[Scan]
initial_time=2016-01-27T19:07:12
final_time=2016-01-27T19:07:32
ip_count=19
run=1025
dataset=1
scan=73
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.83443E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-6.02281E-10
ql2_vset=
ql2_vmon=-1.09673E-3
ql2_imon=4.04382E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.57723E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=8.34918E-10
mult1=-9.71975E-9
mult2=-2.67192E-9
rf_tmon=-2.69321E-3
rf_agc=3.57826E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=4.77731E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65712E0
bslens_imon=2.73602E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20121E1
lens5a_imon=1.97262E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53609E1
cs_ef1b_imon=2.80042E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=2.65612E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01132E0
lens1_imon=1.20752E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64498E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.54399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8429E1
cs_ef1a_imon=2.91336E-5
olens2_vset=0.0E0
olens2_vmon=1.52588E-3
olens2_imon=4.36628E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=2.87826E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=1.89691E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.10381E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=1.17772E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93521E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0178E1
cs_anode1_imon=2.89321E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99983E1
olens4_imon=9.79424E-11
tplens_vset=0.0E0
tplens_vmon=-1.64504E0
tplens_imon=-3.57025E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99651E1
iondef3_imon=8.6842E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98724E1
iondef2_imon=9.42682E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=4.75073E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32119E0
ionrepsh_imon=1.75127E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74762E1
cs_ef2b_imon=3.13057E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.90439E-1
os_ea2_imon=-4.43544E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71014E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62913E0
os_ef2alow_imon=-2.56068E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50894E-1
os_ef2bup_imon=-5.43124E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=2.86923E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.30902E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.23326E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58058E1
iondef1_imon=4.899E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51279E1
iondef4_imon=4.99452E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.20255E-9
olens1_vset=0.0E0
olens1_vmon=1.14441E-3
olens1_imon=3.88253E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1342E0
cs_ionaccel_imon=-1.7579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.89983E-6
window_vset=0.0E0
window_vmon=1.97993E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82608E2
mask1_imon=2.39359E-4
mask2_vset=0.0E0
mask2_vmon=-1.86634E1
mask2_imon=-7.67451E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.90553E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.60774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.19175E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.46147E0
defgridb_imon=6.02374E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33804E1
os_fil1_imon=4.27553E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46697E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61023E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.97283E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63652E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62278E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.33324E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.17651E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55813E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-1.64399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.94483E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21639E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.25482E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.75424E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.69E2	0.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80027E1	-9.53674E-4	-8.8E1	2.38419E-5	5.26905E-3	9.34124E-2	1.58616E1	-1.989E1	-1.99272E1	1.4962E1	2.15894E-9	2.51662E-3	2.51662E-3	6.34037E-3	2.2572E-2
