[Scan]
initial_time=2016-01-27T18:56:32
final_time=2016-01-27T18:56:52
ip_count=19
run=1025
dataset=1
scan=49
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.84346E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.75523E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=4.46534E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.79657E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.62956E-10
mult1=-1.05953E-8
mult2=-2.6747E-9
rf_tmon=-4.77679E-3
rf_agc=3.3634E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.89807E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67215E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19646E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=2.81259E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02038E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05192E1
cs_ea1_imon=2.60997E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02453E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.54327E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84995E1
cs_ef1a_imon=2.92287E-5
olens2_vset=0.0E0
olens2_vmon=1.14441E-3
olens2_imon=3.97372E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10871E1
os_restr1_imon=2.90197E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=1.90917E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=1.18782E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93528E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01995E1
cs_anode1_imon=2.92468E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.39189E-10
tplens_vset=0.0E0
tplens_vmon=-1.62161E0
tplens_imon=-3.24581E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99534E1
iondef3_imon=8.95096E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98789E1
iondef2_imon=9.37274E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=4.41384E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=1.75776E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.19648E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66143E-1
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06047E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59215E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34354E-1
os_ef2bup_imon=-5.00172E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=2.88503E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.24497E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57789E1
iondef1_imon=4.93865E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49343E1
iondef4_imon=5.43176E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27958E1
olens3_imon=2.30991E-9
olens1_vset=0.0E0
olens1_vmon=1.12057E-3
olens1_imon=3.67415E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19261E0
cs_ionaccel_imon=-1.8014E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56483E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.19145E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.38972E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-4.06668E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.18814E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=7.19175E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=8.08938E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53967E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33748E1
os_fil1_imon=4.67411E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.28698E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30611E1
cs_fil1_imon=9.98101E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62216E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63812E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.77017E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.25985E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.93169E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.47976E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21564E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.27295E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.0343E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.04E2	0.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80025E1	-1.21593E-3	-8.79999E1	4.76837E-5	4.91142E-3	9.33647E-2	1.58125E1	-1.98591E1	-1.9948E1	1.4974E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.26113E-2
2.0E0	1.875E3	3.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80026E1	-1.40667E-3	-8.80001E1	3.09944E-4	4.8399E-3	9.35793E-2	1.58224E1	-1.98307E1	-1.99402E1	1.49782E1	2.15716E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.26639E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80026E1	-1.33514E-3	-8.79999E1	3.09944E-4	4.8399E-3	9.34124E-2	1.57784E1	-1.98192E1	-1.99874E1	1.50058E1	2.15129E-9	2.51851E-3	2.51851E-3	6.31574E-3	2.27654E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80028E1	-7.86781E-4	-8.8E1	3.33786E-4	5.05447E-3	9.36031E-2	1.58287E1	-1.98525E1	-1.99684E1	1.49752E1	2.16085E-9	2.52169E-3	2.52169E-3	6.33977E-3	2.26832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80026E1	-1.0252E-3	-8.80003E1	1.66893E-4	4.62532E-3	9.34124E-2	1.58534E1	-1.98296E1	-1.99294E1	1.50455E1	2.15613E-9	2.52757E-3	2.52757E-3	6.31288E-3	2.25524E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80026E1	-9.05991E-4	-8.80004E1	1.19209E-4	4.45843E-3	9.36747E-2	1.56899E1	-1.98675E1	-1.99576E1	1.50064E1	2.15519E-9	2.53087E-3	2.53087E-3	6.32386E-3	2.27097E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80025E1	-1.00136E-3	-8.80005E1	2.14577E-4	4.72069E-3	9.37223E-2	1.58678E1	-1.98614E1	-1.9957E1	1.50323E1	2.158E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.27097E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80025E1	-1.00136E-3	-8.80003E1	2.38419E-4	4.93526E-3	9.37223E-2	1.57723E1	-1.98641E1	-1.99589E1	1.49916E1	2.15365E-9	2.52342E-3	2.52342E-3	6.34982E-3	2.26956E-2
1.2E1	3.7E1	1.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80028E1	-9.05991E-4	-8.8E1	2.86102E-4	5.126E-3	9.34124E-2	1.57686E1	-1.98573E1	-1.99786E1	1.49397E1	2.15782E-9	2.51838E-3	2.51838E-3	6.3131E-3	2.25615E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80026E1	-1.04904E-3	-8.80002E1	1.66893E-4	4.8399E-3	9.33647E-2	1.5762E1	-1.98675E1	-1.993E1	1.50124E1	2.15238E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.25917E-2
1.4E1	6.5E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80027E1	-1.0252E-3	-8.80003E1	3.57628E-4	4.95911E-3	9.34601E-2	1.57807E1	-1.98476E1	-1.99384E1	1.50509E1	2.15519E-9	2.52538E-3	2.52538E-3	6.32936E-3	2.269E-2
1.5E1	2.2E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80028E1	-1.28746E-3	-8.80005E1	2.14577E-4	4.45843E-3	9.33409E-2	1.57548E1	-1.98788E1	-2.00228E1	1.50213E1	2.15706E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.27097E-2
1.6E1	1.41E2	0.0E0	6.47E2	4.41E2	-7.39421E-2	-8.80027E1	-1.14441E-3	-8.80002E1	2.14577E-4	4.76837E-3	9.36508E-2	1.58341E1	-1.98741E1	-1.9942E1	1.49824E1	2.15808E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.25867E-2
1.7E1	1.86E2	2.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80025E1	-1.00136E-3	-8.80001E1	4.52995E-4	5.34058E-3	9.33409E-2	1.57664E1	-1.98788E1	-2.00103E1	1.49396E1	2.15808E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.26445E-2
1.8E1	8.26E2	1.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80022E1	-1.45435E-3	-8.80004E1	1.90735E-4	4.93526E-3	9.3317E-2	1.57554E1	-1.98609E1	-1.9966E1	1.5001E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.27026E-2
1.9E1	9.73E2	0.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80025E1	-1.19209E-3	-8.80002E1	-9.53674E-5	4.95911E-3	9.34601E-2	1.57951E1	-1.98452E1	-2.00123E1	1.50599E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.2631E-2
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80025E1	-1.09673E-3	-8.8E1	-4.76837E-5	4.8399E-3	9.35078E-2	1.58104E1	-1.98533E1	-1.99529E1	1.5001E1	2.15425E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80025E1	-9.77516E-4	-8.80001E1	3.33786E-4	5.05447E-3	9.34124E-2	1.57949E1	-1.98546E1	-1.99484E1	1.49469E1	2.15817E-9	2.51919E-3	2.51919E-3	6.30212E-3	2.27718E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.14689E-2	-8.80024E1	-5.48363E-4	-8.80005E1	4.05312E-4	5.10216E-3	9.32932E-2	1.57963E1	-1.9844E1	-1.99702E1	1.5037E1	2.15441E-9	2.51632E-3	2.51632E-3	6.33977E-3	2.27219E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80023E1	-8.10623E-4	-8.80001E1	3.8147E-4	4.74453E-3	9.35793E-2	1.57789E1	-1.98789E1	-1.99534E1	1.49343E1	2.15613E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27295E-2