[Scan]
initial_time=2016-01-27T19:08:32
final_time=2016-01-27T19:08:52
ip_count=19
run=1025
dataset=1
scan=76
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79633E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-5.88179E-10
ql2_vset=
ql2_vmon=-1.23978E-3
ql2_imon=3.86608E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.58368E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=9.06694E-10
mult1=-9.78855E-9
mult2=-2.75055E-9
rf_tmon=-3.9116E-3
rf_agc=3.30332E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.5861E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6397E0
bslens_imon=2.48728E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19851E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53202E1
cs_ef1b_imon=2.7816E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.01955E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04952E1
cs_ea1_imon=2.66945E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98668E0
lens1_imon=1.31567E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=3.00577E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.57679E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.90918E-5
olens2_vset=0.0E0
olens2_vmon=8.58307E-4
olens2_imon=3.77452E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10859E1
os_restr1_imon=2.91314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14951E1
os_ea1_imon=1.8843E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26652E0
cs_ionrep_imon=1.18854E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.90197E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99979E1
olens4_imon=8.80837E-11
tplens_vset=0.0E0
tplens_vmon=-1.65766E0
tplens_imon=-1.29913E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.9951E1
iondef3_imon=8.7563E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.9847E1
iondef2_imon=9.59625E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.41027E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26472E0
ionrepsh_imon=1.76569E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.16152E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74597E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.66744E-1
os_ea2_imon=-3.5342E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00493E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62699E0
os_ef2alow_imon=-2.51499E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45767E-1
os_ef2bup_imon=-5.33329E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=2.87386E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.2356E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57626E1
iondef1_imon=5.09366E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50785E1
iondef4_imon=5.30922E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.13734E-9
olens1_vset=0.0E0
olens1_vmon=8.34465E-4
olens1_imon=3.51739E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.63922E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47331E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-1.26441E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.49096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.33234E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.54268E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33788E1
os_fil1_imon=4.86031E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.10989E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60703E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=9.97405E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62466E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93784E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.41892E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41892E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21733E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.27492E-2
chamber_ion_pmon=2.15613E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.23563E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.92E2	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80027E1	-9.29832E-4	-8.79997E1	1.43051E-4	4.93526E-3	9.37462E-2	1.58144E1	-1.98659E1	-1.9985E1	1.51574E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.26703E-2
2.0E0	1.739E3	1.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80023E1	-1.0252E-3	-8.79998E1	4.76837E-5	5.10216E-3	9.36985E-2	1.57848E1	-1.98612E1	-2.001E1	1.49436E1	2.15533E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.26832E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80025E1	-6.91414E-4	-8.79998E1	2.86102E-4	5.29289E-3	9.36031E-2	1.57371E1	-1.98558E1	-1.99679E1	1.48238E1	2.15791E-9	2.5147E-3	2.5147E-3	6.31858E-3	2.27373E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80025E1	-5.72205E-4	-8.79998E1	2.86102E-4	4.95911E-3	9.38177E-2	1.57891E1	-1.98563E1	-1.99726E1	1.51289E1	2.15808E-9	2.52492E-3	2.52492E-3	6.3074E-3	2.27026E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80024E1	-8.34465E-4	-8.79999E1	6.19888E-4	4.95911E-3	9.38177E-2	1.58197E1	-1.98903E1	-1.99336E1	1.49223E1	2.158E-9	2.52209E-3	2.52209E-3	6.29645E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80021E1	-6.91414E-4	-8.79997E1	5.48363E-4	5.00679E-3	9.37462E-2	1.57987E1	-1.98519E1	-1.99882E1	1.50046E1	2.158E-9	2.52099E-3	2.52099E-3	6.32936E-3	2.25133E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80023E1	-1.00136E-3	-8.79996E1	3.57628E-4	5.07832E-3	9.35078E-2	1.58056E1	-1.98458E1	-1.99172E1	1.49493E1	2.15613E-9	2.51552E-3	2.51552E-3	6.34037E-3	2.25133E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.8002E1	-7.39098E-4	-8.79999E1	2.86102E-4	5.126E-3	9.38892E-2	1.58407E1	-1.98531E1	-1.99858E1	1.50115E1	2.15519E-9	2.52757E-3	2.52757E-3	6.34037E-3	2.26113E-2
1.2E1	3.2E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80019E1	-1.04904E-3	-8.79998E1	3.33786E-4	5.19753E-3	9.36508E-2	1.57395E1	-1.98806E1	-1.9962E1	1.4986E1	2.15533E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.26445E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80024E1	-1.14441E-3	-8.79997E1	1.90735E-4	4.98295E-3	9.36985E-2	1.57683E1	-1.98574E1	-1.99251E1	1.51945E1	2.15624E-9	2.52815E-3	2.52815E-3	6.32896E-3	2.26059E-2
1.4E1	6.5E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80023E1	-7.15256E-4	-8.8E1	1.90735E-4	4.74453E-3	9.35078E-2	1.58729E1	-1.98227E1	-1.9983E1	1.47337E1	2.15736E-9	2.52197E-3	2.52197E-3	6.29703E-3	2.27451E-2
1.5E1	1.9E1	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80027E1	-1.28746E-3	-8.79999E1	4.76837E-5	4.88758E-3	9.34601E-2	1.58527E1	-1.98682E1	-1.9952E1	1.50418E1	2.16269E-9	2.51411E-3	2.51411E-3	6.3074E-3	2.27539E-2
1.6E1	1.38E2	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80022E1	-1.04904E-3	-8.8E1	5.00679E-4	5.10216E-3	9.36508E-2	1.57572E1	-1.98555E1	-1.99372E1	1.49518E1	2.15332E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.25329E-2
1.7E1	1.85E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80022E1	-9.77516E-4	-8.79997E1	2.14577E-4	4.76837E-3	9.33886E-2	1.57713E1	-1.98878E1	-1.99089E1	1.49267E1	2.15676E-9	2.52416E-3	2.52416E-3	6.29675E-3	2.25938E-2
1.8E1	7.2E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80024E1	-1.09673E-3	-8.79999E1	5.48363E-4	5.10216E-3	9.35555E-2	1.58228E1	-1.99175E1	-2.00277E1	1.51938E1					
1.9E1	9.16E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80022E1	-8.34465E-4	-8.79999E1	4.52995E-4	5.24521E-3	9.35316E-2	1.57985E1	-1.9883E1	-1.99549E1	1.5022E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.25917E-2
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80022E1	-8.10623E-4	-8.79998E1	3.09944E-4	5.10216E-3	9.34124E-2	1.57843E1	-1.98579E1	-1.99672E1	1.47962E1	2.15613E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.2572E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80023E1	-9.77516E-4	-8.80003E1	3.33786E-4	5.126E-3	9.33647E-2	1.58132E1	-1.98605E1	-1.9952E1	1.50731E1	2.15992E-9	2.52169E-3	2.52169E-3	6.30202E-3	2.27219E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80023E1	-1.26362E-3	-8.8E1	6.4373E-4	5.05447E-3	9.34601E-2	1.57909E1	-1.98639E1	-1.99672E1	1.52478E1	2.15519E-9	2.52318E-3	2.52318E-3	6.3074E-3	2.25329E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80023E1	-1.23978E-3	-8.79999E1	2.6226E-4	5.07832E-3	9.33886E-2	1.57626E1	-1.9847E1	-1.9951E1	1.50785E1	2.15613E-9	2.5188E-3	2.5188E-3	6.32386E-3	2.27492E-2