6.31283E-3	2.25794E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.11597E-2	-8.80029E1	-9.29832E-4	-8.80004E1	6.67572E-4	5.31673E-3	9.34839E-2	1.57308E1	-1.98645E1	-1.99708E1	1.48713E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.80027E1	-1.04904E-3	-8.80005E1	4.29153E-4	5.60284E-3	9.35555E-2	1.56338E1	-1.98582E1	-1.99726E1	1.5038E1	2.15533E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.26252E-2