[Scan]
initial_time=2016-01-27T18:50:45
final_time=2016-01-27T18:51:04
ip_count=19
run=1025
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.71971E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.02567E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=4.44174E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.69605E-9
ql4_vset=
ql4_vmon=6.19888E-4
ql4_imon=9.20379E-10
mult1=-1.08842E-8
mult2=-2.86832E-9
rf_tmon=-2.57777E-3
rf_agc=3.52082E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.24521E-3
ql5_imon=4.78458E-10
bslens_vset=-6.2E0
bslens_vmon=-6.71802E0
bslens_imon=2.57836E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19124E1
lens5a_imon=1.96972E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05275E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53729E1
cs_ef1b_imon=2.86818E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02196E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04736E1
cs_ea1_imon=2.60139E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95776E0
lens1_imon=1.30707E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6446E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04081E1
cs_ea2_imon=1.5335E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84313E1
cs_ef1a_imon=2.93306E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=4.11093E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11042E1
os_restr1_imon=2.87021E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=1.87556E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63527E1
os_ef1bup_imon=3.09564E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24481E0
cs_ionrep_imon=1.19621E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93138E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01795E1
cs_anode1_imon=2.95414E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.29259E-10
tplens_vset=0.0E0
tplens_vmon=-1.62819E0
tplens_imon=-1.11226E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99834E1
iondef3_imon=8.72827E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98585E1
iondef2_imon=9.18514E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02908E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.56071E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24813E0
ionrepsh_imon=1.79452E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3346E1
lens5b_imon=2.18902E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.12726E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.17844E-1
os_ea2_imon=-8.3825E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71271E1
cs_ef2a_imon=3.18038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60529E0
os_ef2alow_imon=-2.4848E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30525E-1
os_ef2bup_imon=-5.27833E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10988E1
os_restr2_imon=2.86575E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.28617E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.2515E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56761E1
iondef1_imon=5.07726E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50431E1
iondef4_imon=5.40112E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.37859E-9
olens1_vset=0.0E0
olens1_vmon=1.16825E-3
olens1_imon=3.9866E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16055E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47263E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56378E1
einzel_imon=7.67162E-6
window_vset=0.0E0
window_vmon=2.27629E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86283E1
mask2_imon=-6.60297E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92615E3
multa_neg_imon=7.19874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.4439E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.46094E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47185E0
defgridb_imon=6.21745E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33745E1
os_fil1_imon=4.94065E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.75175E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62998E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30286E1
cs_fil1_imon=9.99304E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62635E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65815E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45826E-2
os_fil2_imon=-2.37089E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.18617E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75864E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.28305E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21628E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.26059E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.58241E-1
