[Scan]
initial_time=2016-01-27T18:56:59
final_time=2016-01-27T18:57:18
ip_count=19
run=1025
dataset=1
scan=50
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.80169E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-6.14786E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=4.38833E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.69615E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=8.73673E-10
mult1=-9.85401E-9
mult2=-2.75461E-9
rf_tmon=-4.47998E-3
rf_agc=3.40347E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=4.82392E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=2.80611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=2.63413E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97587E0
lens1_imon=1.64012E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03864E1
cs_ea2_imon=1.54579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84911E1
cs_ef1a_imon=2.92071E-5
olens2_vset=0.0E0
olens2_vmon=1.5974E-3
olens2_imon=3.98445E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.117E1
os_restr1_imon=2.87674E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=1.86231E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63978E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=1.18241E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=2.929E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=8.41141E-11
tplens_vset=0.0E0
tplens_vmon=-1.56513E0
tplens_imon=-4.33943E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99944E1
iondef3_imon=8.71664E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98806E1
iondef2_imon=9.53136E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=5.00023E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=1.77831E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.07863E-1
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70903E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64381E0
os_ef2alow_imon=-2.55463E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68592E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10709E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.24353E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57607E1
iondef1_imon=4.98552E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49506E1
iondef4_imon=5.39572E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.3122E-9
olens1_vset=0.0E0
olens1_vmon=1.74046E-3
olens1_imon=3.87943E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.95637E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.55089E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39149E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=6.89254E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=7.06197E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=7.40083E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.64794E0
defgridb_imon=6.2833E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33742E1
os_fil1_imon=5.54507E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.53926E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=9.98372E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63952E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63789E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83466E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.31991E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.83759E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.53575E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21708E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.27413E-2
chamber_ion_pmon=2.15533E-9
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.30771E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.8E2	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.8002E1	-6.67572E-4	-8.80002E1	4.29153E-4	5.126E-3	9.30786E-2	1.57306E1	-1.9847E1	-1.99756E1	1.5007E1	2.159E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.27219E-2
2.0E0	1.84E3	2.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80025E1	-8.10623E-4	-8.80003E1	4.05312E-4	4.72069E-3	9.31025E-2	1.57741E1	-1.98639E1	-1.99991E1	1.49638E1	2.15894E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.27295E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80025E1	-9.05991E-4	-8.80003E1	4.29153E-4	4.93526E-3	9.32932E-2	1.59182E1	-1.98851E1	-1.99616E1	1.49831E1	2.15894E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.2769E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80024E1	-5.96046E-4	-8.80004E1	1.90735E-4	4.81606E-3	9.31025E-2	1.57783E1	-1.98717E1	-1.99696E1	1.50142E1	2.15455E-9	2.52025E-3	2.52025E-3	6.31269E-3	2.27909E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80024E1	-8.34465E-4	-8.79999E1	3.33786E-4	5.126E-3	9.35555E-2	1.57987E1	-1.98497E1	-1.99658E1	1.50106E1	2.15894E-9	2.51443E-3	2.51443E-3	6.33486E-3	2.27097E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80026E1	-1.16825E-3	-8.8E1	4.52995E-4	5.00679E-3	9.31263E-2	1.57336E1	-1.98566E1	-2.00044E1	1.49947E1	2.15647E-9	2.52405E-3	2.52405E-3	6.33341E-3	2.27638E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80027E1	-1.19209E-3	-8.80002E1	8.10623E-4	4.95911E-3	9.31501E-2	1.58546E1	-1.98543E1	-1.99618E1	1.49782E1	2.15879E-9	2.51952E-3	2.51952E-3	6.30171E-3	2.2766E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80028E1	-1.07288E-3	-8.80003E1	1.43051E-4	5.03063E-3	9.31263E-2	1.57983E1	-1.98624E1	-1.99549E1	1.4991E1	2.15519E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.27097E-2
1.2E1	4.1E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80025E1	-1.0252E-3	-8.80003E1	7.15256E-5	5.00679E-3	9.33886E-2	1.58215E1	-1.98344E1	-1.9948E1	1.49548E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.27492E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80025E1	-1.14441E-3	-8.79999E1	2.14577E-4	4.76837E-3	9.30786E-2	1.58238E1	-1.98523E1	-2.00133E1	1.50242E1	2.16175E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.27097E-2
1.4E1	7.8E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80026E1	-9.05991E-4	-8.8E1	4.05312E-4	4.79221E-3	9.30548E-2	1.58131E1	-1.98747E1	-1.9978E1	1.49704E1	2.15519E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.26506E-2
1.5E1	1.7E1	1.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80029E1	-8.58307E-4	-8.80001E1	2.86102E-4	4.86374E-3	9.3174E-2	1.57741E1	-1.98368E1	-1.99642E1	1.5034E1	2.15894E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.269E-2
1.6E1	1.38E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80029E1	-7.86781E-4	-8.8E1	4.76837E-5	5.14984E-3	9.35078E-2	1.57993E1	-1.98675E1	-1.99498E1	1.50166E1	2.15519E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.27492E-2
1.7E1	1.79E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80027E1	-8.10623E-4	-8.80002E1	2.38419E-4	5.19753E-3	9.3317E-2	1.58026E1	-1.98759E1	-1.99414E1	1.49692E1	2.15533E-9	2.51739E-3	2.51739E-3	6.3074E-3	2.27802E-2
1.8E1	7.14E2	3.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80026E1	-7.15256E-4	-8.80003E1	2.86102E-4	4.93526E-3	9.34362E-2	1.57969E1	-1.98765E1	-1.99492E1	1.50022E1	2.158E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.2572E-2
1.9E1	9.58E2	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80025E1	-7.39098E-4	-8.80003E1	3.57628E-4	4.79221E-3	9.36031E-2	1.5746E1	-1.98835E1	-1.99449E1	1.50201E1	2.15257E-9	2.51417E-3	2.51417E-3	6.33436E-3	2.25867E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80025E1	-6.67572E-4	-8.80001E1	2.38419E-4	4.62532E-3	9.34839E-2	1.57626E1	-1.98723E1	-1.99438E1	1.49644E1	2.15238E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.27888E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80025E1	-9.29832E-4	-8.8E1	5.00679E-4	4.81606E-3	9.3317E-2	1.58648E1	-1.98837E1	-1.99161E1	1.4995E1	2.15613E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.27097E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80026E1	-8.34465E-4	-8.80001E1	3.09944E-4	4.81606E-3	9.33647E-2	1.57902E1	-1.98564E1	-2.00157E1	1.50863E1	2.15613E-9	2.52318E-3	2.52318E-3	6.27461E-3	2.27492E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80029E1	-9.77516E-4	-8.79999E1	4.52995E-4	4.88758E-3	9.32217E-2	1.57607E1	-1.98806E1	-1.99944E1	1.49506E1	2.15533E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.27413E-2