[Scan]
initial_time=2016-01-27T18:52:06
final_time=2016-01-27T18:52:25
ip_count=19
run=1025
dataset=1
scan=39
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.8161E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.15537E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.46975E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.67649E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=9.22501E-10
mult1=-1.00786E-8
mult2=-2.57823E-9
rf_tmon=-5.19966E-3
rf_agc=3.23712E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.84943E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69197E0
bslens_imon=2.63509E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=2.8522E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02359E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=2.59844E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02393E0
lens1_imon=1.39859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.99086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.55192E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84139E1
cs_ef1a_imon=2.93421E-5
olens2_vset=0.0E0
olens2_vmon=9.77516E-4
olens2_imon=4.05407E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=2.87131E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=1.87384E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2551E0
cs_ionrep_imon=1.18746E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.96341E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99984E1
olens4_imon=1.20258E-10
tplens_vset=0.0E0
tplens_vmon=-1.67027E0
tplens_imon=-2.16432E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9936E1
iondef3_imon=8.9005E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98458E1
iondef2_imon=9.50613E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02882E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.78125E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.78624E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.18206E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.36102E-1
os_ea2_imon=-4.83199E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71362E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60654E0
os_ef2alow_imon=-2.64061E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4684E-1
os_ef2bup_imon=-5.12889E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=2.86714E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01896E1
cs_anode2_imon=2.25133E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57595E1
iondef1_imon=5.39648E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49958E1
iondef4_imon=5.0814E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.43977E-9
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=4.11809E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18111E0
cs_ionaccel_imon=-1.61541E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47146E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56463E1
einzel_imon=7.96239E-6
window_vset=0.0E0
window_vmon=2.33904E-1
window_imon=-1.0837E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-7.43124E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.51259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.47436E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.23861E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52764E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33709E1
os_fil1_imon=4.09018E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.06935E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30278E1
cs_fil1_imon=9.98082E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63548E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65358E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66699E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.52404E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.14283E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.94483E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21698E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.25867E-2
chamber_ion_pmon=2.15257E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.53414E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.79E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.8003E1	-1.00136E-3	-8.8E1	4.29153E-4	4.69685E-3	9.35316E-2	1.59625E1	-1.98771E1	-1.99484E1	1.49109E1	2.15808E-9	2.51417E-3	2.51417E-3	6.32896E-3	2.25674E-2
2.0E0	1.891E3	3.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80028E1	-9.53674E-4	-8.80002E1	4.29153E-4	4.74453E-3	9.34601E-2	1.59342E1	-1.98557E1	-1.9961E1	1.50732E1	2.15987E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.25917E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80028E1	-1.16825E-3	-8.8E1	6.19888E-4	5.00679E-3	9.34839E-2	1.59319E1	-1.98549E1	-1.99616E1	1.49835E1	2.15219E-9	2.51136E-3	2.51136E-3	6.3074E-3	2.26169E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80027E1	-9.05991E-4	-8.80002E1	4.05312E-4	5.17368E-3	9.32932E-2	1.57925E1	-1.98383E1	-1.99921E1	1.50042E1	2.15582E-9	2.52525E-3	2.52525E-3	6.33757E-3	2.28392E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80029E1	-1.16825E-3	-8.80006E1	1.43051E-4	5.07832E-3	9.34362E-2	1.57359E1	-1.98617E1	-1.99473E1	1.50458E1	2.15965E-9	2.52621E-3	2.52621E-3	6.32518E-3	2.26987E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80028E1	-8.58307E-4	-8.8E1	4.29153E-4	4.93526E-3	9.33886E-2	1.56815E1	-1.98513E1	-1.99492E1	1.47115E1	2.15441E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.27607E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80028E1	-6.67572E-4	-8.80001E1	6.91414E-4	4.93526E-3	9.33647E-2	1.57122E1	-1.98483E1	-1.99624E1	1.46809E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.27295E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.8003E1	-6.91414E-4	-8.80002E1	5.00679E-4	4.74453E-3	9.34601E-2	1.56893E1	-1.9838E1	-1.99534E1	1.47205E1	2.15706E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.26506E-2
1.2E1	3.4E1	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80028E1	-1.19209E-3	-8.80001E1	4.76837E-4	5.03063E-3	9.33647E-2	1.58522E1	-1.98489E1	-1.99642E1	1.51007E1	2.158E-9	2.51771E-3	2.51771E-3	6.33486E-3	2.25917E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80027E1	-9.05991E-4	-8.80003E1	2.86102E-4	5.19753E-3	9.33886E-2	1.58029E1	-1.98278E1	-2.00091E1	1.4975E1	2.15992E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.25674E-2
1.4E1	9.0E1	0.0E0	5.66E2	3.82E2	-7.13915E-2	-8.80027E1	-1.0252E-3	-8.80003E1	3.09944E-4	5.10216E-3	9.31501E-2	1.57128E1	-1.98759E1	-1.996E1	1.5019E1	2.15716E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.26445E-2
1.5E1	2.1E1	0.0E0	6.06E2	4.11E2	-7.09279E-2	-8.80028E1	-1.40667E-3	-8.80001E1	2.86102E-4	5.26905E-3	9.34362E-2	1.59259E1	-1.98411E1	-1.9949E1	1.50971E1	2.15257E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.26445E-2
1.6E1	1.48E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80026E1	-1.28746E-3	-8.80001E1	4.52995E-4	5.57899E-3	9.37223E-2	1.5974E1	-1.98679E1	-1.99751E1	1.48196E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.2631E-2
1.7E1	2.09E2	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80024E1	-1.04904E-3	-8.80002E1	2.38419E-4	5.03063E-3	9.34124E-2	1.57767E1	-1.9834E1	-1.99874E1	1.50851E1	2.158E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.25917E-2
1.8E1	7.76E2	2.0E0	7.27E2	5.0E2	-7.21643E-2	-8.80028E1	-1.23978E-3	-8.80001E1	2.14577E-4	5.03063E-3	9.35793E-2	1.56683E1	-1.98591E1	-1.99744E1	1.498E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.25329E-2
1.9E1	9.68E2	0.0E0	7.68E2	5.29E2	-7.13915E-2	-8.80025E1	-1.09673E-3	-8.80002E1	5.72205E-4	4.95911E-3	9.39608E-2	1.58395E1	-1.98705E1	-1.99558E1	1.47728E1	2.15441E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.26445E-2
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80024E1	-9.77516E-4	-8.80003E1	3.57628E-4	5.07832E-3	9.31501E-2	1.5766E1	-1.98894E1	-1.99927E1	1.48429E1	2.15706E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.24937E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80025E1	-8.58307E-4	-8.80001E1	5.00679E-4	5.34058E-3	9.33409E-2	1.57308E1	-1.98476E1	-1.9942E1	1.51121E1	2.15894E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.26113E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80027E1	-8.82149E-4	-8.80001E1	4.05312E-4	5.38826E-3	9.32932E-2	1.57926E1	-1.98499E1	-1.99125E1	1.51079E1	2.15238E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.25524E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80024E1	-9.53674E-4	-8.79999E1	5.48363E-4	5.126E-3	9.32932E-2	1.57595E1	-1.98458E1	-1.9936E1	1.49958E1	2.15257E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.25867E-2