[Scan]
initial_time=2016-01-27T18:48:05
final_time=2016-01-27T18:48:24
ip_count=19
run=1025
dataset=1
scan=30
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.79155E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.89931E-10
ql2_vset=
ql2_vmon=-1.14441E-3
ql2_imon=4.5265E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.77161E-9
ql4_vset=
ql4_vmon=7.62939E-4
ql4_imon=9.47428E-10
mult1=-9.07378E-9
mult2=-2.74873E-9
rf_tmon=-4.53307E-3
rf_agc=3.25127E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=5.04339E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67284E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20156E1
lens5a_imon=1.99264E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05235E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53456E1
cs_ef1b_imon=2.87174E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02357E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04938E1
cs_ea1_imon=2.59761E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01034E0
lens1_imon=1.37308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64627E1
os_ef1alow_imon=2.98327E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03547E1
cs_ea2_imon=1.54116E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84269E1
cs_ef1a_imon=2.94023E-5
olens2_vset=0.0E0
olens2_vmon=1.64509E-3
olens2_imon=4.09925E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11485E1
os_restr1_imon=2.8665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15593E1
os_ea1_imon=1.8822E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.07571E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24461E0
cs_ionrep_imon=1.19899E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0194E1
cs_anode1_imon=2.97803E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.0215E-10
tplens_vset=0.0E0
tplens_vmon=-1.61585E0
tplens_imon=-1.84265E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99862E1
iondef3_imon=8.67311E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98541E1
iondef2_imon=9.33947E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98511E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.75752E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28205E0
ionrepsh_imon=1.77626E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33627E1
lens5b_imon=2.17907E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.12773E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.17615E-1
os_ea2_imon=-5.13702E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00615E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71127E1
cs_ef2a_imon=3.18911E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61033E0
os_ef2alow_imon=-2.64542E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.39622E-1
os_ef2bup_imon=-5.23155E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10774E1
os_restr2_imon=2.86912E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31051E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01709E1
cs_anode2_imon=2.24598E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58008E1
iondef1_imon=5.29637E-6
iondef4_vset=1.53E1
iondef4_vmon=1.48334E1
iondef4_imon=5.24019E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.4604E-9
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=4.08244E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16071E0
cs_ionaccel_imon=-1.74346E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56355E1
einzel_imon=7.54188E-6
window_vset=0.0E0
window_vmon=2.0325E-1
window_imon=-1.03237E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39208E-4
mask2_vset=0.0E0
mask2_vmon=-1.86438E1
mask2_imon=-6.73084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.9431E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.55797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.26551E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.57657E0
defgridb_imon=6.1574E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33701E1
os_fil1_imon=4.76028E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.36761E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63887E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30367E1
cs_fil1_imon=9.99133E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63314E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66337E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30437E-2
os_fil2_imon=-2.49409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.43245E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.32473E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3019E-1
