[Scan]
initial_time=2016-01-27T18:58:46
final_time=2016-01-27T18:59:05
ip_count=19
run=1025
dataset=1
scan=54
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77157E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.71919E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=4.5222E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.75995E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=9.28891E-10
mult1=-8.54837E-9
mult2=-2.83039E-9
rf_tmon=-4.16995E-3
rf_agc=3.35018E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=4.87101E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63663E0
bslens_imon=2.79476E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19414E1
lens5a_imon=1.97843E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53509E1
cs_ef1b_imon=2.82352E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02048E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05376E1
cs_ea1_imon=2.64526E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99329E0
lens1_imon=1.58859E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64641E1
os_ef1alow_imon=2.98505E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03671E1
cs_ea2_imon=1.53604E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84329E1
cs_ef1a_imon=2.92005E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=4.42398E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11247E1
os_restr1_imon=2.86984E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1549E1
os_ea1_imon=1.89293E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63201E1
os_ef1bup_imon=3.0843E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25146E0
cs_ionrep_imon=1.15624E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01608E1
cs_anode1_imon=2.90798E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99974E1
olens4_imon=1.20139E-10
tplens_vset=0.0E0
tplens_vmon=-1.62553E0
tplens_imon=-2.35941E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99306E1
iondef3_imon=8.9745E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98476E1
iondef2_imon=9.45163E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98506E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.56929E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27118E0
ionrepsh_imon=1.76658E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33531E1
lens5b_imon=2.18187E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74644E1
cs_ef2b_imon=3.13023E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22142E-1
os_ea2_imon=-5.03132E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06147E2
lens4b_imon=2.00401E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7116E1
cs_ef2a_imon=3.18667E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63191E0
os_ef2alow_imon=-2.47491E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52446E-1
os_ef2bup_imon=-5.28125E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10624E1
os_restr2_imon=2.86361E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.32486E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01672E1
cs_anode2_imon=2.24591E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57735E1
iondef1_imon=5.10787E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49469E1
iondef4_imon=5.29409E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.26645E-9
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=4.26722E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14312E0
cs_ionaccel_imon=-1.77819E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47203E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5636E1
einzel_imon=7.77347E-6
window_vset=0.0E0
window_vmon=2.12681E-1
window_imon=-9.76383E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39263E-4
mask2_vset=0.0E0
mask2_vmon=-1.86409E1
mask2_imon=-6.84462E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.09653E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.44764E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.19196E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46554E0
defgridb_imon=6.0125E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33755E1
os_fil1_imon=5.77452E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.9023E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60693E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30695E1
cs_fil1_imon=9.99371E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63033E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62891E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95908E-2
os_fil2_imon=-2.52253E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.01578E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.18107E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30071E-1
