[Scan]
initial_time=2016-01-27T19:07:39
final_time=2016-01-27T19:07:58
ip_count=19
run=1025
dataset=1
scan=74
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.7415E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.13081E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=3.76463E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-1.66242E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.75771E-10
mult1=-9.921E-9
mult2=-2.82041E-9
rf_tmon=-4.58452E-3
rf_agc=3.28649E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.65488E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67755E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.9755E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05223E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=2.7834E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02399E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=2.64098E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03595E0
lens1_imon=1.43464E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=3.00288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.52885E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=2.89584E-5
olens2_vset=0.0E0
olens2_vmon=1.38283E-3
olens2_imon=3.96562E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=2.86377E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=1.89547E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63443E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=1.16367E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93604E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=2.9063E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.26743E-10
tplens_vset=0.0E0
tplens_vmon=-1.62882E0
tplens_imon=-2.77716E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99624E1
iondef3_imon=9.08435E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98591E1
iondef2_imon=9.58544E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02865E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.13859E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30557E0
ionrepsh_imon=1.73938E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33435E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66744E-1
os_ea2_imon=-4.83199E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63059E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.25182E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58251E1
iondef1_imon=5.24868E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51163E1
iondef4_imon=5.2011E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.17471E-9
olens1_vset=0.0E0
olens1_vmon=1.35899E-3
olens1_imon=3.44741E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16738E0
cs_ionaccel_imon=-1.72212E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=2.35362E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.41668E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.372E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65396E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33829E1
os_fil1_imon=4.79424E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5693E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61206E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30754E1
cs_fil1_imon=9.97074E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63363E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62273E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92494E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.13972E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.5027E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21638E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32483E-3
inlet_lpb_pmon=2.26495E-2
chamber_ion_pmon=2.15574E-9
chamber_cvt_pmon=2.51642E-3
foreline_cvt_pmon=2.51642E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.27457E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.7E2	2.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80024E1	-1.28746E-3	-8.80001E1	2.38419E-4	4.673E-3	9.35316E-2	1.57837E1	-1.98641E1	-1.99372E1	1.51662E1	2.15409E-9	2.51915E-3	2.51915E-3	6.31299E-3	2.25769E-2
2.0E0	1.803E3	2.0E0	3.16E2	1.6E2	-7.17779E-2	-8.80022E1	-1.19209E-3	-8.79999E1	-2.38419E-5	4.69685E-3	9.35555E-2	1.57673E1	-1.98522E1	-1.99851E1	1.48744E1	2.159E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.26445E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80022E1	-1.12057E-3	-8.79999E1	1.43051E-4	4.72069E-3	9.35078E-2	1.58255E1	-1.9873E1	-1.99691E1	1.51308E1	2.15879E-9	2.52635E-3	2.52635E-3	6.3074E-3	2.2766E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80023E1	-1.00136E-3	-8.79996E1	4.29153E-4	5.10216E-3	9.377E-2	1.57686E1	-1.98717E1	-1.9984E1	1.49536E1	2.15455E-9	2.52025E-3	2.52025E-3	6.32328E-3	2.26387E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80023E1	-8.82149E-4	-8.79998E1	5.24521E-4	5.07832E-3	9.36747E-2	1.58097E1	-1.98812E1	-1.99237E1	1.50659E1	2.15533E-9	2.51847E-3	2.51847E-3	6.32896E-3	2.24522E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80023E1	-8.34465E-4	-8.79998E1	3.8147E-4	4.95911E-3	9.37223E-2	1.58462E1	-1.98681E1	-1.99378E1	1.47989E1	2.15425E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.25524E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80025E1	-9.29832E-4	-8.79998E1	3.57628E-4	5.10216E-3	9.36747E-2	1.57759E1	-1.98711E1	-1.99564E1	1.49979E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.28086E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44059E-2	-8.80027E1	-1.09673E-3	-8.80001E1	-2.38419E-5	4.98295E-3	9.33647E-2	1.57843E1	-1.98777E1	-1.9975E1	1.52304E1	2.15519E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.27492E-2
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80024E1	-9.29832E-4	-8.79998E1	3.8147E-4	4.98295E-3	9.35316E-2	1.57644E1	-1.98344E1	-1.99101E1	1.51151E1	2.15441E-9	2.52276E-3	2.52276E-3	6.3074E-3	2.27026E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80023E1	-5.96046E-4	-8.79997E1	7.15256E-5	4.79221E-3	9.36508E-2	1.57761E1	-1.98588E1	-1.99856E1	1.48418E1	2.16078E-9	2.5225E-3	2.5225E-3	6.33538E-3	2.2677E-2
1.4E1	7.9E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80023E1	-2.6226E-4	-8.79997E1	2.6226E-4	4.86374E-3	9.35793E-2	1.57843E1	-1.98711E1	-1.99414E1	1.51518E1	2.15716E-9	2.51847E-3	2.51847E-3	6.32356E-3	2.27026E-2
1.5E1	2.9E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80025E1	-5.96046E-4	-8.79998E1	9.53674E-5	5.22137E-3	9.36985E-2	1.57989E1	-1.98875E1	-1.99518E1	1.4846E1	2.15706E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.2572E-2
1.6E1	1.25E2	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80024E1	-7.39098E-4	-8.79998E1	0.0E0	4.79221E-3	9.32932E-2	1.58634E1	-1.98192E1	-1.99579E1	1.51001E1	2.15613E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.26113E-2
1.7E1	1.94E2	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80026E1	-6.67572E-4	-8.79997E1	1.90735E-4	5.07832E-3	9.34839E-2	1.57885E1	-1.98531E1	-1.99702E1	1.5004E1	2.15533E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.27026E-2
1.8E1	7.76E2	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80024E1	-8.82149E-4	-8.8E1	3.8147E-4	5.24521E-3	9.35078E-2	1.57047E1	-1.98629E1	-2.00729E1	1.49361E1	2.15219E-9	2.52027E-3	2.52027E-3	6.32978E-3	2.25769E-2
1.9E1	8.63E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80022E1	-8.34465E-4	-8.79999E1	4.76837E-5	5.31673E-3	9.32693E-2	1.58436E1	-1.98594E1	-1.99671E1	1.50845E1	2.15808E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.25482E-2
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80022E1	-3.57628E-4	-8.79999E1	4.76837E-5	4.95911E-3	9.35316E-2	1.5741E1	-1.98969E1	-2.00153E1	1.49506E1	2.15613E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.25524E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80025E1	-8.82149E-4	-8.79997E1	0.0E0	4.98295E-3	9.3317E-2	1.58153E1	-1.98307E1	-1.99781E1	1.51235E1	2.15791E-9	2.51693E-3	2.51693E-3	6.30182E-3	2.25369E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80026E1	-6.67572E-4	-8.79999E1	4.05312E-4	5.24521E-3	9.34124E-2	1.57771E1	-1.98568E1	-1.99446E1	1.49648E1	2.15668E-9	2.51723E-3	2.51723E-3	6.33757E-3	2.28029E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80025E1	-1.07288E-3	-8.79998E1	2.38419E-4	4.95911E-3	9.35316E-2	1.58251E1	-1.98591E1	-1.99624E1	1.51163E1	2.15574E-9	2.51642E-3	2.51642E-3	6.32483E-3	2.26495E-2