[Scan]
initial_time=2016-01-27T19:03:39
final_time=2016-01-27T19:03:58
ip_count=19
run=1025
dataset=1
scan=65
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.84889E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-6.50549E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=4.1399E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.69113E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.90076E-10
mult1=-9.58386E-9
mult2=-2.76851E-9
rf_tmon=-5.72609E-3
rf_agc=3.22461E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.75454E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53755E1
cs_ef1b_imon=2.8093E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.01988E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=2.62836E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01732E0
lens1_imon=1.66896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.98408E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03726E1
cs_ea2_imon=1.52885E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84299E1
cs_ef1a_imon=2.92313E-5
olens2_vset=0.0E0
olens2_vmon=1.23978E-3
olens2_imon=3.96395E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11154E1
os_restr1_imon=2.8809E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=1.88069E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63871E1
os_ef1bup_imon=3.09314E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21725E0
cs_ionrep_imon=1.17809E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01742E1
cs_anode1_imon=2.90587E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=9.03726E-11
tplens_vset=0.0E0
tplens_vmon=-1.64564E0
tplens_imon=-3.17371E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99949E1
iondef3_imon=8.78514E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98759E1
iondef2_imon=9.56381E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.93932E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24188E0
ionrepsh_imon=1.74118E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33562E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74795E1
cs_ef2b_imon=3.12508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.92242E-1
os_ea2_imon=-4.00285E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70994E1
cs_ef2a_imon=3.19008E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61606E0
os_ef2alow_imon=-2.55327E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.56828E-1
os_ef2bup_imon=-5.21177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10952E1
os_restr2_imon=2.87539E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0146E1
cs_anode2_imon=2.2361E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58552E1
iondef1_imon=5.10448E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50713E1
iondef4_imon=5.27903E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.18828E-9
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=3.55947E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14422E0
cs_ionaccel_imon=-1.65364E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.65846E-6
window_vset=0.0E0
window_vmon=1.88704E-1
window_imon=-1.09917E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82587E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86705E1
mask2_imon=-6.65882E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.51402E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.19896E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.47952E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33804E1
os_fil1_imon=4.9061E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.33572E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61063E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=9.9709E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62861E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62232E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1184E-2
os_fil2_imon=-2.40111E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.73059E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.2985E-1
cs_fil2_imon=-2.49903E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0383E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21591E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.26113E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.4777E-1
res40_imon=-2.48718E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.45E2	1.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80024E1	-9.29832E-4	-8.79996E1	4.05312E-4	5.26905E-3	9.35316E-2	1.58469E1	-1.9883E1	-1.99189E1	1.49952E1	2.15808E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.25482E-2
