[Scan]
initial_time=2016-01-27T18:51:39
final_time=2016-01-27T18:51:59
ip_count=19
run=1025
dataset=1
scan=38
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.84891E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-6.3988E-10
ql2_vset=
ql2_vmon=-1.14441E-3
ql2_imon=4.26471E-10
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-1.62208E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.97074E-10
mult1=-9.31897E-9
mult2=-2.69665E-9
rf_tmon=-4.72271E-3
rf_agc=3.25886E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.06294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.47955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04966E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53887E1
cs_ef1b_imon=2.85116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02255E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=2.59069E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02534E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03578E1
cs_ea2_imon=1.53382E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=2.94017E-5
olens2_vset=0.0E0
olens2_vmon=1.35899E-3
olens2_imon=4.18138E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11135E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=1.87573E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.06775E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=1.20749E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.9319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=2.96468E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.32906E-10
tplens_vset=0.0E0
tplens_vmon=-1.65028E0
tplens_imon=-3.59057E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99858E1
iondef3_imon=8.67351E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98302E1
iondef2_imon=9.21504E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98448E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=4.80819E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28572E0
ionrepsh_imon=1.75645E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.20419E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.99124E-1
os_ea2_imon=-5.96198E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63059E0
os_ef2alow_imon=-2.55824E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29549E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.86701E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.25146E-5
iondef1_vset=1.6E1
iondef1_vmon=1.56497E1
iondef1_imon=4.98191E-6
iondef4_vset=1.53E1
iondef4_vmon=1.47229E1
iondef4_imon=5.22633E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.3922E-9
olens1_vset=0.0E0
olens1_vmon=9.77516E-4
olens1_imon=3.85499E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56021E1
einzel_imon=7.75992E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39239E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-6.2651E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.69498E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.24359E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.55471E0
defgridb_imon=6.0048E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33736E1
os_fil1_imon=3.91127E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90567E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62952E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3024E1
cs_fil1_imon=9.97981E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63057E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6543E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55983E-2
os_fil2_imon=-2.36564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.61694E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.87086E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.11937E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.09747E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21615E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.25867E-2
chamber_ion_pmon=2.16085E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.56289E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.81E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80029E1	-1.23978E-3	-8.79997E1	3.33786E-4	5.45979E-3	9.31263E-2	1.58492E1	-1.98957E1	-1.99582E1	1.47728E1	2.15165E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.26832E-2
2.0E0	1.884E3	4.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80025E1	-1.21593E-3	-8.79999E1	2.86102E-4	5.45979E-3	9.33886E-2	1.57638E1	-1.98344E1	-1.99474E1	1.51247E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.26832E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80028E1	-8.82149E-4	-8.79999E1	3.33786E-4	5.34058E-3	9.34124E-2	1.59275E1	-1.98683E1	-1.99796E1	1.50456E1	2.15696E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.26369E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80026E1	-7.15256E-4	-8.79999E1	4.29153E-4	5.4121E-3	9.35078E-2	1.57634E1	-1.98533E1	-1.99714E1	1.50046E1	2.15997E-9	2.52871E-3	2.52871E-3	6.31798E-3	2.2544E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80024E1	-9.77516E-4	-8.8E1	3.09944E-4	4.93526E-3	9.37939E-2	1.57378E1	-1.99055E1	-1.99618E1	1.51841E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80026E1	-6.91414E-4	-8.79999E1	1.66893E-4	5.10216E-3	9.35316E-2	1.58993E1	-1.98637E1	-1.99481E1	1.50214E1	2.15647E-9	2.51679E-3	2.51679E-3	6.33341E-3	2.25958E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80025E1	-9.29832E-4	-8.80001E1	3.57628E-4	5.29289E-3	9.35793E-2	1.58017E1	-1.98573E1	-1.99558E1	1.49241E1	2.15977E-9	2.51838E-3	2.51838E-3	6.34164E-3	2.26839E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80024E1	-9.53674E-4	-8.80002E1	4.29153E-4	5.07832E-3	9.34601E-2	1.57582E1	-1.98275E1	-1.99464E1	1.49419E1	2.15613E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.26703E-2
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80026E1	-1.07288E-3	-8.79999E1	3.57628E-4	5.14984E-3	9.36031E-2	1.57622E1	-1.98349E1	-1.99279E1	1.50376E1	2.15647E-9	2.51575E-3	2.51575E-3	6.28667E-3	2.26517E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80027E1	-8.82149E-4	-8.8E1	9.53674E-5	5.05447E-3	9.34601E-2	1.58528E1	-1.98266E1	-1.99702E1	1.50148E1	2.15696E-9	2.51693E-3	2.51693E-3	6.33538E-3	2.25968E-2
1.4E1	8.5E1	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80026E1	-7.39098E-4	-8.79998E1	4.52995E-4	5.17368E-3	9.35316E-2	1.56629E1	-1.98675E1	-1.993E1	1.48629E1	2.158E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.2631E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80026E1	-6.67572E-4	-8.8E1	4.76837E-4	5.05447E-3	9.36508E-2	1.58642E1	-1.98681E1	-1.99678E1	1.51115E1	2.15533E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.26059E-2
1.6E1	1.18E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80026E1	-9.29832E-4	-8.79997E1	5.48363E-4	4.74453E-3	9.34839E-2	1.57386E1	-1.9841E1	-1.99216E1	1.48887E1	2.16078E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.25569E-2
1.7E1	2.06E2	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80026E1	-7.39098E-4	-8.79999E1	1.66893E-4	4.88758E-3	9.35793E-2	1.57656E1	-1.98368E1	-1.99888E1	1.5177E1	2.15519E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.26113E-2
1.8E1	7.33E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80026E1	-1.00136E-3	-8.8E1	3.8147E-4	4.52995E-3	9.35793E-2	1.59524E1	-1.98871E1	-1.99579E1	1.49199E1	2.15808E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.27026E-2
1.9E1	9.18E2	1.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80027E1	-8.34465E-4	-8.80001E1	6.19888E-4	4.72069E-3	9.3627E-2	1.57374E1	-1.98555E1	-1.99306E1	1.49067E1	2.15519E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.26703E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80024E1	-8.10623E-4	-8.80002E1	6.19888E-4	5.126E-3	9.36031E-2	1.57512E1	-1.98699E1	-1.99612E1	1.50773E1	2.15613E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80028E1	-8.82149E-4	-8.79997E1	6.4373E-4	4.91142E-3	9.3627E-2	1.58244E1	-1.98328E1	-1.99921E1	1.49761E1	2.15716E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.25289E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80028E1	-1.00136E-3	-8.79998E1	3.33786E-4	4.93526E-3	9.36747E-2	1.56743E1	-1.98573E1	-1.99324E1	1.48689E1	2.15519E-9	2.52428E-3	2.52428E-3	6.32386E-3	2.25917E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80028E1	-1.14441E-3	-8.79996E1	3.09944E-4	4.86374E-3	9.35793E-2	1.56497E1	-1.98302E1	-1.99858E1	1.47229E1	2.16085E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.25867E-2