[Scan]
initial_time=2016-01-27T19:00:06
final_time=2016-01-27T19:00:25
ip_count=19
run=1025
dataset=1
scan=57
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.80006E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-5.77974E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=4.33958E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.7776E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=8.59714E-10
mult1=-1.00597E-8
mult2=-2.79734E-9
rf_tmon=-4.64869E-3
rf_agc=3.4194E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=4.73738E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67218E0
bslens_imon=2.57244E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19682E1
lens5a_imon=1.99897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53618E1
cs_ef1b_imon=2.79165E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02378E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04829E1
cs_ea1_imon=2.63145E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00349E0
lens1_imon=1.4779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64565E1
os_ef1alow_imon=2.99188E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03464E1
cs_ea2_imon=1.51818E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84126E1
cs_ef1a_imon=2.90729E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=4.06086E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=2.88708E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15257E1
os_ea1_imon=1.884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6386E1
os_ef1bup_imon=3.0802E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23802E0
cs_ionrep_imon=1.18871E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93493E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01859E1
cs_anode1_imon=2.9058E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.32334E-10
tplens_vset=0.0E0
tplens_vmon=-1.62184E0
tplens_imon=-7.94438E-8
iondef3_vset=-2.0E1
iondef3_vmon=-1.99681E1
iondef3_imon=8.49694E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98682E1
iondef2_imon=9.63924E-6
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98258E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=4.5619E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29923E0
ionrepsh_imon=1.76426E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3356E1
lens5b_imon=2.16535E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74464E1
cs_ef2b_imon=3.12549E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.22442E-1
os_ea2_imon=-4.02665E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00557E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71158E1
cs_ef2a_imon=3.20221E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58975E0
os_ef2alow_imon=-2.65665E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.25275E-1
os_ef2bup_imon=-5.29143E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10936E1
os_restr2_imon=2.86687E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30589E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01927E1
cs_anode2_imon=2.24972E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58275E1
iondef1_imon=5.02231E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49776E1
iondef4_imon=5.26639E-6
olens3_vset=-1.28E1
olens3_vmon=-1.2796E1
olens3_imon=2.2823E-9
olens1_vset=0.0E0
olens1_vmon=1.21593E-3
olens1_imon=3.72839E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13326E0
cs_ionaccel_imon=-1.76966E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47294E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56418E1
einzel_imon=7.73275E-6
window_vset=0.0E0
window_vmon=2.28824E-1
window_imon=-1.00243E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86824E1
mask2_imon=-7.36708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=8.06721E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.37764E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.21508E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46891E0
defgridb_imon=6.20134E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33783E1
os_fil1_imon=5.39652E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60994E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30686E1
cs_fil1_imon=9.97168E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63351E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62908E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.84391E-2
os_fil2_imon=-2.47537E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.80671E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45995E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31265E-1
cs_fil2_imon=-2.13854E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21693E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31761E-3
inlet_lpb_pmon=2.25362E-2
