[Scan]
initial_time=2016-01-27T18:58:19
final_time=2016-01-27T18:58:38
ip_count=19
run=1025
dataset=1
scan=53
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.81868E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.40929E-10
ql2_vset=
ql2_vmon=-1.00136E-3
ql2_imon=4.43339E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.77366E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.86071E-10
mult1=-1.00053E-8
mult2=-2.76053E-9
rf_tmon=-4.41028E-3
rf_agc=3.33035E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=4.74083E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=2.80647E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=2.61646E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98488E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.54002E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.91098E-5
olens2_vset=0.0E0
olens2_vmon=1.33514E-3
olens2_imon=4.09567E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=2.88179E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15612E1
os_ea1_imon=1.87853E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.18566E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.90233E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=1.25444E-10
tplens_vset=0.0E0
tplens_vmon=-1.65465E0
tplens_imon=-2.09222E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9936E1
iondef3_imon=8.73106E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98404E1
iondef2_imon=9.66114E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.85301E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28034E0
ionrepsh_imon=1.75884E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65542E-1
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00799E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.64501E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65589E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=2.87782E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01743E1
cs_anode2_imon=2.24136E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58053E1
iondef1_imon=5.22705E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50262E1
iondef4_imon=5.26237E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27959E1
olens3_imon=2.29336E-9
olens1_vset=0.0E0
olens1_vmon=1.4782E-3
olens1_imon=4.02308E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-1.69328E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.3296E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.97763E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.05836E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52163E0
defgridb_imon=6.25806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33773E1
os_fil1_imon=4.80625E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.01979E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60901E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30701E1
cs_fil1_imon=9.98486E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63588E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84756E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.71925E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.86853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.58188E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21677E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.26832E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.26566E-1
res40_imon=-2.55463E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.33E2	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80026E1	-7.39098E-4	-8.8E1	4.76837E-4	5.126E-3	9.3317E-2	1.57796E1	-1.98889E1	-1.99089E1	1.49836E1	2.158E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.27097E-2
2.0E0	1.754E3	1.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80027E1	-7.39098E-4	-8.8E1	6.91414E-4	4.72069E-3	9.31978E-2	1.58228E1	-1.98533E1	-1.99555E1	1.50116E1	2.15726E-9	2.51709E-3	2.51709E-3	6.33388E-3	2.27147E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80027E1	-8.10623E-4	-8.79999E1	6.4373E-4	5.00679E-3	9.32693E-2	1.58377E1	-1.98486E1	-1.99888E1	1.50259E1	2.15696E-9	2.52809E-3	2.52809E-3	6.31858E-3	2.27776E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80024E1	-6.67572E-4	-8.80002E1	4.05312E-4	4.91142E-3	9.36031E-2	1.57518E1	-1.98789E1	-2.00063E1	1.50254E1	2.15907E-9	2.52659E-3	2.52659E-3	6.30212E-3	2.26197E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80025E1	-5.24521E-4	-8.80001E1	1.19209E-4	4.86374E-3	9.32455E-2	1.57843E1	-1.9867E1	-1.98924E1	1.50202E1	2.15519E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.2631E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80028E1	-7.39098E-4	-8.8E1	3.57628E-4	5.00679E-3	9.32693E-2	1.58407E1	-1.98501E1	-2.00099E1	1.50473E1	2.15519E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.27295E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80027E1	-1.07288E-3	-8.79998E1	2.14577E-4	4.91142E-3	9.34601E-2	1.57867E1	-1.98741E1	-1.99396E1	1.50202E1	2.15987E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.2631E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80026E1	-8.34465E-4	-8.80003E1	3.09944E-4	4.93526E-3	9.35793E-2	1.57469E1	-1.98324E1	-1.99561E1	1.49914E1	2.15519E-9	2.53087E-3	2.53087E-3	6.31837E-3	2.26703E-2
1.2E1	4.4E1	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80025E1	-1.00136E-3	-8.80003E1	3.57628E-4	4.86374E-3	9.34839E-2	1.58107E1	-1.98765E1	-1.99444E1	1.50733E1	2.15613E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.26703E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80023E1	-8.82149E-4	-8.80003E1	3.57628E-4	5.05447E-3	9.33409E-2	1.57887E1	-1.98908E1	-1.9949E1	1.50259E1	2.15791E-9	2.51136E-3	2.51136E-3	6.31299E-3	2.28179E-2
1.4E1	6.3E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80023E1	-7.86781E-4	-8.80002E1	5.00679E-4	4.91142E-3	9.35316E-2	1.57741E1	-1.98513E1	-1.99648E1	1.49337E1	2.15751E-9	2.52169E-3	2.52169E-3	6.32087E-3	2.27026E-2
1.5E1	2.1E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80024E1	-7.39098E-4	-8.80001E1	6.4373E-4	5.17368E-3	9.33409E-2	1.58093E1	-1.98881E1	-1.99224E1	1.50022E1	2.15332E-9	2.51443E-3	2.51443E-3	6.32386E-3	2.269E-2
1.6E1	1.48E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80025E1	-1.14441E-3	-8.80001E1	5.96046E-4	4.8399E-3	9.34601E-2	1.58286E1	-1.98794E1	-1.99473E1	1.4998E1	2.15145E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.26506E-2
1.7E1	1.87E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80027E1	-1.09673E-3	-8.80003E1	4.76837E-4	4.91142E-3	9.33886E-2	1.58161E1	-1.98458E1	-1.99552E1	1.50202E1	2.15349E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.27607E-2
1.8E1	7.25E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80028E1	-9.77516E-4	-8.8E1	1.90735E-4	4.79221E-3	9.32693E-2	1.57345E1	-1.9866E1	-1.99518E1	1.50575E1	2.15425E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.27097E-2
1.9E1	9.05E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80028E1	-9.77516E-4	-8.80001E1	5.24521E-4	4.24385E-3	9.32693E-2	1.58062E1	-1.9871E1	-1.99224E1	1.49374E1	2.15726E-9	2.52236E-3	2.52236E-3	6.30212E-3	2.27337E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80026E1	-9.53674E-4	-8.8E1	3.57628E-4	4.52995E-3	9.34839E-2	1.58401E1	-1.99023E1	-1.99534E1	1.49842E1	2.15685E-9	2.52179E-3	2.52179E-3	6.3245E-3	2.25819E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80028E1	-1.04904E-3	-8.80003E1	1.19209E-4	4.45843E-3	9.37939E-2	1.58179E1	-1.98399E1	-1.99821E1	1.50346E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.25524E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.16233E-2	-8.80027E1	-9.53674E-4	-8.80003E1	2.38419E-4	4.72069E-3	9.36985E-2	1.58041E1	-1.98651E1	-1.99924E1	1.50449E1	2.15992E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.26445E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80026E1	-1.00136E-3	-8.80003E1	2.14577E-4	5.05447E-3	9.34601E-2	1.58053E1	-1.98404E1	-1.9936E1	1.50262E1	2.159E-9	2.52276E-3	2.52276E-3	6.32896E-3	2.26832E-2