[Scan]
initial_time=2016-01-27T18:59:12
final_time=2016-01-27T18:59:32
ip_count=19
run=1025
dataset=1
scan=55
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80452E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.05464E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=4.22144E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.7746E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=8.91411E-10
mult1=-9.83671E-9
mult2=-2.78448E-9
rf_tmon=-4.16395E-3
rf_agc=3.33095E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.61698E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64108E0
bslens_imon=2.39016E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19828E1
lens5a_imon=1.98721E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05146E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53399E1
cs_ef1b_imon=2.78421E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02274E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04854E1
cs_ea1_imon=2.63762E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01174E0
lens1_imon=1.7031E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64453E1
os_ef1alow_imon=2.98155E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03849E1
cs_ea2_imon=1.54787E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84667E1
cs_ef1a_imon=2.9181E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=3.96144E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1126E1
os_restr1_imon=2.88152E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=1.87995E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63661E1
os_ef1bup_imon=3.10026E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22602E0
cs_ionrep_imon=1.18105E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01724E1
cs_anode1_imon=2.89319E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.12486E-10
tplens_vset=0.0E0
tplens_vmon=-1.64843E0
tplens_imon=-2.85562E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99636E1
iondef3_imon=8.80655E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98735E1
iondef2_imon=9.24169E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98308E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.82571E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26673E0
ionrepsh_imon=1.74864E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33913E1
lens5b_imon=2.1834E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74644E1
cs_ef2b_imon=3.11817E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.27867E-1
os_ea2_imon=-6.02374E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00627E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71076E1
cs_ef2a_imon=3.19523E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61245E0
os_ef2alow_imon=-2.56054E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.21957E-1
os_ef2bup_imon=-5.26568E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1087E1
os_restr2_imon=2.86984E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30615E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01835E1
cs_anode2_imon=2.2424E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57951E1
iondef1_imon=4.88267E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5006E1
iondef4_imon=5.27073E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.25247E-9
olens1_vset=0.0E0
olens1_vmon=1.85966E-3
olens1_imon=4.33171E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17166E0
cs_ionaccel_imon=-1.76262E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56016E1
einzel_imon=7.72676E-6
window_vset=0.0E0
window_vmon=2.11384E-1
window_imon=-1.05034E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86694E1
mask2_imon=-6.2997E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92715E3
multa_neg_imon=7.35227E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.58887E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=7.27593E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52605E0
defgridb_imon=5.93998E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33744E1
os_fil1_imon=4.30843E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.31197E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61001E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30687E1
cs_fil1_imon=9.97165E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6245E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62708E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83618E-2
os_fil2_imon=-2.40576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.79424E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.36804E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3147E-1
