[Scan]
initial_time=2016-01-27T19:02:45
final_time=2016-01-27T19:03:05
ip_count=19
run=1025
dataset=1
scan=63
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81599E-6
ql1_vset=
ql1_vmon=-8.80024E1
ql1_imon=-6.26767E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=4.23527E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.73229E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=8.62193E-10
mult1=-1.00752E-8
mult2=-2.76268E-9
rf_tmon=-4.72456E-3
rf_agc=3.31919E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.00345E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64131E0
bslens_imon=2.54686E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19501E1
lens5a_imon=1.99064E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05134E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53691E1
cs_ef1b_imon=2.79755E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.65149E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02289E0
lens1_imon=1.40959E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6452E1
os_ef1alow_imon=3.00309E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.041E1
cs_ea2_imon=1.54291E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84283E1
cs_ef1a_imon=2.90578E-5
olens2_vset=0.0E0
olens2_vmon=1.16825E-3
olens2_imon=3.80588E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11527E1
os_restr1_imon=2.87301E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.151E1
os_ea1_imon=1.88306E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64099E1
os_ef1bup_imon=3.09494E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27657E0
cs_ionrep_imon=1.1949E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93318E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=2.89725E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=1.53816E-10
tplens_vset=0.0E0
tplens_vmon=-1.63688E0
tplens_imon=-2.22883E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9962E1
iondef3_imon=8.73182E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98247E1
iondef2_imon=9.48658E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98298E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.39715E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26804E0
ionrepsh_imon=1.75943E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.19112E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74752E1
cs_ef2b_imon=3.1383E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.34932E-1
os_ea2_imon=-5.13177E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7111E1
cs_ef2a_imon=3.18234E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.65177E0
os_ef2alow_imon=-2.45258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55883E-1
os_ef2bup_imon=-5.23522E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=2.8672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.32012E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.22395E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57611E1
iondef1_imon=5.12535E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49455E1
iondef4_imon=5.33198E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.13988E-9
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=3.60918E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15746E0
cs_ionaccel_imon=-1.67754E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47137E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56559E1
einzel_imon=7.78685E-6
window_vset=0.0E0
window_vmon=2.24962E-1
window_imon=-1.06638E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86407E1
mask2_imon=-6.83984E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.22229E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.55974E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.43404E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.51197E0
defgridb_imon=6.09527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33804E1
os_fil1_imon=4.66431E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61197E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6117E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30797E1
cs_fil1_imon=9.98136E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63339E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62374E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94327E-2
os_fil2_imon=-2.4374E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=5.33026E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45223E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28854E-1
cs_fil2_imon=-2.5E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.88264E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21664E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32273E-3
