[Scan]
initial_time=2016-01-27T18:50:18
final_time=2016-01-27T18:50:38
ip_count=19
run=1025
dataset=1
scan=35
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77727E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.33097E-10
ql2_vset=
ql2_vmon=-1.04904E-3
ql2_imon=4.26555E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.77426E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=9.01175E-10
mult1=-1.11973E-8
mult2=-3.07791E-9
rf_tmon=-2.30739E-3
rf_agc=3.61394E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=4.95887E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65644E0
bslens_imon=2.41995E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19967E1
lens5a_imon=1.99192E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05076E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=2.86471E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02173E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05376E1
cs_ea1_imon=2.59921E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99136E0
lens1_imon=1.55437E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64411E1
os_ef1alow_imon=2.96202E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.53132E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84029E1
cs_ef1a_imon=2.94429E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=4.05812E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.87166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15381E1
os_ea1_imon=1.86017E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63757E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25384E0
cs_ionrep_imon=1.19169E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.96132E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=9.50933E-11
tplens_vset=0.0E0
tplens_vmon=-1.58755E0
tplens_imon=-2.94969E-7
iondef3_vset=-2.0E1
iondef3_vmon=-2.00045E1
iondef3_imon=8.72578E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.99486E1
iondef2_imon=9.4245E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98255E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=4.71306E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30772E0
ionrepsh_imon=1.76805E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33797E1
lens5b_imon=2.16399E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7449E1
cs_ef2b_imon=3.11041E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.23721E-1
os_ea2_imon=-3.15826E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59901E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.13246E-1
os_ef2bup_imon=-5.16712E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=2.86818E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.29998E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.24333E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56677E1
iondef1_imon=4.96105E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51878E1
iondef4_imon=5.18913E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.39824E-9
olens1_vset=0.0E0
olens1_vmon=1.50204E-3
olens1_imon=3.9326E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13535E0
cs_ionaccel_imon=-1.86911E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=1.87567E-1
window_imon=-8.1958E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39098E-4
mask2_vset=0.0E0
mask2_vmon=-1.86408E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.49173E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.69916E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.31792E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.60981E0
defgridb_imon=6.17425E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33746E1
os_fil1_imon=4.0728E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.75078E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63331E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30261E1
cs_fil1_imon=9.99055E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62864E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65579E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.65548E-2
os_fil2_imon=-2.53018E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.48146E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66329E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30401E-1
