[Scan]
initial_time=2016-01-27T18:53:26
final_time=2016-01-27T18:53:45
ip_count=19
run=1025
dataset=1
scan=42
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.78675E-6
ql1_vset=
ql1_vmon=-8.80032E1
ql1_imon=-6.15382E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=4.78709E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.77116E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.92246E-10
mult1=-1.02678E-8
mult2=-2.84868E-9
rf_tmon=-4.66285E-3
rf_agc=3.30378E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=5.03576E-10
bslens_vset=-6.2E0
bslens_vmon=-6.59885E0
bslens_imon=1.79874E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18739E1
lens5a_imon=1.99641E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12609E2
lens4a_imon=2.05994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=2.84935E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.01562E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.03324E1
cs_ea1_imon=2.5541E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09183E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05126E1
cs_ea2_imon=1.52957E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=2.92792E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=4.07779E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=2.88071E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.13834E1
os_ea1_imon=1.7866E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19742E0
cs_ionrep_imon=1.23829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91998E2
cs_nozzle_imon=1.93932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.96072E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=1.05894E-10
tplens_vset=0.0E0
tplens_vmon=-1.64083E0
tplens_imon=-1.01673E-6
iondef3_vset=-2.0E1
iondef3_vmon=-1.99697E1
iondef3_imon=8.6842E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98546E1
iondef2_imon=1.01478E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.97964E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.92358E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.15837E0
ionrepsh_imon=1.7282E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34216E1
lens5b_imon=2.27255E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.49658E-1
os_ea2_imon=-5.80532E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.05963E2
lens4b_imon=1.99909E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.716E1
cs_ef2a_imon=3.20362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6354E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.41562E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=2.86665E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.36633E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.24245E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58817E1
iondef1_imon=5.46137E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50004E1
iondef4_imon=5.32724E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.41874E-9
olens1_vset=0.0E0
olens1_vmon=1.64509E-3
olens1_imon=4.07565E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.69689E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.37765E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92709E3
multa_neg_imon=8.00286E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93671E3
defgrida_imon=7.11604E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50087E3
multb_neg_imon=6.11026E-5
defgridb_vset=9.9999E2
defgridb_vmon=6.00885E0
defgridb_imon=6.88893E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33748E1
os_fil1_imon=4.7582E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.58732E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62682E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30256E1
cs_fil1_imon=9.97435E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63747E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65039E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.53906E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.12479E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32371E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.2631E-2
chamber_ion_pmon=2.15519E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.36177E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.92E2	1.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80027E1	-1.00136E-3	-8.80003E1	4.05312E-4	5.03063E-3	9.31978E-2	1.57153E1	-1.97314E1	-1.99785E1	1.50416E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.26113E-2
2.0E0	1.917E3	3.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80025E1	-1.0252E-3	-8.80003E1	4.29153E-4	4.98295E-3	9.31978E-2	1.58032E1	-1.98496E1	-1.9961E1	1.49617E1	2.15808E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.26252E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80024E1	-9.05991E-4	-8.80005E1	4.05312E-4	5.05447E-3	9.36031E-2	1.58301E1	-1.98417E1	-1.99257E1	1.49443E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.26113E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80025E1	-7.15256E-4	-8.80003E1	4.29153E-4	5.07832E-3	9.36747E-2	1.58011E1	-1.98753E1	-1.9975E1	1.49794E1	2.159E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.25289E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80027E1	-7.62939E-4	-8.80003E1	1.19209E-4	4.8399E-3	9.35078E-2	1.57879E1	-1.9883E1	-1.99178E1	1.49976E1	2.15992E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.25289E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80026E1	-5.96046E-4	-8.80004E1	3.33786E-4	5.03063E-3	9.32217E-2	1.5872E1	-1.98657E1	-1.9942E1	1.49764E1	2.159E-9	2.52492E-3	2.52492E-3	6.35059E-3	2.26832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80028E1	-7.62939E-4	-8.8E1	5.72205E-4	5.26905E-3	9.3317E-2	1.58007E1	-1.98428E1	-1.99769E1	1.50459E1	2.16173E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.25769E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80029E1	-9.05991E-4	-8.80001E1	5.48363E-4	5.19753E-3	9.34601E-2	1.57548E1	-1.98588E1	-1.99697E1	1.50723E1	2.15519E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.26113E-2
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80028E1	-1.0252E-3	-8.80001E1	3.8147E-4	4.93526E-3	9.32217E-2	1.58966E1	-1.98747E1	-1.9948E1	1.49746E1	2.15624E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.25289E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80031E1	-7.39098E-4	-8.80002E1	2.86102E-4	4.57764E-3	9.33409E-2	1.57643E1	-1.98517E1	-1.99561E1	1.49644E1	2.16175E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.26113E-2
1.4E1	8.0E1	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.8003E1	-7.15256E-4	-8.80001E1	3.8147E-4	4.62532E-3	9.34124E-2	1.58342E1	-1.98904E1	-1.99466E1	1.50416E1	2.15624E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.25674E-2
1.5E1	2.2E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.8003E1	-9.05991E-4	-8.80001E1	3.09944E-4	5.07832E-3	9.32455E-2	1.58141E1	-1.98722E1	-1.99477E1	1.49929E1	2.15636E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.25629E-2
1.6E1	1.31E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80032E1	-6.4373E-4	-8.80001E1	6.67572E-4	5.126E-3	9.33886E-2	1.57389E1	-1.9867E1	-1.99768E1	1.49518E1	2.15587E-9	2.51611E-3	2.51611E-3	6.3131E-3	2.27044E-2
1.7E1	1.88E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80026E1	-5.24521E-4	-8.80003E1	7.15256E-4	4.76837E-3	9.34601E-2	1.58425E1	-1.982E1	-1.99486E1	1.49566E1	2.15349E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.26445E-2
1.8E1	7.74E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80026E1	-9.29832E-4	-8.80006E1	5.48363E-4	4.93526E-3	9.32455E-2	1.58011E1	-1.98531E1	-1.99714E1	1.50262E1	2.156E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.27776E-2
1.9E1	9.41E2	2.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80028E1	-6.67572E-4	-8.80002E1	2.14577E-4	4.79221E-3	9.3174E-2	1.58522E1	-1.98889E1	-1.99443E1	1.49752E1	2.15624E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.27996E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80029E1	-6.67572E-4	-8.79999E1	2.14577E-4	4.8399E-3	9.33409E-2	1.57076E1	-1.98364E1	-1.99543E1	1.50535E1	2.15533E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.27026E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80028E1	-8.10623E-4	-8.8E1	3.09944E-4	4.88758E-3	9.35793E-2	1.58474E1	-1.98729E1	-1.99573E1	1.50211E1	2.15987E-9	2.5199E-3	2.5199E-3	6.34588E-3	2.2769E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80032E1	-1.00136E-3	-8.8E1	2.14577E-4	5.07832E-3	9.3317E-2	1.56947E1	-1.98513E1	-1.9987E1	1.50358E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.26445E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80032E1	-8.34465E-4	-8.8E1	2.6226E-4	5.14984E-3	9.31501E-2	1.58817E1	-1.98546E1	-1.99697E1	1.50004E1	2.15519E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.2631E-2