cs_fil2_imon=-2.74958E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.50782E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.36244E-3
inlet_lpb_pmon=2.28086E-2
chamber_ion_pmon=2.15425E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.55494E-1
res40_imon=-2.30754E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.51E2	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80026E1	-7.39098E-4	-8.8E1	6.19888E-4	5.10216E-3	9.3317E-2	1.58179E1	-1.98499E1	-1.99555E1	1.49788E1	2.15574E-9	2.52106E-3	2.52106E-3	6.29002E-3	2.27748E-2
2.0E0	1.792E3	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80026E1	-1.0252E-3	-8.79996E1	7.62939E-4	5.03063E-3	9.32932E-2	1.57922E1	-1.98398E1	-1.99757E1	1.49704E1	2.15706E-9	2.52318E-3	2.52318E-3	6.29098E-3	2.26703E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80026E1	-7.15256E-4	-8.80001E1	3.8147E-4	4.8399E-3	9.32693E-2	1.5789E1	-1.98664E1	-1.99207E1	1.50533E1	2.15982E-9	2.51693E-3	2.51693E-3	6.32418E-3	2.27776E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80029E1	-1.04904E-3	-8.79998E1	3.8147E-4	5.126E-3	9.31978E-2	1.57849E1	-1.98615E1	-1.99876E1	1.49998E1	2.15441E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.26832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80028E1	-7.15256E-4	-8.79998E1	7.15256E-4	5.07832E-3	9.33409E-2	1.58594E1	-1.98645E1	-1.99642E1	1.50201E1	2.15441E-9	2.51954E-3	2.51954E-3	6.33436E-3	2.27413E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80026E1	-6.91414E-4	-8.79999E1	6.19888E-4	5.126E-3	9.32932E-2	1.58203E1	-1.98682E1	-1.99638E1	1.49692E1	2.15894E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.27492E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80027E1	-9.53674E-4	-8.79998E1	5.00679E-4	5.45979E-3	9.35555E-2	1.58401E1	-1.98687E1	-1.99396E1	1.50425E1	2.158E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.28681E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80028E1	-1.09673E-3	-8.8E1	4.52995E-4	5.17368E-3	9.32693E-2	1.57338E1	-1.98404E1	-1.99636E1	1.498E1	2.15613E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.28284E-2
1.2E1	3.8E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80029E1	-9.53674E-4	-8.79999E1	4.05312E-4	5.34058E-3	9.33886E-2	1.58095E1	-1.98543E1	-2.00141E1	1.50431E1	2.15716E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.27802E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80027E1	-8.10623E-4	-8.79998E1	6.19888E-4	5.43594E-3	9.30786E-2	1.58215E1	-1.98927E1	-1.99332E1	1.49414E1	2.15349E-9	2.51739E-3	2.51739E-3	6.31009E-3	2.27704E-2
1.4E1	7.9E1	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80028E1	-6.91414E-4	-8.8E1	2.6226E-4	5.07832E-3	9.35793E-2	1.57917E1	-1.98696E1	-1.99554E1	1.4973E1					
1.5E1	2.1E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80024E1	-9.29832E-4	-8.79999E1	2.86102E-4	5.126E-3	9.34362E-2	1.57963E1	-1.98723E1	-1.9948E1	1.49973E1	2.15475E-9	2.51758E-3	2.51758E-3	6.3016E-3	2.27539E-2
1.6E1	1.37E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80026E1	-1.0252E-3	-8.8E1	6.19888E-4	4.91142E-3	9.34124E-2	1.57924E1	-1.98377E1	-2.00318E1	1.5057E1	2.15791E-9	2.51581E-3	2.51581E-3	6.33538E-3	2.27373E-2
1.7E1	1.43E2	1.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80025E1	-7.15256E-4	-8.79999E1	5.48363E-4	4.79221E-3	9.33886E-2	1.58011E1	-1.98404E1	-1.99792E1	1.50226E1	2.15135E-9	2.52262E-3	2.52262E-3	6.3074E-3	2.26093E-2
1.8E1	7.59E2	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80024E1	-8.82149E-4	-8.79998E1	7.15256E-5	5.24521E-3	9.34839E-2	1.58377E1	-1.98873E1	-1.99077E1	1.50322E1	2.15505E-9	2.51804E-3	2.51804E-3	6.32418E-3	2.2677E-2
1.9E1	9.47E2	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.8002E1	-1.09673E-3	-8.80002E1	1.66893E-4	5.17368E-3	9.34839E-2	1.57909E1	-1.98591E1	-1.99732E1	1.49968E1	2.15073E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.2819E-2
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80025E1	-1.09673E-3	-8.80002E1	1.66893E-4	5.03063E-3	9.36031E-2	1.58125E1	-1.99023E1	-1.99684E1	1.48725E1	2.16269E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.269E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80024E1	-9.29832E-4	-8.80002E1	1.66893E-4	4.93526E-3	9.35316E-2	1.57519E1	-1.98275E1	-1.99585E1	1.51199E1	2.15711E-9	2.52026E-3	2.52026E-3	6.31555E-3	2.27355E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80027E1	-8.34465E-4	-8.80002E1	-4.76837E-5	5.24521E-3	9.31978E-2	1.58185E1	-1.98334E1	-1.99885E1	1.50879E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80025E1	-7.39098E-4	-8.80004E1	1.90735E-4	4.86374E-3	9.32217E-2	1.57735E1	-1.98476E1	-1.99306E1	1.49469E1	2.15425E-9	2.5188E-3	2.5188E-3	6.36244E-3	2.28086E-2