cs_fil2_imon=-2.43171E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17514E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2153E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.27097E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.54294E-1
res40_imon=-2.38928E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.85E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80023E1	-1.00136E-3	-8.80003E1	5.24521E-4	4.86374E-3	9.34839E-2	1.58008E1	-1.98889E1	-1.99561E1	1.49721E1	2.15587E-9	2.52407E-3	2.52407E-3	6.3131E-3	2.26839E-2
2.0E0	1.779E3	1.0E0	3.16E2	1.6E2	-7.44831E-2	-8.80023E1	-1.04904E-3	-8.80005E1	3.33786E-4	4.86374E-3	9.33886E-2	1.57975E1	-1.98687E1	-2.00177E1	1.49674E1	2.15716E-9	2.51739E-3	2.51739E-3	6.33436E-3	2.27026E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80026E1	-8.10623E-4	-8.80003E1	3.57628E-4	5.24521E-3	9.3317E-2	1.57716E1	-1.98484E1	-1.99335E1	1.50044E1	2.15791E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.2677E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80025E1	-1.28746E-3	-8.80001E1	5.24521E-4	5.10216E-3	9.3174E-2	1.57968E1	-1.98416E1	-1.99402E1	1.49685E1	2.15832E-9	2.5216E-3	2.5216E-3	6.32784E-3	2.26642E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80025E1	-1.45435E-3	-8.79999E1	3.33786E-4	5.31673E-3	9.30548E-2	1.57938E1	-1.987E1	-1.99667E1	1.50376E1	2.15393E-9	2.52635E-3	2.52635E-3	6.29603E-3	2.27249E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.8003E1	-8.34465E-4	-8.80002E1	3.09944E-4	5.05447E-3	9.32693E-2	1.57578E1	-1.98831E1	-1.99636E1	1.49566E1	2.15519E-9	2.52099E-3	2.52099E-3	6.32386E-3	2.2631E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.8003E1	-1.0252E-3	-8.80005E1	1.90735E-4	5.05447E-3	9.30548E-2	1.57962E1	-1.98647E1	-1.99542E1	1.49781E1	2.15257E-9	2.51847E-3	2.51847E-3	6.28592E-3	2.25674E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80029E1	-1.12057E-3	-8.80004E1	3.09944E-4	4.93526E-3	9.34124E-2	1.57393E1	-1.98441E1	-1.99791E1	1.50172E1	2.15647E-9	2.52405E-3	2.52405E-3	6.30221E-3	2.26144E-2
1.2E1	3.2E1	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80029E1	-1.14441E-3	-8.80005E1	4.76837E-4	4.8399E-3	9.34362E-2	1.58115E1	-1.98334E1	-1.99626E1	1.501E1	2.1556E-9	2.51793E-3	2.51793E-3	6.30149E-3	2.26774E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.8003E1	-1.0252E-3	-8.80005E1	4.76837E-4	5.24521E-3	9.35078E-2	1.58492E1	-1.98711E1	-1.99636E1	1.50058E1	2.15997E-9	2.52342E-3	2.52342E-3	6.29157E-3	2.26387E-2
1.4E1	8.7E1	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80028E1	-1.12057E-3	-8.80003E1	3.57628E-4	5.24521E-3	9.39846E-2	1.57747E1	-1.98254E1	-1.99113E1	1.49866E1	2.15987E-9	2.52099E-3	2.52099E-3	6.33486E-3	2.25524E-2
1.5E1	1.9E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80028E1	-1.09673E-3	-8.80003E1	2.86102E-4	4.79221E-3	9.36985E-2	1.57932E1	-1.98499E1	-1.99744E1	1.49674E1	2.15706E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.269E-2
1.6E1	1.09E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80028E1	-1.00136E-3	-8.80004E1	5.00679E-4	5.03063E-3	9.34124E-2	1.58209E1	-1.98639E1	-1.99474E1	1.49836E1	2.15624E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.27413E-2
1.7E1	2.06E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80029E1	-8.10623E-4	-8.80003E1	5.00679E-4	4.91142E-3	9.3317E-2	1.57837E1	-1.98567E1	-1.99462E1	1.4989E1	2.156E-9	2.52473E-3	2.52473E-3	6.31858E-3	2.26369E-2
1.8E1	7.92E2	3.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80029E1	-1.0252E-3	-8.80006E1	3.8147E-4	5.05447E-3	9.32693E-2	1.58124E1	-1.9863E1	-1.99696E1	1.50425E1	2.15808E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.25867E-2
1.9E1	8.49E2	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80027E1	-9.05991E-4	-8.80002E1	4.76837E-5	5.34058E-3	9.33647E-2	1.58032E1	-1.98594E1	-1.99325E1	1.50046E1	2.15314E-9	2.52139E-3	2.52139E-3	6.3074E-3	2.2677E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80028E1	-1.12057E-3	-8.80004E1	1.66893E-4	5.10216E-3	9.33647E-2	1.57212E1	-1.98505E1	-1.99915E1	1.49367E1	2.159E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.27219E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80029E1	-1.07288E-3	-8.80002E1	2.14577E-4	5.57899E-3	9.37223E-2	1.59231E1	-1.99017E1	-1.99035E1	1.50623E1	2.15257E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.26832E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80026E1	-1.12057E-3	-8.80006E1	3.8147E-4	4.98295E-3	9.3627E-2	1.57801E1	-1.98675E1	-1.99738E1	1.49721E1	2.158E-9	2.52647E-3	2.52647E-3	6.30192E-3	2.269E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80027E1	-8.34465E-4	-8.80005E1	4.52995E-4	5.17368E-3	9.34124E-2	1.57951E1	-1.98735E1	-1.99636E1	1.5006E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31837E-3	2.27097E-2