res40_imon=-2.54157E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.78E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80029E1	-1.19209E-3	-8.79999E1	1.90735E-4	4.62532E-3	9.36985E-2	1.56752E1	-1.98464E1	-1.99502E1	1.48896E1	2.15649E-9	2.51829E-3	2.51829E-3	6.28329E-3	2.275E-2
2.0E0	1.934E3	1.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80026E1	-1.0252E-3	-8.80002E1	3.33786E-4	4.8399E-3	9.34839E-2	1.56606E1	-1.98741E1	-1.99536E1	1.51779E1	2.15716E-9	2.51417E-3	2.51417E-3	6.3074E-3	2.26639E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80027E1	-5.72205E-4	-8.80003E1	4.05312E-4	4.60148E-3	9.39369E-2	1.57696E1	-1.98541E1	-1.99732E1	1.48209E1	2.15696E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.26169E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80027E1	-3.09944E-4	-8.80001E1	4.52995E-4	5.05447E-3	9.3317E-2	1.58696E1	-1.98891E1	-1.99732E1	1.51109E1	2.15441E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.25674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80026E1	-9.77516E-4	-8.80003E1	1.66893E-4	5.14984E-3	9.34124E-2	1.59675E1	-1.98495E1	-1.9954E1	1.51698E1	2.15519E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.25524E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80025E1	-7.62939E-4	-8.80001E1	1.66893E-4	5.03063E-3	9.34124E-2	1.59471E1	-1.98511E1	-1.99756E1	1.48695E1	2.15425E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.25524E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80028E1	-6.91414E-4	-8.79999E1	4.76837E-4	5.36442E-3	9.34601E-2	1.59621E1	-1.98789E1	-2.00003E1	1.50418E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.25482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80027E1	-1.26362E-3	-8.80003E1	3.8147E-4	5.05447E-3	9.32455E-2	1.59568E1	-1.98535E1	-1.99228E1	1.50396E1	2.159E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.25482E-2
1.2E1	4.5E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80026E1	-1.21593E-3	-8.80002E1	1.19209E-4	5.26905E-3	9.35555E-2	1.57842E1	-1.98584E1	-1.99589E1	1.50908E1	2.15913E-9	2.52613E-3	2.52613E-3	6.29703E-3	2.27264E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80027E1	-1.04904E-3	-8.80003E1	4.05312E-4	4.72069E-3	9.34124E-2	1.56485E1	-1.98543E1	-1.99973E1	1.49367E1	2.15685E-9	2.52179E-3	2.52179E-3	6.3245E-3	2.25208E-2
1.4E1	7.0E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80025E1	-9.29832E-4	-8.80003E1	5.24521E-4	4.74453E-3	9.3627E-2	1.56689E1	-1.98302E1	-1.9984E1	1.49572E1	2.15987E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.26113E-2
1.5E1	3.8E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80025E1	-1.04904E-3	-8.80004E1	5.00679E-4	5.126E-3	9.34124E-2	1.57344E1	-1.9841E1	-1.99816E1	1.49782E1	2.15894E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.2572E-2
1.6E1	1.68E2	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80024E1	-1.19209E-3	-8.80001E1	5.48363E-4	5.05447E-3	9.35793E-2	1.57993E1	-1.98428E1	-1.99408E1	1.51524E1	2.15706E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.26703E-2
1.7E1	1.78E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80024E1	-1.07288E-3	-8.80004E1	6.4373E-4	5.48363E-3	9.36508E-2	1.59735E1	-1.98687E1	-1.996E1	1.48238E1	2.158E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.27295E-2
1.8E1	8.2E2	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80026E1	-1.00136E-3	-8.80003E1	5.72205E-4	5.65052E-3	9.35793E-2	1.58449E1	-1.99047E1	-1.99282E1	1.50959E1	2.159E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.27413E-2
1.9E1	9.15E2	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80026E1	-1.21593E-3	-8.80002E1	2.38419E-4	5.36442E-3	9.34601E-2	1.5744E1	-1.98368E1	-1.9981E1	1.48929E1	2.156E-9	2.51915E-3	2.51915E-3	6.31858E-3	2.26971E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80025E1	-8.34465E-4	-8.80003E1	3.57628E-4	5.126E-3	9.34362E-2	1.58799E1	-1.98741E1	-1.99425E1	1.50535E1	2.158E-9	2.5199E-3	2.5199E-3	6.28552E-3	2.27295E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80023E1	-6.91414E-4	-8.80002E1	3.09944E-4	5.19753E-3	9.36508E-2	1.56653E1	-1.98561E1	-1.99492E1	1.49521E1	2.15808E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.27607E-2
2.2E1	4.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80025E1	-8.34465E-4	-8.80003E1	4.05312E-4	5.126E-3	9.34362E-2	1.57961E1	-1.98493E1	-1.99832E1	1.49397E1	2.15613E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.28483E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80023E1	-8.34465E-4	-8.80005E1	6.19888E-4	5.24521E-3	9.32932E-2	1.56761E1	-1.98585E1	-1.99834E1	1.50431E1	2.15533E-9	2.52707E-3	2.52707E-3	6.31278E-3	2.26059E-2