[Scan]
initial_time=2016-01-27T19:02:19
final_time=2016-01-27T19:02:38
ip_count=19
run=1025
dataset=1
scan=62
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.79685E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.26266E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=4.2398E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.68589E-9
ql4_vset=
ql4_vmon=6.4373E-4
ql4_imon=9.0332E-10
mult1=-9.99324E-9
mult2=-2.81043E-9
rf_tmon=-4.57251E-3
rf_agc=3.38683E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=4.91786E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65052E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12508E2
lens4a_imon=2.04992E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=2.79349E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0479E1
cs_ea1_imon=2.63304E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00651E0
lens1_imon=1.35172E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=3.00072E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04189E1
cs_ea2_imon=1.5494E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.91999E-5
olens2_vset=0.0E0
olens2_vmon=1.5974E-3
olens2_imon=3.96478E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10517E1
os_restr1_imon=2.88143E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=1.8897E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23768E0
cs_ionrep_imon=1.19034E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01629E1
cs_anode1_imon=2.89584E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=9.60708E-11
tplens_vset=0.0E0
tplens_vmon=-1.64984E0
tplens_imon=-1.94802E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99678E1
iondef3_imon=8.66978E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98398E1
iondef2_imon=9.32588E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=5.04386E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29716E0
ionrepsh_imon=1.75848E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.30695E-1
os_ea2_imon=-4.86804E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00713E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6336E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3976E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=2.87855E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.241E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58191E1
iondef1_imon=5.12611E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50082E1
iondef4_imon=5.14704E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.24328E-9
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=3.67141E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14576E0
cs_ionaccel_imon=-1.71491E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47143E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-1.10944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39318E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.62216E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.07278E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.64794E0
defgridb_imon=6.17515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33813E1
os_fil1_imon=4.91437E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.76751E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61292E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=9.97218E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63105E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62392E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.83939E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.25482E-2
chamber_ion_pmon=2.15808E-9
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.83629E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.74E2	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80029E1	-8.82149E-4	-8.80001E1	4.05312E-4	5.22137E-3	9.32932E-2	1.57302E1	-1.98855E1	-1.99726E1	1.50088E1	2.15894E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.26703E-2
2.0E0	1.802E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80026E1	-7.15256E-4	-8.80002E1	4.05312E-4	4.93526E-3	9.31501E-2	1.58065E1	-1.98513E1	-1.99606E1	1.50581E1	2.15808E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.27413E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80028E1	-1.21593E-3	-8.80001E1	1.66893E-4	5.00679E-3	9.31025E-2	1.5864E1	-1.98369E1	-1.99762E1	1.49259E1	2.15696E-9	2.5225E-3	2.5225E-3	6.34099E-3	2.26971E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80027E1	-1.09673E-3	-8.79998E1	1.19209E-4	4.93526E-3	9.3174E-2	1.57885E1	-1.98434E1	-1.99696E1	1.49764E1	2.15624E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.25867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80027E1	-6.4373E-4	-8.80001E1	2.86102E-4	4.88758E-3	9.33409E-2	1.58113E1	-1.98669E1	-1.99318E1	1.50989E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31837E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80029E1	-8.10623E-4	-8.80002E1	4.52995E-4	4.98295E-3	9.33409E-2	1.59333E1	-1.98521E1	-1.99494E1	1.49983E1	2.158E-9	2.52538E-3	2.52538E-3	6.31288E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80024E1	-1.0252E-3	-8.80001E1	2.38419E-4	5.07832E-3	9.34839E-2	1.57342E1	-1.98616E1	-1.9952E1	1.50723E1	2.15647E-9	2.5199E-3	2.5199E-3	6.30221E-3	2.25215E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80025E1	-9.53674E-4	-8.80003E1	2.38419E-5	5.10216E-3	9.31263E-2	1.57957E1	-1.98531E1	-2.00159E1	1.49524E1	2.15772E-9	2.5199E-3	2.5199E-3	6.27268E-3	2.2587E-2
1.2E1	3.4E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80026E1	-9.05991E-4	-8.80001E1	1.43051E-4	5.22137E-3	9.36985E-2	1.58014E1	-1.98493E1	-1.99927E1	1.50416E1	2.15613E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.24937E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80028E1	-9.53674E-4	-8.80001E1	3.57628E-4	4.98295E-3	9.3174E-2	1.58786E1	-1.98903E1	-1.99041E1	1.5031E1	2.159E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.27026E-2
1.4E1	8.8E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80026E1	-1.33514E-3	-8.8E1	9.53674E-5	4.76837E-3	9.33886E-2	1.58407E1	-1.98759E1	-1.99438E1	1.50274E1	2.16081E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.26113E-2
1.5E1	2.0E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80028E1	-1.04904E-3	-8.80002E1	3.57628E-4	5.05447E-3	9.33409E-2	1.57807E1	-1.98687E1	-1.9966E1	1.50286E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.26113E-2
1.6E1	1.42E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80025E1	-9.05991E-4	-8.80001E1	5.48363E-4	5.17368E-3	9.36985E-2	1.58413E1	-1.98495E1	-1.99726E1	1.49926E1	2.15808E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.26252E-2
1.7E1	1.63E2	0.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80023E1	-9.05991E-4	-8.8E1	3.33786E-4	5.26905E-3	9.31501E-2	1.58299E1	-1.98549E1	-1.99246E1	1.49878E1	2.15613E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.2572E-2
1.8E1	7.71E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80027E1	-1.00136E-3	-8.80001E1	2.6226E-4	4.673E-3	9.31501E-2	1.57784E1	-1.98971E1	-1.99638E1	1.49295E1	2.15791E-9	2.5225E-3	2.5225E-3	6.34099E-3	2.25968E-2
1.9E1	8.7E2	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80028E1	-1.04904E-3	-8.79998E1	3.33786E-4	4.79221E-3	9.3317E-2	1.589E1	-1.98603E1	-1.99979E1	1.48773E1	2.15349E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.25674E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80026E1	-1.14441E-3	-8.8E1	9.53674E-5	4.98295E-3	9.34601E-2	1.57194E1	-1.98591E1	-1.99468E1	1.49926E1	2.15894E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.25329E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80029E1	-1.16825E-3	-8.80002E1	4.05312E-4	4.8399E-3	9.36508E-2	1.57926E1	-1.98659E1	-1.99944E1	1.5012E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.24742E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80024E1	-1.28746E-3	-8.80003E1	4.52995E-4	4.62532E-3	9.35555E-2	1.58687E1	-1.98753E1	-1.99514E1	1.49301E1	2.15716E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.25867E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80027E1	-1.21593E-3	-8.80001E1	6.4373E-4	4.88758E-3	9.33886E-2	1.58191E1	-1.98398E1	-1.99678E1	1.50082E1	2.15808E-9	2.51847E-3	2.51847E-3	6.3074E-3	2.25482E-2