[Scan]
initial_time=2016-01-27T18:47:38
final_time=2016-01-27T18:47:58
ip_count=19
run=1025
dataset=1
scan=29
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.7877E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.53565E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.23229E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.78044E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=9.22394E-10
mult1=-9.71174E-9
mult2=-2.73437E-9
rf_tmon=-3.48315E-3
rf_agc=3.40351E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.81772E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20079E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=2.86809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.59015E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00891E0
lens1_imon=1.49953E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.99495E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04033E1
cs_ea2_imon=1.54723E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=2.93621E-5
olens2_vset=0.0E0
olens2_vmon=1.28746E-3
olens2_imon=4.0518E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=2.88395E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15432E1
os_ea1_imon=1.88862E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=1.18493E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.97946E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=1.1785E-10
tplens_vset=0.0E0
tplens_vmon=-1.60478E0
tplens_imon=-3.31791E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99357E1
iondef3_imon=8.78514E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98574E1
iondef2_imon=9.50973E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98321E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=4.85837E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25991E0
ionrepsh_imon=1.7866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.13271E-1
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71396E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61197E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3015E-1
os_ef2bup_imon=-5.24679E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=2.8717E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.2982E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.2511E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56519E1
iondef1_imon=4.91342E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51834E1
iondef4_imon=5.13984E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.37958E-9
olens1_vset=0.0E0
olens1_vmon=1.09673E-3
olens1_imon=3.98409E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15116E0
cs_ionaccel_imon=-1.83384E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.4719E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.19678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.25664E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49756E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33703E1
os_fil1_imon=4.99246E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32302E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64062E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30297E1
cs_fil1_imon=9.986E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.64084E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66458E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.17223E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.01125E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.31991E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21726E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31526E-3
inlet_lpb_pmon=2.25889E-2
chamber_ion_pmon=2.15821E-9
chamber_cvt_pmon=2.5185E-3
foreline_cvt_pmon=2.5185E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.21761E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.85E2	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80024E1	-1.0252E-3	-8.80001E1	8.58307E-4	5.26905E-3	9.33886E-2	1.59607E1	-1.98564E1	-1.99785E1	1.48197E1	2.15987E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.269E-2
2.0E0	2.027E3	0.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80022E1	-7.39098E-4	-8.80001E1	5.00679E-4	5.17368E-3	9.33647E-2	1.59699E1	-1.98627E1	-1.99636E1	1.48286E1	2.15726E-9	2.52236E-3	2.52236E-3	6.31798E-3	2.26197E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80023E1	-8.58307E-4	-8.80005E1	8.10623E-4	5.126E-3	9.35078E-2	1.57487E1	-1.98422E1	-1.99726E1	1.47091E1	2.15987E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.26506E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80026E1	-9.53674E-4	-8.80003E1	5.24521E-4	5.17368E-3	9.35793E-2	1.56504E1	-1.98487E1	-1.99738E1	1.46983E1	2.15887E-9	2.52027E-3	2.52027E-3	6.3074E-3	2.25369E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80025E1	-7.39098E-4	-8.80003E1	3.09944E-4	5.26905E-3	9.32932E-2	1.56324E1	-1.98386E1	-1.99457E1	1.50569E1	2.15706E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.25917E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80023E1	-8.58307E-4	-8.80001E1	4.05312E-4	4.86374E-3	9.35316E-2	1.56858E1	-1.98305E1	-1.99461E1	1.51499E1	2.158E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.26113E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80027E1	-1.14441E-3	-8.80004E1	5.24521E-4	4.91142E-3	9.34601E-2	1.59561E1	-1.98609E1	-1.99408E1	1.51139E1	2.15257E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.26059E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80026E1	-7.15256E-4	-8.80002E1	2.14577E-4	5.126E-3	9.33647E-2	1.59731E1	-1.98771E1	-1.99685E1	1.48598E1	2.15894E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.26703E-2
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80026E1	-8.10623E-4	-8.80004E1	4.05312E-4	5.26905E-3	9.37462E-2	1.57789E1	-1.98705E1	-1.99161E1	1.52058E1	2.15894E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.26703E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80029E1	-8.82149E-4	-8.80004E1	7.39098E-4	5.14984E-3	9.36747E-2	1.58972E1	-1.98278E1	-2.00087E1	1.49938E1	2.15894E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.26506E-2
1.4E1	8.0E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80029E1	-6.4373E-4	-8.80002E1	7.62939E-4	4.98295E-3	9.34839E-2	1.57014E1	-1.98567E1	-1.9921E1	1.4807E1	2.15624E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.25097E-2
1.5E1	2.5E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80028E1	-7.39098E-4	-8.8E1	1.90735E-4	4.74453E-3	9.35078E-2	1.56707E1	-1.98645E1	-1.99696E1	1.50917E1	2.16078E-9	2.52809E-3	2.52809E-3	6.31299E-3	2.25769E-2
1.6E1	1.39E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80029E1	-7.39098E-4	-8.79998E1	4.05312E-4	4.95911E-3	9.33409E-2	1.56389E1	-1.98326E1	-1.99666E1	1.52389E1	2.15519E-9	2.53087E-3	2.53087E-3	6.29645E-3	2.2572E-2
1.7E1	1.96E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.8003E1	-8.82149E-4	-8.80001E1	5.24521E-4	5.03063E-3	9.34839E-2	1.56581E1	-1.98657E1	-1.999E1	1.52257E1	2.15257E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.25867E-2
1.8E1	7.71E2	3.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80028E1	-5.48363E-4	-8.79998E1	5.48363E-4	5.19753E-3	9.35793E-2	1.56329E1	-1.98392E1	-2.00201E1	1.50935E1	2.15145E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.25917E-2
1.9E1	9.45E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80028E1	-7.86781E-4	-8.80002E1	9.53674E-5	5.07832E-3	9.34124E-2	1.59489E1	-1.98537E1	-1.99294E1	1.50845E1	2.15894E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.25133E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80028E1	-6.19888E-4	-8.80001E1	1.19209E-4	4.93526E-3	9.36747E-2	1.58197E1	-1.98567E1	-1.99648E1	1.50677E1	2.15613E-9	2.51552E-3	2.51552E-3	6.31837E-3	2.2572E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80027E1	-5.96046E-4	-8.8E1	4.52995E-4	5.43594E-3	9.34839E-2	1.56053E1	-1.98284E1	-1.99999E1	1.47085E1	2.15894E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.26113E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80024E1	-6.4373E-4	-8.80003E1	4.76837E-4	5.19753E-3	9.35316E-2	1.56893E1	-1.98519E1	-1.99276E1	1.47649E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.26639E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80028E1	-5.48363E-4	-8.80001E1	4.76837E-4	5.126E-3	9.35793E-2	1.56519E1	-1.98574E1	-1.99357E1	1.51834E1	2.15821E-9	2.5185E-3	2.5185E-3	6.31526E-3	2.25889E-2