[Scan]
initial_time=2016-01-27T19:04:05
final_time=2016-01-27T19:04:25
ip_count=19
run=1025
dataset=1
scan=66
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.81118E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.20508E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=3.87108E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.63468E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=8.23879E-10
mult1=-1.05953E-8
mult2=-2.6747E-9
rf_tmon=-4.56049E-3
rf_agc=3.3658E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.93336E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19948E1
lens5a_imon=1.9897E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05185E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53777E1
cs_ef1b_imon=2.79451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=2.65617E-5
lens1_vset=-2.7E0
lens1_vmon=-2.96694E0
lens1_imon=1.54514E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64481E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03767E1
cs_ea2_imon=1.53524E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84249E1
cs_ef1a_imon=2.91371E-5
olens2_vset=0.0E0
olens2_vmon=1.43051E-3
olens2_imon=4.13334E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=2.87618E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15412E1
os_ea1_imon=1.88316E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.10763E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=1.17882E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.9359E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01832E1
cs_anode1_imon=2.90016E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=5.38349E-11
tplens_vset=0.0E0
tplens_vmon=-1.63907E0
tplens_imon=-2.38717E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9939E1
iondef3_imon=8.66643E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98464E1
iondef2_imon=9.41325E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.8914E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26921E0
ionrepsh_imon=1.74017E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.19074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.10332E-1
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71148E1
cs_ef2a_imon=3.18582E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61697E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4626E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=2.86158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23081E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.24403E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57849E1
iondef1_imon=5.10225E-6
iondef4_vset=1.53E1
iondef4_vmon=1.47836E1
iondef4_imon=5.35595E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.24671E-9
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=3.59106E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14288E0
cs_ionaccel_imon=-1.82393E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.67741E-6
window_vset=0.0E0
window_vmon=2.25216E-1
window_imon=-9.13411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.51985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.8224E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.17634E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.49565E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33827E1
os_fil1_imon=4.61147E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32217E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60809E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=9.97271E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63026E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62103E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.83841E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.6978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30775E-1
cs_fil2_imon=-2.31008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06092E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21493E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.27373E-2
chamber_ion_pmon=2.15124E-9
chamber_cvt_pmon=2.52697E-3
foreline_cvt_pmon=2.52697E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.48404E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.65E2	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80026E1	-1.26362E-3	-8.80003E1	2.86102E-4	5.26905E-3	9.3317E-2	1.58622E1	-1.98676E1	-1.99756E1	1.50743E1	2.16085E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.26832E-2
2.0E0	1.79E3	1.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80026E1	-9.53674E-4	-8.8E1	2.38419E-4	5.07832E-3	9.33886E-2	1.58095E1	-1.98699E1	-1.99498E1	1.49794E1	2.15624E-9	2.5131E-3	2.5131E-3	6.3074E-3	2.25482E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80025E1	-1.23978E-3	-8.8E1	3.57628E-4	5.55515E-3	9.35793E-2	1.57867E1	-1.98678E1	-1.99077E1	1.49489E1	2.15791E-9	2.52139E-3	2.52139E-3	6.32978E-3	2.24971E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80027E1	-1.4782E-3	-8.80002E1	4.05312E-4	5.17368E-3	9.35793E-2	1.58287E1	-1.98422E1	-2.00069E1	1.50022E1	2.15365E-9	2.51709E-3	2.51709E-3	6.3074E-3	2.26008E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80028E1	-1.3113E-3	-8.80004E1	1.90735E-4	5.19753E-3	9.37223E-2	1.57671E1	-1.98477E1	-1.99377E1	1.49872E1	2.15613E-9	2.52757E-3	2.52757E-3	6.31837E-3	2.269E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80026E1	-1.04904E-3	-8.80005E1	9.53674E-5	5.10216E-3	9.36508E-2	1.57987E1	-1.98278E1	-1.99204E1	1.51235E1	2.158E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.26506E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.80026E1	-1.40667E-3	-8.80004E1	7.15256E-5	5.126E-3	9.33409E-2	1.57825E1	-1.98699E1	-1.99113E1	1.49205E1	2.15894E-9	2.52757E-3	2.52757E-3	6.3074E-3	2.25917E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80028E1	-1.09673E-3	-8.80005E1	3.8147E-4	4.98295E-3	9.34601E-2	1.57507E1	-1.98717E1	-1.99915E1	1.49409E1	2.15238E-9	2.52318E-3	2.52318E-3	6.28552E-3	2.25329E-2
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80025E1	-8.34465E-4	-8.80004E1	4.52995E-4	5.48363E-3	9.3317E-2	1.5762E1	-1.98561E1	-1.99732E1	1.51362E1	2.16085E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.26832E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80025E1	-1.19209E-3	-8.80003E1	4.52995E-4	5.22137E-3	9.33409E-2	1.57907E1	-1.98782E1	-1.99807E1	1.48632E1	2.15706E-9	2.52538E-3	2.52538E-3	6.29098E-3	2.25917E-2
1.4E1	6.8E1	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80022E1	-1.12057E-3	-8.80001E1	3.33786E-4	5.17368E-3	9.34362E-2	1.5826E1	-1.98616E1	-1.99065E1	1.50839E1	2.15726E-9	2.52765E-3	2.52765E-3	6.34982E-3	2.26577E-2
1.5E1	2.2E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80024E1	-9.53674E-4	-8.80003E1	4.29153E-4	5.126E-3	9.32455E-2	1.58101E1	-1.98771E1	-1.9957E1	1.50298E1	2.15685E-9	2.52863E-3	2.52863E-3	6.3074E-3	2.26635E-2
1.6E1	1.32E2	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80023E1	-8.58307E-4	-8.80004E1	3.33786E-4	5.17368E-3	9.33886E-2	1.57784E1	-1.98771E1	-1.99626E1	1.48592E1	2.15987E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.26703E-2
1.7E1	1.52E2	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.8002E1	-9.29832E-4	-8.80002E1	3.33786E-4	4.8399E-3	9.36031E-2	1.58179E1	-1.98741E1	-1.99469E1	1.51668E1	2.15706E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.2631E-2
1.8E1	7.75E2	3.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80018E1	-1.09673E-3	-8.80003E1	4.05312E-4	4.93526E-3	9.36508E-2	1.57807E1	-1.98495E1	-1.99822E1	1.51001E1	2.15706E-9	2.52318E-3	2.52318E-3	6.34588E-3	2.25917E-2
1.9E1	8.75E2	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80022E1	-1.23978E-3	-8.80003E1	4.76837E-4	5.22137E-3	9.35793E-2	1.57613E1	-1.98747E1	-1.99608E1	1.50082E1	2.15987E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.25329E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80023E1	-1.09673E-3	-8.80002E1	4.29153E-4	4.88758E-3	9.34839E-2	1.58551E1	-1.98257E1	-1.99709E1	1.51325E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.2572E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80023E1	-1.07288E-3	-8.80003E1	3.09944E-4	4.52995E-3	9.36747E-2	1.58049E1	-1.98628E1	-1.99823E1	1.51186E1	2.15681E-9	2.52236E-3	2.52236E-3	6.31533E-3	2.25913E-2
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80022E1	-8.10623E-4	-8.80003E1	1.66893E-4	5.10216E-3	9.35078E-2	1.58399E1	-1.99157E1	-1.998E1	1.50358E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80021E1	-9.53674E-4	-8.8E1	2.86102E-4	5.19753E-3	9.36985E-2	1.57849E1	-1.98464E1	-1.9939E1	1.47836E1	2.15124E-9	2.52697E-3	2.52697E-3	6.3074E-3	2.27373E-2