2.0E0	1.82E3	2.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80029E1	-7.39098E-4	-8.79998E1	9.53674E-5	5.07832E-3	9.32455E-2	1.57767E1	-1.98653E1	-1.99933E1	1.5031E1	2.15716E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.25482E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.80029E1	-1.07288E-3	-8.79998E1	5.24521E-4	4.86374E-3	9.35316E-2	1.58061E1	-1.98287E1	-1.9972E1	1.5103E1	2.15533E-9	2.52384E-3	2.52384E-3	6.29128E-3	2.25289E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80028E1	-7.62939E-4	-8.80001E1	5.24521E-4	4.8399E-3	9.32932E-2	1.58173E1	-1.98573E1	-1.99588E1	1.52124E1	2.15533E-9	2.51525E-3	2.51525E-3	6.33436E-3	2.27996E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80026E1	-8.34465E-4	-8.79996E1	3.33786E-4	4.64916E-3	9.35793E-2	1.58269E1	-1.98645E1	-1.99768E1	1.53133E1	2.15425E-9	2.52538E-3	2.52538E-3	6.3074E-3	2.26113E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80024E1	-1.14441E-3	-8.79996E1	9.53674E-5	4.91142E-3	9.35316E-2	1.57743E1	-1.98765E1	-1.99526E1	1.52797E1	2.15519E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.25917E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80025E1	-1.12057E-3	-8.79998E1	1.66893E-4	5.17368E-3	9.32455E-2	1.57981E1	-1.98579E1	-1.99714E1	1.49968E1	2.15808E-9	2.51954E-3	2.51954E-3	6.32356E-3	2.26445E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80028E1	-7.86781E-4	-8.79999E1	2.6226E-4	5.34058E-3	9.35078E-2	1.58398E1	-1.98812E1	-1.99148E1	1.49645E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.26506E-2
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80026E1	-1.0252E-3	-8.80002E1	2.38419E-4	4.62532E-3	9.35078E-2	1.57668E1	-1.98681E1	-1.99618E1	1.52257E1	2.15441E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.27607E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80029E1	-7.39098E-4	-8.79999E1	1.43051E-4	4.69685E-3	9.33886E-2	1.58079E1	-1.98747E1	-2.00015E1	1.5189E1	2.15238E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.27295E-2
1.4E1	6.9E1	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80025E1	-9.77516E-4	-8.79998E1	2.86102E-4	4.98295E-3	9.35793E-2	1.5743E1	-1.98529E1	-1.99667E1	1.51256E1	2.15441E-9	2.51525E-3	2.51525E-3	6.31817E-3	2.27026E-2
1.5E1	2.0E1	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80024E1	-1.07288E-3	-8.79998E1	4.76837E-4	5.10216E-3	9.35555E-2	1.58251E1	-1.98416E1	-1.99786E1	1.51073E1	2.15441E-9	2.52276E-3	2.52276E-3	6.28592E-3	2.27219E-2
1.6E1	1.07E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80027E1	-7.86781E-4	-8.8E1	7.15256E-5	4.86374E-3	9.33647E-2	1.57945E1	-1.98573E1	-1.9957E1	1.49536E1	2.158E-9	2.52647E-3	2.52647E-3	6.31837E-3	2.27492E-2
1.7E1	2.04E2	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80027E1	-6.19888E-4	-8.80001E1	-7.15256E-5	4.69685E-3	9.33409E-2	1.58126E1	-1.9844E1	-1.9965E1	1.49848E1	2.15425E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.2572E-2
1.8E1	7.52E2	1.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80027E1	-6.91414E-4	-8.79999E1	2.6226E-4	4.86374E-3	9.35316E-2	1.57122E1	-1.97593E1	-2.00063E1	1.51067E1	2.159E-9	2.51739E-3	2.51739E-3	6.33977E-3	2.26252E-2
1.9E1	9.71E2	1.0E0	7.68E2	5.29E2	-7.42513E-2	-8.80026E1	-7.15256E-4	-8.79998E1	2.86102E-4	4.62532E-3	9.32932E-2	1.58041E1	-1.98555E1	-1.9993E1	1.51354E1	2.15894E-9	2.51443E-3	2.51443E-3	6.31837E-3	2.27097E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80027E1	-7.39098E-4	-8.79999E1	5.24521E-4	5.07832E-3	9.34839E-2	1.58137E1	-1.98723E1	-1.99918E1	1.50571E1	2.15238E-9	2.52099E-3	2.52099E-3	6.31288E-3	2.25133E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80024E1	-9.05991E-4	-8.80001E1	2.86102E-4	4.76837E-3	9.35078E-2	1.5744E1	-1.98723E1	-1.99654E1	1.49518E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.269E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80025E1	-1.23978E-3	-8.8E1	3.57628E-4	4.8399E-3	9.36985E-2	1.5792E1	-1.986E1	-1.99473E1	1.50682E1	2.15894E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.26703E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80023E1	-1.09673E-3	-8.80001E1	4.76837E-5	4.8399E-3	9.33647E-2	1.58058E1	-1.98724E1	-1.99651E1	1.51279E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.25482E-2