[Scan]
initial_time=2016-01-27T18:48:58
final_time=2016-01-27T18:49:18
ip_count=19
run=1025
dataset=1
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.77642E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.50942E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=4.07851E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.72696E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=9.46021E-10
mult1=-9.44025E-9
mult2=-2.73698E-9
rf_tmon=-5.09348E-3
rf_agc=3.24243E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=4.90975E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65801E0
bslens_imon=2.48238E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1998E1
lens5a_imon=1.98857E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05057E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53678E1
cs_ef1b_imon=2.87334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02343E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.57023E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00021E0
lens1_imon=1.46622E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65108E1
os_ef1alow_imon=3.01385E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0358E1
cs_ea2_imon=1.52837E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83823E1
cs_ef1a_imon=2.89319E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=4.20702E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11856E1
os_restr1_imon=2.89903E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15196E1
os_ea1_imon=1.88928E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64109E1
os_ef1bup_imon=3.117E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24107E0
cs_ionrep_imon=1.17641E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93615E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.92433E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.04475E-10
tplens_vset=0.0E0
tplens_vmon=-1.6343E0
tplens_imon=-2.39071E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99567E1
iondef3_imon=8.77793E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98729E1
iondef2_imon=9.39308E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=4.72307E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22809E0
ionrepsh_imon=1.75925E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34022E1
lens5b_imon=2.19024E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73943E1
cs_ef2b_imon=3.13023E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.92458E-1
os_ea2_imon=-7.10166E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00833E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72069E1
cs_ef2a_imon=3.19368E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65008E0
os_ef2alow_imon=-2.50605E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.99901E-1
os_ef2bup_imon=-5.51479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10014E1
os_restr2_imon=2.84726E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.29811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0175E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.572E1
iondef1_imon=5.11818E-6
iondef4_vset=1.53E1
iondef4_vmon=1.48174E1
iondef4_imon=5.82733E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.37871E-9
olens1_vset=0.0E0
olens1_vmon=1.04904E-3
olens1_imon=4.19831E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1762E0
cs_ionaccel_imon=-2.1791E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02027E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55945E1
einzel_imon=7.79293E-6
window_vset=0.0E0
window_vmon=1.2251E-1
window_imon=-7.662E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82543E2
mask1_imon=2.38675E-4
mask2_vset=0.0E0
mask2_vmon=-1.8648E1
mask2_imon=-4.89848E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.53205E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=7.096E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.37632E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48974E0
defgridb_imon=6.19274E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33755E1
os_fil1_imon=6.29349E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.38333E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63653E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30465E1
cs_fil1_imon=9.96776E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63059E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66238E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49778E-2
os_fil2_imon=-2.52253E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.24001E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.54371E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30351E-1
