[Scan]
initial_time=2016-01-27T19:04:32
final_time=2016-01-27T19:04:52
ip_count=19
run=1025
dataset=1
scan=67
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.81083E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-5.90742E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=4.77529E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.73383E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=8.67641E-10
mult1=-1.01141E-8
mult2=-2.78009E-9
rf_tmon=-4.58026E-3
rf_agc=3.2672E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.56285E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64557E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19571E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04828E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54007E1
cs_ef1b_imon=2.80394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=2.65971E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00764E0
lens1_imon=1.45666E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03496E1
cs_ea2_imon=1.53276E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84106E1
cs_ef1a_imon=2.9063E-5
olens2_vset=0.0E0
olens2_vmon=1.3113E-3
olens2_imon=3.87561E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=1.88599E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20963E0
cs_ionrep_imon=1.19475E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.89765E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=1.16527E-10
tplens_vset=0.0E0
tplens_vmon=-1.65087E0
tplens_imon=-1.89165E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99655E1
iondef3_imon=8.64166E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98487E1
iondef2_imon=9.60084E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=5.15926E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32938E0
ionrepsh_imon=1.74866E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.26259E-1
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60777E0
os_ef2alow_imon=-2.53301E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.44566E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.24461E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57572E1
iondef1_imon=5.04916E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51338E1
iondef4_imon=5.23714E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.19059E-9
olens1_vset=0.0E0
olens1_vmon=1.3113E-3
olens1_imon=4.24552E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16558E0
cs_ionaccel_imon=-1.8879E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-4.93163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.75869E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.40641E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.48974E0
defgridb_imon=6.17823E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33785E1
os_fil1_imon=4.87233E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.00177E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6093E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30852E1
cs_fil1_imon=9.97699E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63495E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62325E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.29879E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42621E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.32359E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.217E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.26252E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.77912E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.8E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80023E1	-6.4373E-4	-8.80001E1	2.14577E-4	5.22137E-3	9.3627E-2	1.58221E1	-1.98531E1	-1.99918E1	1.47782E1	2.15894E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.269E-2
2.0E0	1.788E3	2.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80022E1	-9.05991E-4	-8.80003E1	1.19209E-4	5.17368E-3	9.33647E-2	1.57854E1	-1.98771E1	-1.99628E1	1.46616E1	2.15716E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.26832E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80024E1	-6.91414E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.34362E-2	1.5818E1	-1.98359E1	-1.99558E1	1.50713E1	2.15982E-9	2.52697E-3	2.52697E-3	6.30182E-3	2.26169E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80025E1	-6.19888E-4	-8.80002E1	3.33786E-4	5.00679E-3	9.36747E-2	1.58283E1	-1.98531E1	-1.99339E1	1.49116E1	2.159E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.25867E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80026E1	-1.07288E-3	-8.80002E1	5.00679E-4	4.79221E-3	9.34839E-2	1.57669E1	-1.98823E1	-1.99554E1	1.46325E1	2.16269E-9	2.51783E-3	2.51783E-3	6.31779E-3	2.25958E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80023E1	-1.07288E-3	-8.80004E1	3.09944E-4	4.91142E-3	9.37462E-2	1.58263E1	-1.98759E1	-1.99173E1	1.49923E1	2.15772E-9	2.51527E-3	2.51527E-3	6.32483E-3	2.27121E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80021E1	-8.34465E-4	-8.80003E1	4.29153E-4	4.88758E-3	9.31501E-2	1.57032E1	-1.9832E1	-1.99642E1	1.50196E1	2.15624E-9	2.52492E-3	2.52492E-3	6.31817E-3	2.25482E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80021E1	-8.82149E-4	-8.80004E1	2.38419E-4	4.95911E-3	9.3174E-2	1.5822E1	-1.98639E1	-1.99555E1	1.51522E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25133E-2
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80018E1	-5.24521E-4	-8.80002E1	7.15256E-5	5.07832E-3	9.32932E-2	1.57842E1	-1.98522E1	-1.99676E1	1.49997E1	2.15558E-9	2.52509E-3	2.52509E-3	6.33341E-3	2.25401E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80018E1	-6.91414E-4	-8.80005E1	2.86102E-4	5.03063E-3	9.3317E-2	1.57483E1	-1.98458E1	-1.99992E1	1.49703E1	2.15782E-9	2.51611E-3	2.51611E-3	6.3074E-3	2.25411E-2
1.4E1	7.1E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80019E1	-9.05991E-4	-8.80003E1	4.76837E-4	5.34058E-3	9.35316E-2	1.58293E1	-1.98711E1	-1.99294E1	1.50397E1	2.15716E-9	2.51954E-3	2.51954E-3	6.32896E-3	2.25289E-2
1.5E1	1.4E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8002E1	-1.00136E-3	-8.80004E1	3.8147E-4	5.126E-3	9.36747E-2	1.57963E1	-1.98483E1	-1.99318E1	1.50665E1	2.15887E-9	2.51804E-3	2.51804E-3	6.33538E-3	2.27373E-2
1.6E1	1.07E2	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80021E1	-1.09673E-3	-8.80002E1	4.05312E-4	5.34058E-3	9.34601E-2	1.57771E1	-1.98416E1	-2.00297E1	1.51644E1	2.15624E-9	2.52169E-3	2.52169E-3	6.33436E-3	2.27607E-2
1.7E1	1.94E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80025E1	-8.34465E-4	-8.80003E1	2.38419E-4	5.07832E-3	9.33886E-2	1.58026E1	-1.98824E1	-1.99443E1	1.48968E1	2.15894E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.2769E-2
1.8E1	7.47E2	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80024E1	-9.05991E-4	-8.80004E1	3.09944E-4	5.36442E-3	9.30071E-2	1.5816E1	-1.98588E1	-1.99965E1	1.49306E1	2.15613E-9	2.5188E-3	2.5188E-3	6.29645E-3	2.27097E-2
1.9E1	8.49E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.8002E1	-8.34465E-4	-8.80002E1	4.29153E-4	4.95911E-3	9.32693E-2	1.57686E1	-1.98501E1	-1.99708E1	1.5023E1	2.15425E-9	2.51662E-3	2.51662E-3	6.30192E-3	2.25133E-2
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80021E1	-6.91414E-4	-8.80003E1	2.38419E-4	4.91142E-3	9.32932E-2	1.57843E1	-1.98368E1	-1.99414E1	1.50254E1	2.15314E-9	2.51915E-3	2.51915E-3	6.3074E-3	2.25769E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.24736E-2	-8.80023E1	-9.53674E-4	-8.80003E1	4.76837E-4	5.03063E-3	9.34362E-2	1.57734E1	-1.98492E1	-1.99471E1	1.50184E1	2.15808E-9	2.51954E-3	2.51954E-3	6.29665E-3	2.25867E-2
2.2E1	2.0E0	1.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80022E1	-7.62939E-4	-8.80002E1	4.76837E-4	5.14984E-3	9.32455E-2	1.5848E1	-1.98675E1	-2.00099E1	1.50039E1	2.15716E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.26059E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80025E1	-1.12057E-3	-8.8E1	5.48363E-4	4.95911E-3	9.3317E-2	1.57572E1	-1.98487E1	-1.99655E1	1.51338E1	2.15716E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.26252E-2