[Scan]
initial_time=2016-01-27T18:56:06
final_time=2016-01-27T18:56:25
ip_count=19
run=1025
dataset=1
scan=48
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.77498E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.18804E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=4.61257E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.7989E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.89802E-10
mult1=-9.93304E-9
mult2=-2.7765E-9
rf_tmon=-4.12189E-3
rf_agc=3.31593E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.15628E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.65652E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53517E1
cs_ef1b_imon=2.83308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.62927E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96517E0
lens1_imon=1.65133E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.97696E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03897E1
cs_ea2_imon=1.53701E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84122E1
cs_ef1a_imon=2.92309E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=4.24838E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11708E1
os_restr1_imon=2.87861E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15512E1
os_ea1_imon=1.89343E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.09547E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27392E0
cs_ionrep_imon=1.17847E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01896E1
cs_anode1_imon=2.9297E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=9.42826E-11
tplens_vset=0.0E0
tplens_vmon=-1.60663E0
tplens_imon=-1.67929E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99846E1
iondef3_imon=8.68413E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98519E1
iondef2_imon=9.41325E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=4.77314E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.75893E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33445E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.53985E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00669E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.1813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60828E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45681E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=2.86019E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.28831E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.2416E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57807E1
iondef1_imon=5.16596E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50412E1
iondef4_imon=5.33857E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.37473E-9
olens1_vset=0.0E0
olens1_vmon=8.82149E-4
olens1_imon=4.47404E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15679E0
cs_ionaccel_imon=-1.8274E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.72607E-6
window_vset=0.0E0
window_vmon=2.30428E-1
window_imon=-1.00724E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86477E1
mask2_imon=-6.07589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92608E3
multa_neg_imon=7.99395E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.59234E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50183E3
multb_neg_imon=6.96398E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.61967E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33774E1
os_fil1_imon=4.46088E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.57702E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61499E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3062E1
cs_fil1_imon=9.9759E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63258E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64056E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.45488E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.91414E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.62512E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.314E-1
cs_fil2_imon=-2.25216E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21752E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=2.27909E-2
chamber_ion_pmon=2.15636E-9
chamber_cvt_pmon=2.52553E-3
foreline_cvt_pmon=2.52553E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.06122E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.14E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80027E1	-9.29832E-4	-8.80001E1	4.05312E-4	5.19753E-3	9.33409E-2	1.58622E1	-1.98682E1	-1.99762E1	1.49473E1					
2.0E0	1.88E3	1.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80028E1	-1.04904E-3	-8.80001E1	2.6226E-4	4.76837E-3	9.33886E-2	1.58081E1	-1.98735E1	-1.99616E1	1.50169E1	2.15726E-9	2.52659E-3	2.52659E-3	6.31269E-3	2.27337E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80027E1	-1.26362E-3	-8.80002E1	2.38419E-4	5.05447E-3	9.33886E-2	1.57792E1	-1.98457E1	-2.0008E1	1.49871E1	2.15879E-9	2.52521E-3	2.52521E-3	6.3131E-3	2.25615E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80026E1	-1.00136E-3	-8.80001E1	4.29153E-4	5.03063E-3	9.33647E-2	1.57662E1	-1.98657E1	-1.99594E1	1.49968E1	2.15636E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.26197E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80027E1	-9.05991E-4	-8.80002E1	5.48363E-4	5.10216E-3	9.29356E-2	1.58209E1	-1.98525E1	-1.99306E1	1.49806E1	2.15987E-9	2.5188E-3	2.5188E-3	6.3514E-3	2.27097E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80026E1	-8.58307E-4	-8.80003E1	5.48363E-4	5.00679E-3	9.34601E-2	1.58233E1	-1.98723E1	-2.00105E1	1.49806E1	2.15332E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.26506E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80027E1	-1.04904E-3	-8.8E1	4.05312E-4	4.91142E-3	9.32932E-2	1.58011E1	-1.98759E1	-1.99522E1	1.5028E1	2.158E-9	2.52538E-3	2.52538E-3	6.31837E-3	2.25524E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80026E1	-1.0252E-3	-8.80004E1	5.72205E-4	4.74453E-3	9.35078E-2	1.57578E1	-1.98597E1	-1.99846E1	1.49644E1	2.15624E-9	2.52492E-3	2.52492E-3	6.32896E-3	2.27026E-2
1.2E1	3.2E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80024E1	-1.40667E-3	-8.80003E1	5.72205E-4	4.86374E-3	9.33886E-2	1.57596E1	-1.98669E1	-1.99606E1	1.50412E1	2.15987E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.26113E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80026E1	-1.23978E-3	-8.80003E1	4.05312E-4	5.126E-3	9.3317E-2	1.58336E1	-1.98753E1	-1.99326E1	1.503E1	2.15505E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.2677E-2
1.4E1	7.6E1	0.0E0	5.66E2	3.82E2	-7.201E-2	-8.80027E1	-1.09673E-3	-8.80004E1	2.6226E-4	4.91142E-3	9.3627E-2	1.58528E1	-1.98572E1	-1.99396E1	1.50004E1	2.15736E-9	2.52301E-3	2.52301E-3	6.31779E-3	2.27451E-2
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80028E1	-9.29832E-4	-8.80002E1	3.09944E-4	4.79221E-3	9.36031E-2	1.5848E1	-1.98278E1	-1.99264E1	1.5028E1	2.15475E-9	2.52338E-3	2.52338E-3	6.33065E-3	2.27539E-2
1.6E1	1.48E2	1.0E0	6.47E2	4.41E2	-7.15461E-2	-8.80026E1	-6.91414E-4	-8.80001E1	1.19209E-4	4.673E-3	9.3317E-2	1.58191E1	-1.98918E1	-1.99744E1	1.50112E1	2.158E-9	2.52647E-3	2.52647E-3	6.32936E-3	2.2769E-2
1.7E1	1.97E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80026E1	-8.10623E-4	-8.80001E1	2.6226E-4	4.88758E-3	9.32932E-2	1.57837E1	-1.99059E1	-1.99522E1	1.50232E1	2.15441E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.27413E-2
1.8E1	7.1E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.8003E1	-9.77516E-4	-8.80001E1	2.6226E-4	4.45843E-3	9.34124E-2	1.58029E1	-1.98597E1	-1.99468E1	1.49878E1	2.15425E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.27888E-2
1.9E1	9.54E2	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80028E1	-9.53674E-4	-8.80005E1	1.90735E-4	4.69685E-3	9.33647E-2	1.58137E1	-1.98957E1	-1.99197E1	1.49301E1	2.15894E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.27492E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80028E1	-1.16825E-3	-8.80004E1	3.57628E-4	4.76837E-3	9.31501E-2	1.58119E1	-1.98519E1	-1.9987E1	1.50306E1	2.158E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.27097E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80027E1	-7.39098E-4	-8.80001E1	1.19209E-4	5.03063E-3	9.3627E-2	1.58362E1	-1.98735E1	-1.99543E1	1.50443E1	2.15808E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.26832E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80028E1	-7.62939E-4	-8.79999E1	0.0E0	4.74453E-3	9.34124E-2	1.5807E1	-1.98353E1	-1.99888E1	1.49582E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.27888E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80025E1	-9.29832E-4	-8.80003E1	3.09944E-4	4.64916E-3	9.37223E-2	1.57807E1	-1.98519E1	-1.99846E1	1.50412E1	2.15636E-9	2.52553E-3	2.52553E-3	6.29684E-3	2.27909E-2