cs_fil2_imon=-2.84689E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31786E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.27607E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=6.37782E-1
res40_imon=-2.78629E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.72E2	1.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80034E1	-8.10623E-4	-8.8E1	6.67572E-4	5.29289E-3	9.38177E-2	1.59246E1	-1.98365E1	-1.99975E1	1.46396E1	2.15762E-9	2.52029E-3	2.52029E-3	6.33706E-3	2.26987E-2
2.0E0	1.923E3	0.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80026E1	-9.05991E-4	-8.8E1	6.19888E-4	5.19753E-3	9.35793E-2	1.57156E1	-1.98741E1	-1.99665E1	1.47334E1	2.15636E-9	2.51603E-3	2.51603E-3	6.3074E-3	2.25063E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80025E1	-8.10623E-4	-8.79998E1	5.00679E-4	5.17368E-3	9.35078E-2	1.59002E1	-1.98669E1	-1.99282E1	1.46664E1	2.15505E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.26971E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.8002E1	-9.29832E-4	-8.79999E1	6.4373E-4	5.34058E-3	9.36031E-2	1.57027E1	-1.98782E1	-1.99923E1	1.49408E1	2.158E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25917E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80025E1	-1.00136E-3	-8.8E1	6.19888E-4	5.26905E-3	9.33409E-2	1.57577E1	-1.98678E1	-1.99321E1	1.48979E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.26252E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.10051E-2	-8.80023E1	-1.14441E-3	-8.80001E1	5.72205E-4	5.17368E-3	9.35555E-2	1.59304E1	-1.98651E1	-1.99484E1	1.51469E1	2.15292E-9	2.51369E-3	2.51369E-3	6.3074E-3	2.25958E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80023E1	-9.77516E-4	-8.79998E1	2.38419E-4	5.05447E-3	9.37462E-2	1.57476E1	-1.98236E1	-1.99726E1	1.49481E1	2.15673E-9	2.52338E-3	2.52338E-3	6.3074E-3	2.26495E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.06187E-2	-8.80023E1	-1.19209E-3	-8.79998E1	1.90735E-4	5.126E-3	9.36031E-2	1.58641E1	-1.98611E1	-1.99897E1	1.49738E1	2.158E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.2631E-2
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.00005E-2	-8.80023E1	-9.77516E-4	-8.79997E1	2.14577E-4	5.24521E-3	9.36747E-2	1.56662E1	-1.98803E1	-1.99801E1	1.48906E1	2.15647E-9	2.51575E-3	2.51575E-3	6.323E-3	2.27077E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.10051E-2	-8.80025E1	-9.29832E-4	-8.79998E1	5.72205E-4	5.26905E-3	9.35316E-2	1.57843E1	-1.98543E1	-1.99414E1	1.49608E1	2.15772E-9	2.5257E-3	2.5257E-3	6.3074E-3	2.27748E-2
1.4E1	7.0E1	0.0E0	5.66E2	3.82E2	-7.11597E-2	-8.80026E1	-7.15256E-4	-8.79999E1	1.66893E-4	5.17368E-3	9.36985E-2	1.57826E1	-1.98918E1	-1.99461E1	1.52368E1	2.15992E-9	2.52707E-3	2.52707E-3	6.31278E-3	2.26059E-2
1.5E1	2.3E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80024E1	-9.29832E-4	-8.79999E1	3.57628E-4	5.24521E-3	9.35316E-2	1.59195E1	-1.98182E1	-1.9969E1	1.47211E1	2.15808E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.26445E-2
1.6E1	1.23E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80023E1	-1.28746E-3	-8.80001E1	3.8147E-4	4.93526E-3	9.34601E-2	1.57656E1	-1.98663E1	-1.99384E1	1.49085E1	2.15613E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.25329E-2
1.7E1	2.14E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80026E1	-8.58307E-4	-8.79999E1	5.24521E-4	5.36442E-3	9.32455E-2	1.58744E1	-1.98513E1	-1.99894E1	1.52563E1	2.15425E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.24937E-2
1.8E1	8.11E2	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80028E1	-7.86781E-4	-8.79999E1	4.52995E-4	5.14984E-3	9.33886E-2	1.57494E1	-1.98314E1	-1.99546E1	1.50785E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.25917E-2
1.9E1	9.71E2	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80024E1	-9.05991E-4	-8.80001E1	2.38419E-4	4.98295E-3	9.33647E-2	1.5857E1	-1.98681E1	-2.00051E1	1.50088E1	2.15613E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.26113E-2
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80026E1	-7.15256E-4	-8.80002E1	4.76837E-4	4.95911E-3	9.35078E-2	1.56725E1	-1.98434E1	-1.99684E1	1.49884E1	2.15238E-9	2.51334E-3	2.51334E-3	6.31288E-3	2.25524E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80025E1	-6.4373E-4	-8.80001E1	4.76837E-4	5.05447E-3	9.32693E-2	1.59387E1	-1.98633E1	-1.99276E1	1.50983E1	2.15519E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.26506E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80026E1	-8.82149E-4	-8.80001E1	7.15256E-5	5.07832E-3	9.35555E-2	1.58079E1	-1.98334E1	-1.99992E1	1.52359E1	2.15706E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.25917E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80025E1	-9.77516E-4	-8.79998E1	4.05312E-4	4.55379E-3	9.37223E-2	1.572E1	-1.98729E1	-1.99567E1	1.48174E1	2.15533E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.27607E-2