[Scan]
initial_time=2016-01-27T18:57:52
final_time=2016-01-27T18:58:12
ip_count=19
run=1025
dataset=1
scan=52
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.78315E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.30641E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.74513E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.71326E-9
ql4_vset=
ql4_vmon=5.24521E-4
ql4_imon=9.14836E-10
mult1=-9.55847E-9
mult2=-2.7115E-9
rf_tmon=-4.07885E-3
rf_agc=3.40937E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=4.9603E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62551E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19842E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05072E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=2.83552E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=2.64944E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00234E0
lens1_imon=1.28677E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64527E1
os_ef1alow_imon=2.98217E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.52108E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.92483E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=4.03273E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10782E1
os_restr1_imon=2.86089E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=1.89413E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.09616E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24797E0
cs_ionrep_imon=1.19192E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.9151E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.32275E-10
tplens_vset=0.0E0
tplens_vmon=-1.67565E0
tplens_imon=-2.52875E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99585E1
iondef3_imon=8.7797E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98588E1
iondef2_imon=9.3814E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98406E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.62055E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27451E0
ionrepsh_imon=1.75539E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18897E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.14308E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.13282E-1
os_ea2_imon=-5.04173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00778E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.18826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63145E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53211E-1
os_ef2bup_imon=-5.20882E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.28442E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01717E1
cs_anode2_imon=2.24125E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57961E1
iondef1_imon=5.15888E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50155E1
iondef4_imon=5.30382E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.32306E-9
olens1_vset=0.0E0
olens1_vmon=1.52588E-3
olens1_imon=4.52483E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18053E0
cs_ionaccel_imon=-1.8413E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.02626E-1
window_imon=-9.37738E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-5.69361E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.43472E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.30919E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.31084E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51041E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33775E1
os_fil1_imon=4.81419E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76237E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60821E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30631E1
cs_fil1_imon=9.99102E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63443E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63229E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83841E-2
os_fil2_imon=-2.40854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.71315E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.9896E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30151E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2155E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.2897E-2
chamber_ion_pmon=2.15165E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.24657E-1
res40_imon=-2.35564E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.79E2	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80025E1	-9.29832E-4	-8.80001E1	3.09944E-4	4.69685E-3	9.33409E-2	1.58058E1	-1.98521E1	-1.99645E1	1.50242E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.27219E-2
2.0E0	1.827E3	2.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80025E1	-1.09673E-3	-8.80003E1	4.29153E-4	4.93526E-3	9.3317E-2	1.57873E1	-1.98435E1	-1.99962E1	1.50131E1	2.15726E-9	2.51814E-3	2.51814E-3	6.29684E-3	2.26956E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80024E1	-1.12057E-3	-8.80002E1	2.38419E-4	4.81606E-3	9.35316E-2	1.57862E1	-1.9844E1	-1.99637E1	1.50428E1	2.15782E-9	2.51838E-3	2.51838E-3	6.3131E-3	2.25411E-2
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80024E1	-1.14441E-3	-8.80002E1	4.76837E-5	4.50611E-3	9.33647E-2	1.57696E1	-1.98682E1	-1.99762E1	1.49433E1	2.15135E-9	2.52262E-3	2.52262E-3	6.31761E-3	2.26825E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80023E1	-9.53674E-4	-8.80002E1	-7.15256E-5	4.79221E-3	9.3627E-2	1.57885E1	-1.98392E1	-1.99612E1	1.50364E1	2.15332E-9	2.51334E-3	2.51334E-3	6.31837E-3	2.27295E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80024E1	-9.53674E-4	-8.80003E1	9.53674E-5	4.98295E-3	9.34601E-2	1.58468E1	-1.98537E1	-1.99858E1	1.49842E1	2.15519E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.25133E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80023E1	-7.62939E-4	-8.80004E1	1.90735E-4	5.24521E-3	9.32217E-2	1.58044E1	-1.98776E1	-1.9926E1	1.50262E1	2.159E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.25674E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80023E1	-9.05991E-4	-8.80004E1	2.86102E-4	4.93526E-3	9.32693E-2	1.58018E1	-1.98133E1	-2.00138E1	1.50543E1	2.15987E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.269E-2
1.2E1	3.0E1	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80023E1	-9.05991E-4	-8.80003E1	-7.15256E-5	4.91142E-3	9.30786E-2	1.57968E1	-1.98486E1	-1.99542E1	1.49904E1	2.15546E-9	2.52553E-3	2.52553E-3	6.3074E-3	2.27718E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80031E1	-7.39098E-4	-8.80003E1	3.57628E-4	4.52995E-3	9.33886E-2	1.5872E1	-1.9838E1	-1.9963E1	1.49962E1	2.15199E-9	2.52066E-3	2.52066E-3	6.3131E-3	2.28483E-2
1.4E1	6.5E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80027E1	-8.82149E-4	-8.80004E1	4.05312E-4	4.88758E-3	9.32455E-2	1.57259E1	-1.98287E1	-1.99561E1	1.49013E1	2.15706E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.28284E-2
1.5E1	1.5E1	0.0E0	6.06E2	4.11E2	-7.13915E-2	-8.80023E1	-7.86781E-4	-8.80002E1	6.67572E-4	5.34058E-3	9.35316E-2	1.58696E1	-1.98645E1	-2.00003E1	1.51277E1	2.15613E-9	2.5188E-3	2.5188E-3	6.3074E-3	2.269E-2
1.6E1	1.39E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80023E1	-1.07288E-3	-8.80001E1	5.96046E-4	4.72069E-3	9.34839E-2	1.57939E1	-1.98458E1	-1.9984E1	1.48905E1	2.159E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.27026E-2
1.7E1	1.93E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80023E1	-6.67572E-4	-8.80002E1	3.33786E-4	4.74453E-3	9.36031E-2	1.57377E1	-1.98465E1	-1.99359E1	1.50196E1	2.15791E-9	2.51915E-3	2.51915E-3	6.32418E-3	2.28179E-2
1.8E1	7.75E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80026E1	-1.21593E-3	-8.80005E1	3.57628E-4	4.93526E-3	9.36031E-2	1.58238E1	-1.98889E1	-1.99832E1	1.50184E1	2.15894E-9	2.52538E-3	2.52538E-3	6.27461E-3	2.29079E-2
1.9E1	9.11E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80025E1	-1.12057E-3	-8.80006E1	5.24521E-4	4.74453E-3	9.35078E-2	1.58113E1	-1.98392E1	-2.00093E1	1.50304E1	2.15894E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.27492E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80022E1	-1.0252E-3	-8.80007E1	5.24521E-4	4.81606E-3	9.34362E-2	1.58404E1	-1.98657E1	-1.99156E1	1.50362E1	2.15519E-9	2.52428E-3	2.52428E-3	6.34588E-3	2.26506E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80026E1	-7.39098E-4	-8.80001E1	6.67572E-4	4.93526E-3	9.32455E-2	1.57987E1	-1.98549E1	-1.99606E1	1.49518E1	2.15657E-9	2.52293E-3	2.52293E-3	6.31391E-3	2.25964E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80027E1	-7.86781E-4	-8.80001E1	8.10623E-4	4.95911E-3	9.32932E-2	1.57849E1	-1.9821E1	-1.99343E1	1.50208E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32356E-3	2.2819E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80025E1	-9.53674E-4	-8.80001E1	5.24521E-4	5.03063E-3	9.32932E-2	1.57961E1	-1.98588E1	-1.99585E1	1.50155E1	2.15165E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.2897E-2