[Scan]
initial_time=2016-01-27T18:59:39
final_time=2016-01-27T18:59:58
ip_count=19
run=1025
dataset=1
scan=56
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.83171E-6
ql1_vset=
ql1_vmon=-8.8003E1
ql1_imon=-5.97823E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=4.40085E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.74288E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.87263E-10
mult1=-1.04508E-8
mult2=-2.7266E-9
rf_tmon=-5.5158E-3
rf_agc=3.19877E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.85194E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65736E0
bslens_imon=2.73793E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19524E1
lens5a_imon=1.96244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05238E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=2.81571E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05354E1
cs_ea1_imon=2.63989E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00234E0
lens1_imon=1.36464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04162E1
cs_ea2_imon=1.54621E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.92066E-5
olens2_vset=0.0E0
olens2_vmon=1.0252E-3
olens2_imon=3.84402E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10955E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=1.88493E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63722E1
os_ef1bup_imon=3.11215E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=1.1767E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93335E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01433E1
cs_anode1_imon=2.89251E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.28436E-10
tplens_vset=0.0E0
tplens_vmon=-1.70337E0
tplens_imon=-2.70572E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99552E1
iondef3_imon=8.96375E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98507E1
iondef2_imon=9.20089E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98325E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.37164E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30755E0
ionrepsh_imon=1.73946E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74692E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.54575E-1
os_ea2_imon=-8.72271E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7109E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62855E0
os_ef2alow_imon=-2.32089E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23671E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=2.86332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.24577E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58059E1
iondef1_imon=5.21197E-6
iondef4_vset=1.53E1
iondef4_vmon=1.5004E1
iondef4_imon=5.18218E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.29932E-9
olens1_vset=0.0E0
olens1_vmon=1.16825E-3
olens1_imon=3.91841E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13651E0
cs_ionaccel_imon=-1.86563E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=2.22319E-1
window_imon=-9.06461E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39143E-4
mask2_vset=0.0E0
mask2_vmon=-1.86431E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92747E3
multa_neg_imon=7.20112E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.68083E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50206E3
multb_neg_imon=8.02934E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.59605E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33768E1
os_fil1_imon=4.20602E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.38588E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6108E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30706E1
cs_fil1_imon=9.9781E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63426E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62695E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.37379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.81364E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.2908E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32523E-1
cs_fil2_imon=-1.93938E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=5.68592E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21532E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27219E-2