2.0E0	1.79E3	3.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80025E1	-5.00679E-4	-8.8E1	2.86102E-4	5.36442E-3	9.33647E-2	1.57686E1	-1.99095E1	-1.99606E1	1.50268E1	2.15624E-9	2.51632E-3	2.51632E-3	6.31278E-3	2.26445E-2
3.0E0	1.0E0	2.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80024E1	-5.00679E-4	-8.79998E1	9.53674E-5	5.65052E-3	9.32932E-2	1.57392E1	-1.98501E1	-1.99606E1	1.50094E1	2.15791E-9	2.52139E-3	2.52139E-3	6.34661E-3	2.25968E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80024E1	-5.24521E-4	-8.80001E1	2.6226E-4	5.05447E-3	9.34839E-2	1.58244E1	-1.98623E1	-1.99437E1	1.50244E1	2.15894E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.26113E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.47923E-2	-8.80023E1	-1.04904E-3	-8.80002E1	1.43051E-4	5.17368E-3	9.31978E-2	1.5854E1	-1.9844E1	-1.99726E1	1.50004E1	2.15716E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.26059E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.45602E-2	-8.80021E1	-7.39098E-4	-8.79999E1	9.53674E-5	5.19753E-3	9.35316E-2	1.57789E1	-1.98645E1	-1.99396E1	1.48641E1	2.15624E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.27026E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.45602E-2	-8.80022E1	-1.14441E-3	-8.79998E1	2.14577E-4	4.93526E-3	9.34601E-2	1.57963E1	-1.98783E1	-1.99324E1	1.49612E1	2.15425E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.2631E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.48695E-2	-8.80024E1	-1.23978E-3	-8.80001E1	1.43051E-4	5.24521E-3	9.34124E-2	1.58162E1	-1.98275E1	-1.99596E1	1.50352E1	2.16269E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.2572E-2
1.2E1	3.5E1	1.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80026E1	-9.05991E-4	-8.80003E1	3.57628E-4	5.26905E-3	9.33647E-2	1.58323E1	-1.98464E1	-1.9951E1	1.50268E1	2.15716E-9	2.51739E-3	2.51739E-3	6.28592E-3	2.26445E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.38649E-2	-8.80026E1	-1.16825E-3	-8.80001E1	2.86102E-4	5.67436E-3	9.32932E-2	1.57873E1	-1.98825E1	-1.99642E1	1.50851E1	2.15219E-9	2.51359E-3	2.51359E-3	6.31858E-3	2.25769E-2
1.4E1	6.6E1	0.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80024E1	-5.24521E-4	-8.80002E1	7.15256E-5	5.03063E-3	9.33409E-2	1.57753E1	-1.98314E1	-1.99792E1	1.50058E1	2.15716E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.25674E-2
1.5E1	3.4E1	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80022E1	-8.10623E-4	-8.80001E1	3.57628E-4	5.14984E-3	9.34601E-2	1.57806E1	-1.98753E1	-1.99855E1	1.49664E1	2.15706E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.26113E-2
1.6E1	1.42E2	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80021E1	-1.09673E-3	-8.80002E1	2.86102E-4	5.07832E-3	9.35078E-2	1.58083E1	-1.98925E1	-1.99109E1	1.50146E1	2.15381E-9	2.5199E-3	2.5199E-3	6.34385E-3	2.25958E-2
1.7E1	1.75E2	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80024E1	-1.28746E-3	-8.8E1	5.48363E-4	5.19753E-3	9.35793E-2	1.58457E1	-1.98169E1	-2.00045E1	1.50364E1	2.1549E-9	2.51952E-3	2.51952E-3	6.29035E-3	2.26635E-2
1.8E1	7.98E2	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80025E1	-1.07288E-3	-8.8E1	3.8147E-4	5.126E-3	9.34839E-2	1.57782E1	-1.98502E1	-1.99447E1	1.49703E1	2.15992E-9	2.52707E-3	2.52707E-3	6.32896E-3	2.27026E-2
1.9E1	8.86E2	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80025E1	-1.0252E-3	-8.79997E1	1.43051E-4	5.22137E-3	9.33647E-2	1.57943E1	-1.9881E1	-1.99122E1	1.49823E1	2.15365E-9	2.52659E-3	2.52659E-3	6.30212E-3	2.27528E-2
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80028E1	-1.21593E-3	-8.79998E1	1.66893E-4	5.72205E-3	9.35793E-2	1.57755E1	-1.98824E1	-1.99555E1	1.49824E1	2.15685E-9	2.52066E-3	2.52066E-3	6.3245E-3	2.27454E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.8003E1	-8.82149E-4	-8.79996E1	5.72205E-4	5.31673E-3	9.34124E-2	1.57686E1	-1.98645E1	-1.99228E1	1.4986E1	2.15894E-9	2.52099E-3	2.52099E-3	6.31837E-3	2.26506E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80031E1	-1.19209E-3	-8.79996E1	2.86102E-4	5.07832E-3	9.32693E-2	1.57761E1	-1.98664E1	-2.00175E1	1.49908E1	2.159E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.25097E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80027E1	-9.53674E-4	-8.79998E1	2.6226E-4	5.19753E-3	9.34362E-2	1.58552E1	-1.98759E1	-1.99949E1	1.50713E1	2.158E-9	2.52538E-3	2.52538E-3	6.30192E-3	2.26113E-2