cs_fil2_imon=-2.57518E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04889E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21811E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.26639E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.17394E-1
res40_imon=-2.40216E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.83E2	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80026E1	-8.34465E-4	-8.79999E1	4.52995E-4	5.10216E-3	9.36747E-2	1.59261E1	-1.98633E1	-1.99672E1	1.51338E1	2.15879E-9	2.52407E-3	2.52407E-3	6.29603E-3	2.26635E-2
2.0E0	1.971E3	4.0E0	3.16E2	1.6E2	-7.286E-2	-8.80024E1	-1.12057E-3	-8.80002E1	1.43051E-4	4.8399E-3	9.38892E-2	1.5875E1	-1.98675E1	-1.99522E1	1.50665E1	2.15613E-9	2.52099E-3	2.52099E-3	6.34037E-3	2.26113E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80024E1	-1.00136E-3	-8.80002E1	1.43051E-4	4.72069E-3	9.3627E-2	1.59141E1	-1.98659E1	-1.99478E1	1.49993E1	2.15887E-9	2.51693E-3	2.51693E-3	6.32978E-3	2.24573E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80028E1	-1.26362E-3	-8.80003E1	5.72205E-4	5.05447E-3	9.36747E-2	1.5896E1	-1.98567E1	-1.99979E1	1.49758E1	2.15817E-9	2.52659E-3	2.52659E-3	6.30212E-3	2.26577E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80026E1	-9.53674E-4	-8.80003E1	6.4373E-4	4.79221E-3	9.36985E-2	1.57518E1	-1.98537E1	-1.9969E1	1.49481E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.26113E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80029E1	-1.12057E-3	-8.80004E1	7.39098E-4	5.00679E-3	9.33886E-2	1.57933E1	-1.9832E1	-1.99768E1	1.52449E1	2.158E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.25524E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80027E1	-1.00136E-3	-8.8E1	7.39098E-4	4.93526E-3	9.36985E-2	1.57831E1	-1.98706E1	-1.99414E1	1.51678E1	2.16175E-9	2.51443E-3	2.51443E-3	6.28552E-3	2.25917E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80028E1	-8.10623E-4	-8.80005E1	1.43051E-4	4.64916E-3	9.3627E-2	1.56395E1	-1.98735E1	-1.9963E1	1.48214E1	2.15808E-9	2.52599E-3	2.52599E-3	6.29665E-3	2.26059E-2
1.2E1	3.6E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80026E1	-9.53674E-4	-8.80004E1	6.4373E-4	4.93526E-3	9.36985E-2	1.57506E1	-1.98651E1	-1.99558E1	1.49758E1	2.15706E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.25524E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80024E1	-9.53674E-4	-8.80003E1	8.58307E-4	4.86374E-3	9.35555E-2	1.59495E1	-1.98567E1	-1.99534E1	1.49938E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.24937E-2
1.4E1	8.9E1	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80024E1	-9.29832E-4	-8.8E1	5.24521E-4	4.81606E-3	9.33886E-2	1.59231E1	-1.98194E1	-1.99924E1	1.48677E1	2.15613E-9	2.51225E-3	2.51225E-3	6.30192E-3	2.27097E-2
1.5E1	1.8E1	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80023E1	-7.86781E-4	-8.79998E1	5.96046E-4	5.05447E-3	9.35793E-2	1.58899E1	-1.9883E1	-1.99703E1	1.50857E1	2.15519E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.25329E-2
1.6E1	1.51E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80025E1	-1.07288E-3	-8.80002E1	5.72205E-4	4.98295E-3	9.3317E-2	1.59801E1	-1.98699E1	-1.99582E1	1.5177E1	2.15716E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.25674E-2
1.7E1	2.03E2	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80023E1	-1.23978E-3	-8.80003E1	3.57628E-4	4.95911E-3	9.36508E-2	1.59819E1	-1.98885E1	-1.99366E1	1.52124E1	2.15613E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.26703E-2
1.8E1	8.25E2	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80026E1	-8.34465E-4	-8.80003E1	2.86102E-4	5.10216E-3	9.35316E-2	1.58528E1	-1.99264E1	-1.9817E1	1.48046E1	2.158E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.2572E-2
1.9E1	9.11E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80022E1	-1.07288E-3	-8.79998E1	3.33786E-4	4.95911E-3	9.34124E-2	1.58113E1	-1.98621E1	-1.99288E1	1.50725E1	2.15425E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.26703E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80025E1	-1.09673E-3	-8.79998E1	4.05312E-4	4.69685E-3	9.34601E-2	1.5771E1	-1.98501E1	-1.99486E1	1.48761E1	2.15982E-9	2.52027E-3	2.52027E-3	6.31858E-3	2.26569E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80025E1	-1.4782E-3	-8.79999E1	5.24521E-4	4.673E-3	9.31263E-2	1.56737E1	-1.98817E1	-1.99518E1	1.49906E1	2.15441E-9	2.51417E-3	2.51417E-3	6.30202E-3	2.26832E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80026E1	-7.62939E-4	-8.79999E1	7.15256E-4	4.48227E-3	9.33647E-2	1.57967E1	-1.98723E1	-1.99473E1	1.51093E1	2.15817E-9	2.52448E-3	2.52448E-3	6.33388E-3	2.26008E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80028E1	-1.14441E-3	-8.8E1	7.62939E-4	4.98295E-3	9.33409E-2	1.58008E1	-1.98541E1	-1.99862E1	1.48334E1	2.15533E-9	2.52384E-3	2.52384E-3	6.31278E-3	2.26639E-2