chamber_ion_pmon=2.15396E-9
chamber_cvt_pmon=2.51752E-3
foreline_cvt_pmon=2.51752E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.09909E-1
res40_imon=-2.47701E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.67E2	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80029E1	-1.09673E-3	-8.80004E1	4.76837E-4	5.36442E-3	9.35793E-2	1.57737E1	-1.98647E1	-1.9965E1	1.49981E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.2769E-2
2.0E0	1.838E3	5.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80029E1	-8.82149E-4	-8.80002E1	2.38419E-4	4.81606E-3	9.35555E-2	1.58007E1	-1.98875E1	-1.99359E1	1.49461E1	2.158E-9	2.51225E-3	2.51225E-3	6.31837E-3	2.27097E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.8003E1	-5.96046E-4	-8.80002E1	4.76837E-4	4.98295E-3	9.32693E-2	1.58233E1	-1.98694E1	-1.99756E1	1.50479E1	2.15425E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.28086E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80029E1	-6.91414E-4	-8.80004E1	7.15256E-5	4.91142E-3	9.32693E-2	1.58041E1	-1.9855E1	-1.9968E1	1.50057E1	2.15716E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.25674E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80029E1	-8.34465E-4	-8.80004E1	5.00679E-4	4.76837E-3	9.33647E-2	1.58369E1	-1.98777E1	-1.99438E1	1.49873E1	2.15624E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.27219E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80028E1	-1.09673E-3	-8.80002E1	4.52995E-4	5.17368E-3	9.3317E-2	1.57783E1	-1.98777E1	-1.99696E1	1.50136E1	2.16081E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.26113E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80031E1	-8.82149E-4	-8.80003E1	4.76837E-4	4.86374E-3	9.33886E-2	1.5789E1	-1.98576E1	-1.99768E1	1.49865E1	2.15519E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.25133E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80031E1	-5.00679E-4	-8.80004E1	5.48363E-4	4.93526E-3	9.33886E-2	1.58516E1	-1.98633E1	-1.99636E1	1.49704E1	2.158E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.27295E-2
1.2E1	3.3E1	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80027E1	-8.34465E-4	-8.80001E1	3.8147E-4	5.126E-3	9.33647E-2	1.57837E1	-1.98729E1	-1.9926E1	1.50653E1	2.15533E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.26832E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80026E1	-1.0252E-3	-8.80001E1	2.14577E-4	5.24521E-3	9.30786E-2	1.5759E1	-1.98404E1	-1.99546E1	1.5004E1	2.15349E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.27607E-2
1.4E1	7.9E1	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80026E1	-8.58307E-4	-8.8E1	1.43051E-4	5.17368E-3	9.3174E-2	1.58407E1	-1.98434E1	-1.9972E1	1.5013E1	2.15987E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.27097E-2
1.5E1	2.0E1	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80025E1	-6.91414E-4	-8.8E1	4.52995E-4	5.24521E-3	9.30786E-2	1.58023E1	-1.98735E1	-1.99684E1	1.50138E1	2.15613E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.2631E-2
1.6E1	1.58E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80023E1	-6.91414E-4	-8.8E1	4.05312E-4	5.17368E-3	9.31501E-2	1.57933E1	-1.98326E1	-1.99486E1	1.49511E1	2.15706E-9	2.51116E-3	2.51116E-3	6.3074E-3	2.2572E-2
1.7E1	1.76E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80024E1	-7.86781E-4	-8.80001E1	3.8147E-4	4.81606E-3	9.3627E-2	1.57975E1	-1.98446E1	-1.99786E1	1.5024E1	2.158E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.27492E-2
1.8E1	7.2E2	1.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80029E1	-9.05991E-4	-8.80002E1	5.24521E-4	4.79221E-3	9.3174E-2	1.58341E1	-1.98356E1	-1.99516E1	1.49325E1	2.15425E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.27097E-2
1.9E1	8.48E2	2.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80028E1	-8.10623E-4	-8.80002E1	4.29153E-4	4.91142E-3	9.3174E-2	1.58221E1	-1.98476E1	-1.99792E1	1.49208E1	2.16175E-9	2.52428E-3	2.52428E-3	6.31837E-3	2.269E-2
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80028E1	-6.4373E-4	-8.80001E1	3.8147E-4	4.88758E-3	9.33647E-2	1.57891E1	-1.98945E1	-1.99252E1	1.51488E1	2.15613E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.25133E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80026E1	-1.21593E-3	-8.80001E1	2.6226E-4	5.22137E-3	9.31025E-2	1.59365E1	-1.9985E1	-1.99012E1	1.4968E1	2.15613E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.26113E-2
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80029E1	-1.04904E-3	-8.8E1	3.57628E-4	4.76837E-3	9.31501E-2	1.57768E1	-1.98555E1	-1.99451E1	1.50178E1	2.15808E-9	2.52061E-3	2.52061E-3	6.33436E-3	2.26059E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80028E1	-8.34465E-4	-8.80001E1	3.57628E-4	5.14984E-3	9.32455E-2	1.58275E1	-1.98682E1	-1.99681E1	1.49776E1	2.15396E-9	2.51752E-3	2.51752E-3	6.31761E-3	2.25362E-2