[Scan]
initial_time=2016-01-27T18:49:25
final_time=2016-01-27T18:49:44
ip_count=19
run=1025
dataset=1
scan=33
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.83946E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.3237E-10
ql2_vset=
ql2_vmon=-1.38283E-3
ql2_imon=5.13351E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.81508E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=9.35805E-10
mult1=-9.73579E-9
mult2=-2.6723E-9
rf_tmon=-5.35303E-3
rf_agc=3.2265E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.87196E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66149E0
bslens_imon=2.57157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04845E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=2.8508E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04656E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.60131E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95868E0
lens1_imon=1.577E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03814E1
cs_ea2_imon=1.53311E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=2.92936E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=4.07958E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10955E1
os_restr1_imon=2.86449E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=1.88458E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.18448E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=2.94234E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=9.7537E-11
tplens_vset=0.0E0
tplens_vmon=-1.62256E0
tplens_imon=-2.2456E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9962E1
iondef3_imon=8.85402E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98741E1
iondef2_imon=9.44511E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98399E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.86279E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=1.78158E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.16525E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13046E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.39237E-1
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.0034E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61437E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.37958E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.858E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.32477E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01893E1
cs_anode2_imon=2.24497E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57094E1
iondef1_imon=5.35709E-6
iondef4_vset=1.53E1
iondef4_vmon=1.47502E1
iondef4_imon=5.24075E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.3653E-9
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=4.61912E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86278E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.26483E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.36582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.50905E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.4425E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33722E1
os_fil1_imon=5.08857E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63593E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3035E1
cs_fil1_imon=9.96846E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62894E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65933E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.38966E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.79714E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.59497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2162E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.26059E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.07946E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.85E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80027E1	-1.04904E-3	-8.80001E1	4.05312E-4	5.14984E-3	9.34362E-2	1.57759E1	-1.9847E1	-1.99894E1	1.5144E1	2.159E-9	2.52492E-3	2.52492E-3	6.32356E-3	2.26639E-2
2.0E0	1.935E3	2.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80025E1	-1.09673E-3	-8.80002E1	6.91414E-4	4.74453E-3	9.39131E-2	1.56569E1	-1.98798E1	-1.99561E1	1.49535E1	2.15613E-9	2.52209E-3	2.52209E-3	6.28552E-3	2.27097E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80022E1	-8.34465E-4	-8.79998E1	4.52995E-4	4.8399E-3	9.35793E-2	1.58509E1	-1.98659E1	-1.99626E1	1.50222E1	2.15381E-9	2.52613E-3	2.52613E-3	6.3074E-3	2.27638E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80022E1	-1.19209E-3	-8.8E1	5.48363E-4	4.57764E-3	9.3627E-2	1.59922E1	-1.98567E1	-1.99504E1	1.4875E1	2.15685E-9	2.51952E-3	2.51952E-3	6.33021E-3	2.27249E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80025E1	-1.57356E-3	-8.80001E1	3.09944E-4	4.81606E-3	9.36985E-2	1.58882E1	-1.98669E1	-1.9966E1	1.51383E1	2.158E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.27295E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80026E1	-1.23978E-3	-8.80001E1	0.0E0	4.45843E-3	9.34601E-2	1.56527E1	-1.98549E1	-1.99894E1	1.47986E1	2.15613E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.26113E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80028E1	-1.40667E-3	-8.80001E1	1.43051E-4	4.98295E-3	9.33647E-2	1.56671E1	-1.98543E1	-1.9936E1	1.48418E1	2.15425E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.26506E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80026E1	-1.14441E-3	-8.79999E1	4.29153E-4	4.93526E-3	9.34601E-2	1.57128E1	-1.98801E1	-1.99558E1	1.52257E1	2.15894E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.2572E-2
1.2E1	5.3E1	1.0E0	4.85E2	3.23E2	-7.43285E-2	-8.80025E1	-1.35899E-3	-8.79996E1	1.66893E-4	4.86374E-3	9.34839E-2	1.57283E1	-1.98629E1	-1.9952E1	1.52701E1	2.15425E-9	2.52867E-3	2.52867E-3	6.3074E-3	2.26703E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80027E1	-9.77516E-4	-8.79996E1	2.14577E-4	4.79221E-3	9.36747E-2	1.56929E1	-1.98681E1	-1.99246E1	1.51836E1	2.15533E-9	2.53031E-3	2.53031E-3	6.31817E-3	2.27802E-2
1.4E1	6.7E1	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80025E1	-8.34465E-4	-8.8E1	3.8147E-4	5.00679E-3	9.32693E-2	1.59189E1	-1.98507E1	-2.00171E1	1.49836E1	2.16081E-9	2.52318E-3	2.52318E-3	6.34037E-3	2.27492E-2
1.5E1	2.3E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80024E1	-1.3113E-3	-8.80002E1	5.24521E-4	5.29289E-3	9.32932E-2	1.59737E1	-1.98369E1	-1.99349E1	1.50294E1	2.158E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.2769E-2
1.6E1	1.33E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80025E1	-1.54972E-3	-8.8E1	3.8147E-4	4.95911E-3	9.34601E-2	1.59159E1	-1.98723E1	-1.99608E1	1.48743E1	2.159E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.26445E-2
1.7E1	1.94E2	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80026E1	-1.38283E-3	-8.79999E1	3.57628E-4	4.93526E-3	9.3627E-2	1.58564E1	-1.98633E1	-1.99468E1	1.48064E1	2.15992E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.27219E-2
1.8E1	7.89E2	2.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80026E1	-1.14441E-3	-8.79997E1	4.05312E-4	4.98295E-3	9.31978E-2	1.56485E1	-1.98549E1	-1.99666E1	1.47577E1	2.15613E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.2769E-2
1.9E1	8.6E2	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80026E1	-7.86781E-4	-8.79998E1	6.19888E-4	5.17368E-3	9.32455E-2	1.58044E1	-1.98505E1	-1.99532E1	1.51638E1	2.15519E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.25524E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80023E1	-7.86781E-4	-8.80001E1	5.00679E-4	5.05447E-3	9.32932E-2	1.59934E1	-1.98741E1	-1.99282E1	1.50071E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.27026E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80024E1	-1.09673E-3	-8.80005E1	2.14577E-4	4.8399E-3	9.34124E-2	1.57945E1	-1.98747E1	-1.99684E1	1.51921E1	2.15706E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.2769E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80023E1	-1.19209E-3	-8.80001E1	2.14577E-4	5.05447E-3	9.32693E-2	1.58699E1	-1.98505E1	-1.99614E1	1.48611E1	2.14958E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.2631E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80027E1	-1.38283E-3	-8.80004E1	2.86102E-4	5.17368E-3	9.33647E-2	1.57094E1	-1.98741E1	-1.9962E1	1.47502E1	2.15808E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.26059E-2