inlet_lpb_pmon=2.25362E-2
chamber_ion_pmon=2.15309E-9
chamber_cvt_pmon=2.52364E-3
foreline_cvt_pmon=2.52364E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.03267E-1
res40_imon=-2.39795E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=235
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.15E2	1.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80028E1	-7.86781E-4	-8.80002E1	5.00679E-4	4.95911E-3	9.31501E-2	1.58106E1	-1.98675E1	-1.9924E1	1.50217E1	2.15115E-9	2.52405E-3	2.52405E-3	6.323E-3	2.27264E-2
2.0E0	1.755E3	4.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80028E1	-7.86781E-4	-8.80005E1	2.86102E-4	5.03063E-3	9.33886E-2	1.5815E1	-1.98541E1	-1.9985E1	1.50028E1	2.15661E-9	2.51793E-3	2.51793E-3	6.33112E-3	2.26561E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80028E1	-5.72205E-4	-8.80003E1	4.29153E-4	4.86374E-3	9.32693E-2	1.57637E1	-1.98706E1	-2.00045E1	1.49451E1	2.15808E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.26639E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80023E1	-8.10623E-4	-8.80001E1	4.52995E-4	4.91142E-3	9.33886E-2	1.57999E1	-1.98807E1	-1.99552E1	1.50863E1	2.15365E-9	2.51287E-3	2.51287E-3	6.32328E-3	2.2544E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80024E1	-1.12057E-3	-8.80006E1	5.96046E-4	4.673E-3	9.34839E-2	1.57957E1	-1.98483E1	-1.99282E1	1.50449E1	2.15696E-9	2.52697E-3	2.52697E-3	6.3074E-3	2.26169E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80027E1	-1.00136E-3	-8.80001E1	2.38419E-4	5.17368E-3	9.38416E-2	1.577E1	-1.98499E1	-1.99754E1	1.49526E1	2.15783E-9	2.52044E-3	2.52044E-3	6.31551E-3	2.25855E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80027E1	-9.53674E-4	-8.80003E1	0.0E0	4.64916E-3	9.36031E-2	1.5802E1	-1.98563E1	-1.99408E1	1.50783E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80027E1	-7.39098E-4	-8.80003E1	1.66893E-4	4.76837E-3	9.3627E-2	1.59711E1	-1.98521E1	-1.99309E1	1.49117E1	2.15314E-9	2.51915E-3	2.51915E-3	6.32978E-3	2.24971E-2
1.2E1	5.0E1	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80027E1	-9.53674E-4	-8.79999E1	1.43051E-4	4.64916E-3	9.36031E-2	1.5771E1	-1.98386E1	-1.99222E1	1.51806E1	2.16028E-9	2.51709E-3	2.51709E-3	6.33565E-3	2.25189E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80028E1	-1.19209E-3	-8.80002E1	4.29153E-4	4.81606E-3	9.36508E-2	1.58292E1	-1.98688E1	-1.99974E1	1.4816E1	2.15425E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.26506E-2
1.4E1	7.5E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80028E1	-1.3113E-3	-8.80001E1	4.76837E-5	4.74453E-3	9.35078E-2	1.57692E1	-1.98428E1	-2.00183E1	1.51927E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.25097E-2
1.5E1	1.4E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80026E1	-9.77516E-4	-8.80002E1	4.05312E-4	4.95911E-3	9.35078E-2	1.57602E1	-1.98519E1	-1.99216E1	1.49379E1	2.15987E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25917E-2
1.6E1	1.17E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80026E1	-1.21593E-3	-8.8E1	4.76837E-4	5.03063E-3	9.31501E-2	1.58125E1	-1.98344E1	-1.99678E1	1.49175E1	2.159E-9	2.51203E-3	2.51203E-3	6.3074E-3	2.27607E-2
1.7E1	2.26E2	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80028E1	-9.05991E-4	-8.80002E1	2.38419E-4	4.8399E-3	9.36508E-2	1.58056E1	-1.98529E1	-1.99473E1	1.50406E1	2.15238E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25524E-2
1.8E1	7.55E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80027E1	-1.00136E-3	-8.8E1	2.38419E-4	4.60148E-3	9.34601E-2	1.57652E1	-1.9863E1	-2.00118E1	1.50253E1	2.15613E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.26703E-2
1.9E1	8.96E2	1.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80025E1	-1.0252E-3	-8.8E1	1.19209E-4	4.69685E-3	9.32455E-2	1.58047E1	-1.98561E1	-1.99594E1	1.48979E1	2.15409E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.26569E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80027E1	-9.05991E-4	-8.79997E1	2.38419E-5	4.88758E-3	9.32217E-2	1.57861E1	-1.98499E1	-1.99726E1	1.51199E1	2.15624E-9	2.5131E-3	2.5131E-3	6.31278E-3	2.26832E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80031E1	-1.00136E-3	-8.8E1	0.0E0	4.72069E-3	9.377E-2	1.57979E1	-1.98953E1	-1.99419E1	1.50082E1	2.15987E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.27097E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80027E1	-9.53674E-4	-8.80001E1	4.29153E-4	4.76837E-3	9.34124E-2	1.58744E1	-1.98679E1	-1.99681E1	1.49423E1	2.159E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.27802E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80024E1	-8.58307E-4	-8.79999E1	9.53674E-5	4.55379E-3	9.35078E-2	1.57611E1	-1.98247E1	-1.9962E1	1.49455E1	2.15309E-9	2.52364E-3	2.52364E-3	6.32273E-3	2.25362E-2