[Scan]
initial_time=2016-01-27T18:49:51
final_time=2016-01-27T18:50:11
ip_count=19
run=1025
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.79345E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.63471E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=4.21202E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.72613E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=9.47785E-10
mult1=-9.42733E-9
mult2=-2.68069E-9
rf_tmon=-4.08584E-3
rf_agc=3.40005E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=4.94337E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66739E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=2.85672E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=2.59989E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99644E0
lens1_imon=1.44604E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6466E1
os_ef1alow_imon=2.99121E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.54232E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=2.93248E-5
olens2_vset=0.0E0
olens2_vmon=1.64509E-3
olens2_imon=4.14276E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.87583E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=1.89767E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63537E1
os_ef1bup_imon=3.08156E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23381E0
cs_ionrep_imon=1.19864E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.96306E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=9.00507E-11
tplens_vset=0.0E0
tplens_vmon=-1.65087E0
tplens_imon=-2.63493E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99312E1
iondef3_imon=8.8611E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98729E1
iondef2_imon=9.55483E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.75705E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2751E0
ionrepsh_imon=1.77875E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33941E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74704E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26849E-1
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71014E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62392E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.57845E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11019E1
os_restr2_imon=2.85984E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.2922E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.2409E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58077E1
iondef1_imon=5.21905E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51085E1
iondef4_imon=5.37332E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.41808E-9
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=3.99792E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-1.86216E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47233E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=2.09577E-1
window_imon=-1.02462E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.38969E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-4.095E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.5409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.77993E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.20112E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.39525E0
defgridb_imon=6.28441E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33732E1
os_fil1_imon=4.53617E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.54227E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63315E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30284E1
cs_fil1_imon=9.9898E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62233E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.73291E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31899E-1
cs_fil2_imon=-2.47805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21557E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.26577E-2
chamber_ion_pmon=2.15455E-9
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.2234E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.23E2	1.0E0	1.47E2	4.1E1	-7.47923E-2	-8.80025E1	-7.86781E-4	-8.80004E1	4.29153E-4	4.88758E-3	9.34839E-2	1.5972E1	-1.98863E1	-1.99517E1	1.51146E1	2.16085E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.25289E-2
2.0E0	1.908E3	2.0E0	3.16E2	1.6E2	-7.44059E-2	-8.80024E1	-5.96046E-4	-8.80002E1	4.52995E-4	4.91142E-3	9.3317E-2	1.59674E1	-1.98786E1	-1.9972E1	1.4709E1	2.1584E-9	2.52224E-3	2.52224E-3	6.34261E-3	2.26403E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80023E1	-4.52995E-4	-8.8E1	6.4373E-4	4.86374E-3	9.34124E-2	1.57708E1	-1.98393E1	-1.99655E1	1.46877E1	2.15855E-9	2.5207E-3	2.5207E-3	6.30136E-3	2.25981E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.54877E-2	-8.80025E1	-5.72205E-4	-8.80002E1	4.29153E-4	5.14984E-3	9.35316E-2	1.58044E1	-1.986E1	-1.99585E1	1.50016E1	2.15441E-9	2.52599E-3	2.52599E-3	6.33436E-3	2.25482E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.45602E-2	-8.80024E1	-5.48363E-4	-8.80001E1	3.09944E-4	4.79221E-3	9.34839E-2	1.59795E1	-1.98639E1	-1.99648E1	1.5094E1	2.15716E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.26445E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.80024E1	-1.04904E-3	-8.79999E1	1.43051E-4	5.07832E-3	9.35793E-2	1.56767E1	-1.98705E1	-2.00045E1	1.52383E1	2.15706E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.25329E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80026E1	-1.12057E-3	-8.79997E1	2.38419E-4	4.98295E-3	9.33409E-2	1.57983E1	-1.98394E1	-1.99639E1	1.51526E1	2.158E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.2631E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80024E1	-1.14441E-3	-8.79999E1	2.86102E-4	5.29289E-3	9.34601E-2	1.58056E1	-1.98655E1	-1.99426E1	1.48949E1	2.15546E-9	2.51919E-3	2.51919E-3	6.3074E-3	2.25629E-2
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80023E1	-1.00136E-3	-8.79999E1	4.76837E-4	5.62668E-3	9.34839E-2	1.58281E1	-1.9823E1	-1.99774E1	1.50719E1	2.156E-9	2.51581E-3	2.51581E-3	6.31299E-3	2.25569E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80028E1	-6.67572E-4	-8.80003E1	5.48363E-4	5.10216E-3	9.31978E-2	1.57602E1	-1.98573E1	-1.99474E1	1.50965E1	2.15425E-9	2.52209E-3	2.52209E-3	6.30192E-3	2.2572E-2
1.4E1	8.1E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.8003E1	-8.10623E-4	-8.79999E1	9.77516E-4	5.31673E-3	9.32693E-2	1.58197E1	-1.9867E1	-1.99608E1	1.47728E1	2.15613E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.269E-2
1.5E1	2.5E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80027E1	-9.77516E-4	-8.8E1	5.24521E-4	5.17368E-3	9.32932E-2	1.57074E1	-1.98609E1	-1.99624E1	1.47592E1	2.15533E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.25289E-2
1.6E1	1.37E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80026E1	-6.19888E-4	-8.79997E1	7.15256E-4	5.22137E-3	9.3627E-2	1.58581E1	-1.9883E1	-1.99738E1	1.50773E1	2.15987E-9	2.51771E-3	2.51771E-3	6.32936E-3	2.25917E-2
1.7E1	1.87E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80028E1	-7.15256E-4	-8.79998E1	7.86781E-4	5.07832E-3	9.33409E-2	1.58871E1	-1.98361E1	-1.99775E1	1.51301E1	2.15716E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.27219E-2
1.8E1	7.84E2	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80027E1	-5.72205E-4	-8.79999E1	3.57628E-4	5.00679E-3	9.33647E-2	1.5756E1	-1.98735E1	-1.9957E1	1.52329E1	2.15982E-9	2.5225E-3	2.5225E-3	6.34661E-3	2.26369E-2
1.9E1	9.04E2	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80029E1	-9.53674E-4	-8.80002E1	5.72205E-4	4.91142E-3	9.33886E-2	1.5779E1	-1.9844E1	-1.99296E1	1.50412E1	2.15894E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.26506E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80026E1	-6.91414E-4	-8.80002E1	4.29153E-4	5.17368E-3	9.34601E-2	1.59654E1	-1.98706E1	-1.99526E1	1.51362E1	2.15533E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.27607E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80025E1	-6.19888E-4	-8.79999E1	5.48363E-4	4.86374E-3	9.36031E-2	1.59244E1	-1.98257E1	-1.99598E1	1.50731E1	2.159E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.25674E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80027E1	-9.29832E-4	-8.80002E1	2.38419E-4	4.57764E-3	9.34124E-2	1.57983E1	-1.98596E1	-1.99587E1	1.48504E1	2.15505E-9	2.52139E-3	2.52139E-3	6.31299E-3	2.26369E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80026E1	-1.00136E-3	-8.79999E1	3.09944E-4	4.98295E-3	9.35555E-2	1.58077E1	-1.98729E1	-1.99312E1	1.51085E1	2.15455E-9	2.52131E-3	2.52131E-3	6.3074E-3	2.26577E-2