chamber_ion_pmon=2.15441E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.93583E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.75E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80027E1	-9.53674E-4	-8.80004E1	2.14577E-4	5.07832E-3	9.33647E-2	1.58179E1	-1.98525E1	-1.99955E1	1.5019E1	2.16081E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.25524E-2
2.0E0	1.794E3	4.0E0	3.16E2	1.6E2	-7.201E-2	-8.80027E1	-9.29832E-4	-8.8E1	4.29153E-4	5.14984E-3	9.31978E-2	1.5747E1	-1.98658E1	-1.99922E1	1.50435E1	2.15808E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.27026E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.10825E-2	-8.80029E1	-1.12057E-3	-8.8E1	5.72205E-4	5.03063E-3	9.30786E-2	1.58093E1	-1.98221E1	-1.99311E1	1.50503E1	2.15832E-9	2.5216E-3	2.5216E-3	6.3074E-3	2.26825E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80026E1	-8.82149E-4	-8.80001E1	6.4373E-4	4.98295E-3	9.35793E-2	1.58292E1	-1.98287E1	-1.99803E1	1.50328E1	2.15762E-9	2.51675E-3	2.51675E-3	6.31332E-3	2.272E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80027E1	-9.05991E-4	-8.80003E1	5.00679E-4	5.17368E-3	9.36508E-2	1.57921E1	-1.98158E1	-1.99197E1	1.49454E1	2.15706E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.27492E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80028E1	-7.39098E-4	-8.80005E1	5.72205E-4	5.19753E-3	9.33647E-2	1.58327E1	-1.98641E1	-1.99514E1	1.50232E1	2.15533E-9	2.51525E-3	2.51525E-3	6.30202E-3	2.26445E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80026E1	-9.29832E-4	-8.80003E1	4.52995E-4	5.14984E-3	9.31978E-2	1.57885E1	-1.9829E1	-1.9978E1	1.49998E1	2.15987E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.25917E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80025E1	-8.58307E-4	-8.80004E1	4.05312E-4	5.53131E-3	9.3174E-2	1.57692E1	-1.98555E1	-1.99234E1	1.50256E1	2.15533E-9	2.51632E-3	2.51632E-3	6.29128E-3	2.25674E-2
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80025E1	-8.58307E-4	-8.80003E1	3.33786E-4	5.19753E-3	9.31263E-2	1.57795E1	-1.98753E1	-1.99774E1	1.4998E1	2.15894E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.25917E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80028E1	-6.67572E-4	-8.80004E1	4.05312E-4	5.29289E-3	9.30071E-2	1.57873E1	-1.98549E1	-1.99834E1	1.50022E1	2.15791E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.26569E-2
1.4E1	7.1E1	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80027E1	-6.91414E-4	-8.80005E1	2.14577E-4	5.26905E-3	9.33886E-2	1.58125E1	-1.98507E1	-1.9951E1	1.4998E1	2.159E-9	2.51525E-3	2.51525E-3	6.32356E-3	2.27219E-2
1.5E1	2.5E1	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80024E1	-5.96046E-4	-8.80008E1	1.19209E-4	5.34058E-3	9.33886E-2	1.58309E1	-1.99042E1	-1.99414E1	1.50172E1	2.15706E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.28681E-2
1.6E1	1.48E2	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80026E1	-5.00679E-4	-8.80002E1	2.14577E-4	5.19753E-3	9.33647E-2	1.5805E1	-1.98381E1	-1.99378E1	1.5045E1	2.15992E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.27607E-2
1.7E1	1.83E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80026E1	-7.62939E-4	-8.80002E1	1.43051E-4	5.126E-3	9.32693E-2	1.57922E1	-1.98508E1	-1.9942E1	1.4962E1	2.15533E-9	2.52384E-3	2.52384E-3	6.32356E-3	2.26832E-2
1.8E1	7.67E2	2.0E0	7.27E2	5.0E2	-7.35556E-2	-8.8003E1	-1.0252E-3	-8.80001E1	5.24521E-4	5.24521E-3	9.30548E-2	1.57778E1	-1.98753E1	-2.00139E1	1.50154E1	2.15696E-9	2.52362E-3	2.52362E-3	6.30182E-3	2.27574E-2
1.9E1	9.33E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80029E1	-6.67572E-4	-8.80006E1	3.57628E-4	5.126E-3	9.32693E-2	1.57584E1	-1.98476E1	-1.9969E1	1.50082E1	2.15992E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.26832E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80026E1	-7.15256E-4	-8.80003E1	4.76837E-4	5.05447E-3	9.3317E-2	1.586E1	-1.98963E1	-1.9981E1	1.49265E1	2.15519E-9	2.51771E-3	2.51771E-3	6.34037E-3	2.26506E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80024E1	-6.4373E-4	-8.80001E1	4.52995E-4	5.03063E-3	9.32217E-2	1.57424E1	-1.97632E1	-2.00263E1	1.50346E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.2631E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80028E1	-6.19888E-4	-8.80004E1	4.05312E-4	5.17368E-3	9.32693E-2	1.58351E1	-1.98729E1	-1.99484E1	1.5031E1	2.15441E-9	2.51954E-3	2.51954E-3	6.3074E-3	2.26059E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.8003E1	-9.77516E-4	-8.80005E1	3.8147E-4	5.14984E-3	9.35316E-2	1.58059E1	-1.98507E1	-1.99552E1	1.5004E1	2.15441E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.27219E-2