cs_fil2_imon=-1.97993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.97206E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21681E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.54573E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.04E2	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80025E1	-1.14441E-3	-8.79998E1	5.00679E-4	5.07832E-3	9.34124E-2	1.58467E1	-1.98747E1	-1.99634E1	1.50971E1	2.15825E-9	2.51783E-3	2.51783E-3	6.323E-3	2.2689E-2
2.0E0	1.958E3	0.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80028E1	-8.58307E-4	-8.79997E1	3.8147E-4	4.8399E-3	9.36985E-2	1.57723E1	-1.9874E1	-1.99689E1	1.50378E1	2.15696E-9	2.51581E-3	2.51581E-3	6.32418E-3	2.27172E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80026E1	-9.05991E-4	-8.79999E1	3.33786E-4	4.98295E-3	9.34601E-2	1.57153E1	-1.98499E1	-1.99355E1	1.50623E1	2.15782E-9	2.51611E-3	2.51611E-3	6.3131E-3	2.26431E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80028E1	-8.10623E-4	-8.8E1	4.52995E-4	5.24521E-3	9.36508E-2	1.57098E1	-1.98386E1	-1.9966E1	1.48538E1	2.15349E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.25289E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80027E1	-1.14441E-3	-8.79997E1	5.72205E-4	5.00679E-3	9.34124E-2	1.5863E1	-1.98549E1	-2.00087E1	1.51289E1	2.15894E-9	2.51662E-3	2.51662E-3	6.29098E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.8003E1	-8.34465E-4	-8.80003E1	5.00679E-4	4.76837E-3	9.36985E-2	1.59874E1	-1.98422E1	-1.998E1	1.481E1	2.15145E-9	2.52647E-3	2.52647E-3	6.33486E-3	2.26703E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80028E1	-7.39098E-4	-8.79999E1	4.76837E-4	5.10216E-3	9.33886E-2	1.59573E1	-1.98711E1	-1.99666E1	1.518E1	2.158E-9	2.52099E-3	2.52099E-3	6.30192E-3	2.25524E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80025E1	-6.19888E-4	-8.79999E1	3.57628E-4	5.05447E-3	9.34124E-2	1.59447E1	-1.98573E1	-1.99678E1	1.50262E1	2.15887E-9	2.52585E-3	2.52585E-3	6.29067E-3	2.27373E-2
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80024E1	-9.77516E-4	-8.80002E1	6.19888E-4	5.03063E-3	9.37223E-2	1.58756E1	-1.98771E1	-1.9969E1	1.48448E1	2.16081E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.27492E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80025E1	-1.16825E-3	-8.80001E1	6.67572E-4	5.10216E-3	9.36747E-2	1.57212E1	-1.98549E1	-1.99354E1	1.51217E1	2.15519E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.2631E-2
1.4E1	8.2E1	0.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80024E1	-6.91414E-4	-8.80001E1	5.72205E-4	5.07832E-3	9.39131E-2	1.56677E1	-1.98164E1	-1.99588E1	1.4971E1	2.15332E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.28086E-2
1.5E1	3.6E1	0.0E0	6.06E2	4.11E2	-7.44831E-2	-8.80024E1	-7.62939E-4	-8.80001E1	4.76837E-4	5.17368E-3	9.37939E-2	1.59471E1	-1.98627E1	-1.9984E1	1.49193E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.2572E-2
1.6E1	1.48E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80024E1	-1.12057E-3	-8.79999E1	4.05312E-4	4.62532E-3	9.34362E-2	1.5962E1	-1.98576E1	-1.99863E1	1.49622E1	2.15613E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.25917E-2
1.7E1	2.01E2	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80021E1	-1.12057E-3	-8.79999E1	6.19888E-4	4.62532E-3	9.32693E-2	1.58434E1	-1.98659E1	-1.99676E1	1.51101E1	2.15825E-9	2.52717E-3	2.52717E-3	6.3126E-3	2.25215E-2
1.8E1	7.94E2	0.0E0	7.27E2	5.0E2	-7.42513E-2	-8.80026E1	-1.14441E-3	-8.79997E1	6.19888E-4	4.93526E-3	9.37223E-2	1.56712E1	-1.98258E1	-1.99584E1	1.50145E1	2.1549E-9	2.52066E-3	2.52066E-3	6.3074E-3	2.25411E-2
1.9E1	9.44E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80025E1	-1.09673E-3	-8.80002E1	6.19888E-4	4.48227E-3	9.33886E-2	1.57269E1	-1.98591E1	-1.9959E1	1.49439E1	2.15825E-9	2.51886E-3	2.51886E-3	6.31779E-3	2.26517E-2
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80025E1	-9.05991E-4	-8.8E1	3.8147E-4	4.72069E-3	9.34601E-2	1.5712E1	-1.98764E1	-1.99744E1	1.5183E1	2.15872E-9	2.52454E-3	2.52454E-3	6.31902E-3	2.2587E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80026E1	-8.34465E-4	-8.8E1	5.48363E-4	4.72069E-3	9.33886E-2	1.57687E1	-1.98851E1	-1.99355E1	1.50978E1	2.15533E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.25674E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80026E1	-1.07288E-3	-8.80001E1	8.10623E-4	4.52995E-3	9.36985E-2	1.56797E1	-1.98669E1	-1.99372E1	1.52665E1	2.15907E-9	2.52448E-3	2.52448E-3	6.33388E-3	2.26766E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80026E1	-1.04904E-3	-8.80001E1	5.24521E-4	4.88758E-3	9.3317E-2	1.56677E1	-1.99486E1	-2.00045E1	1.51878E1	2.15894E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.27295E-2