[Scan]
initial_time=2016-01-27T19:03:12
final_time=2016-01-27T19:03:32
ip_count=19
run=1025
dataset=1
scan=64
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.82516E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.14202E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=4.57776E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.75278E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=9.04107E-10
mult1=-9.16244E-9
mult2=-2.71063E-9
rf_tmon=-3.68329E-3
rf_agc=3.37421E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=4.68564E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62708E0
bslens_imon=2.62788E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12442E2
lens4a_imon=2.05147E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.8162E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04994E1
cs_ea1_imon=2.64314E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98668E0
lens1_imon=1.50313E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.9863E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.52596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.93152E-5
olens2_vset=0.0E0
olens2_vmon=1.09673E-3
olens2_imon=4.00376E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=2.86269E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14885E1
os_ea1_imon=1.8861E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64734E1
os_ef1bup_imon=3.1074E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22987E0
cs_ionrep_imon=1.17881E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93467E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=2.89548E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99977E1
olens4_imon=1.04666E-10
tplens_vset=0.0E0
tplens_vmon=-1.66487E0
tplens_imon=-1.62358E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99618E1
iondef3_imon=8.62652E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98675E1
iondef2_imon=9.45566E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.82213E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=1.7538E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74748E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2709E-1
os_ea2_imon=-5.51693E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00716E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61257E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.86737E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.25254E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57674E1
iondef1_imon=5.32078E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50262E1
iondef4_imon=5.2011E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.21219E-9
olens1_vset=0.0E0
olens1_vmon=1.40667E-3
olens1_imon=4.22847E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18E0
cs_ionaccel_imon=-1.60679E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-6.87777E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.27248E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.26024E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48854E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33804E1
os_fil1_imon=4.13952E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.71946E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60667E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30845E1
cs_fil1_imon=9.97008E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6296E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62649E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89915E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5504E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.80044E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21773E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31879E-3
inlet_lpb_pmon=2.26022E-2
chamber_ion_pmon=2.15977E-9
chamber_cvt_pmon=2.51271E-3
foreline_cvt_pmon=2.51271E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.28969E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.88E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80023E1	-7.39098E-4	-8.8E1	5.96046E-4	4.74453E-3	9.377E-2	1.58026E1	-1.9867E1	-1.99709E1	1.50088E1	2.15706E-9	2.51771E-3	2.51771E-3	6.29645E-3	2.2572E-2
2.0E0	1.795E3	6.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80024E1	-9.29832E-4	-8.80004E1	3.8147E-4	4.673E-3	9.35316E-2	1.58724E1	-1.9863E1	-1.99145E1	1.50016E1	2.15716E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.26445E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80023E1	-1.00136E-3	-8.80002E1	5.72205E-4	4.95911E-3	9.32693E-2	1.58221E1	-1.98564E1	-1.9962E1	1.49947E1	2.15587E-9	2.52179E-3	2.52179E-3	6.3131E-3	2.27454E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80026E1	-1.04904E-3	-8.80002E1	5.48363E-4	4.79221E-3	9.31501E-2	1.57991E1	-1.98653E1	-1.99378E1	1.49938E1	2.15716E-9	2.51739E-3	2.51739E-3	6.32356E-3	2.25867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80028E1	-1.0252E-3	-8.80002E1	5.96046E-4	4.79221E-3	9.3174E-2	1.58167E1	-1.98332E1	-1.99906E1	1.50064E1	2.15716E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.26445E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.19325E-2	-8.80027E1	-9.29832E-4	-8.80003E1	3.33786E-4	4.8399E-3	9.30548E-2	1.57915E1	-1.98422E1	-1.99035E1	1.50274E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80028E1	-1.00136E-3	-8.80001E1	5.00679E-4	4.76837E-3	9.34362E-2	1.57915E1	-1.98464E1	-2.00093E1	1.49998E1	2.158E-9	2.5188E-3	2.5188E-3	6.30192E-3	2.27492E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.14689E-2	-8.80027E1	-1.35899E-3	-8.80003E1	4.52995E-4	4.88758E-3	9.34362E-2	1.57927E1	-1.98495E1	-1.99276E1	1.50781E1	2.15706E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.27097E-2
1.2E1	3.3E1	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80025E1	-1.33514E-3	-8.79998E1	3.33786E-4	4.673E-3	9.35316E-2	1.57999E1	-1.98699E1	-1.98795E1	1.49223E1	2.15533E-9	2.52384E-3	2.52384E-3	6.31817E-3	2.25482E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80023E1	-1.19209E-3	-8.79998E1	3.33786E-4	4.79221E-3	9.28879E-2	1.58011E1	-1.98867E1	-1.99684E1	1.49461E1	2.16081E-9	2.51552E-3	2.51552E-3	6.32936E-3	2.2572E-2
1.4E1	7.8E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80025E1	-1.3113E-3	-8.80002E1	4.76837E-5	4.673E-3	9.29832E-2	1.57729E1	-1.98458E1	-1.9993E1	1.50867E1	2.15505E-9	2.52697E-3	2.52697E-3	6.32978E-3	2.25769E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80022E1	-1.45435E-3	-8.80002E1	3.8147E-4	4.55379E-3	9.31501E-2	1.58244E1	-1.98464E1	-1.99697E1	1.49962E1	2.15808E-9	2.51739E-3	2.51739E-3	6.31278E-3	2.25867E-2
1.6E1	1.62E2	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80024E1	-1.04904E-3	-8.80001E1	3.8147E-4	4.60148E-3	9.3317E-2	1.5792E1	-1.98617E1	-1.99779E1	1.50052E1	2.15716E-9	2.52815E-3	2.52815E-3	6.32356E-3	2.25289E-2
1.7E1	1.98E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80024E1	-1.23978E-3	-8.8E1	2.6226E-4	4.8399E-3	9.32693E-2	1.57518E1	-1.98645E1	-1.99708E1	1.49584E1	2.15519E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.2769E-2
1.8E1	7.51E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80031E1	-7.15256E-4	-8.80002E1	2.38419E-5	5.126E-3	9.33886E-2	1.58313E1	-1.98716E1	-1.9912E1	1.5004E1	2.15706E-9	2.51225E-3	2.51225E-3	6.32936E-3	2.27492E-2
1.9E1	9.38E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80027E1	-8.10623E-4	-8.8E1	4.29153E-4	4.76837E-3	9.3317E-2	1.57464E1	-1.98711E1	-1.99185E1	1.50659E1	2.15332E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.2631E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80026E1	-8.82149E-4	-8.8E1	3.57628E-4	4.76837E-3	9.3317E-2	1.58474E1	-1.98664E1	-1.99868E1	1.49582E1	2.15433E-9	2.51809E-3	2.51809E-3	6.32099E-3	2.26281E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80029E1	-1.0252E-3	-8.80003E1	2.14577E-4	4.79221E-3	9.3174E-2	1.58129E1	-1.9836E1	-1.99504E1	1.50109E1					
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.41738E-2	-8.80026E1	-1.0252E-3	-8.80002E1	2.14577E-4	5.126E-3	9.32693E-2	1.57948E1	-1.98553E1	-1.99564E1	1.49174E1	2.15636E-9	2.51603E-3	2.51603E-3	6.31269E-3	2.25063E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80025E1	-9.29832E-4	-8.80001E1	4.52995E-4	5.126E-3	9.31978E-2	1.57674E1	-1.98675E1	-1.99618E1	1.50262E1	2.15977E-9	2.51271E-3	2.51271E-3	6.31879E-3	2.26022E-2