[Scan]
initial_time=2016-01-27T19:08:59
final_time=2016-01-27T19:09:18
ip_count=19
run=1025
dataset=1
scan=77
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.84387E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.06823E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=4.39429E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.5964E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.71074E-10
mult1=-9.58386E-9
mult2=-2.79646E-9
rf_tmon=-4.74074E-3
rf_agc=3.40185E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=4.77219E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.79529E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=2.61286E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98788E0
lens1_imon=1.48511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64783E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.53894E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=2.9099E-5
olens2_vset=0.0E0
olens2_vmon=1.50204E-3
olens2_imon=3.85165E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.10877E1
os_restr1_imon=2.87026E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=1.89006E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63942E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=1.18602E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01689E1
cs_anode1_imon=2.90558E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=1.54376E-10
tplens_vset=0.0E0
tplens_vmon=-1.63963E0
tplens_imon=-2.23642E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99402E1
iondef3_imon=8.80677E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98699E1
iondef2_imon=9.4881E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.17173E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26772E0
ionrepsh_imon=1.74154E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.13271E-1
os_ea2_imon=-5.69717E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62999E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31298E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.23992E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58341E1
iondef1_imon=5.07924E-6
iondef4_vset=1.53E1
iondef4_vmon=1.50485E1
iondef4_imon=5.29481E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27962E1
olens3_imon=2.19996E-9
olens1_vset=0.0E0
olens1_vmon=1.23978E-3
olens1_imon=3.96204E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.7077E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=2.43171E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.76854E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.47076E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.24582E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52764E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33769E1
os_fil1_imon=5.35286E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.00467E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6046E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3078E1
cs_fil1_imon=9.98294E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62822E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62366E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.98943E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.97734E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45372E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.31758E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21829E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.25524E-2
chamber_ion_pmon=2.15706E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.2116E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.01E2	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80022E1	-1.12057E-3	-8.79999E1	1.90735E-4	5.14984E-3	9.36031E-2	1.57729E1	-1.98398E1	-1.9969E1	1.51174E1	2.15425E-9	2.52318E-3	2.52318E-3	6.28552E-3	2.2769E-2
2.0E0	1.76E3	1.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80023E1	-8.10623E-4	-8.79999E1	1.66893E-4	5.36442E-3	9.33647E-2	1.58344E1	-1.98563E1	-1.99898E1	1.52212E1	2.15613E-9	2.51116E-3	2.51116E-3	6.31837E-3	2.269E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80025E1	-7.39098E-4	-8.79999E1	1.90735E-4	5.34058E-3	9.34362E-2	1.58249E1	-1.98799E1	-1.99037E1	1.51568E1	2.15613E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.2631E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80025E1	-8.34465E-4	-8.8E1	2.38419E-4	5.62668E-3	9.3317E-2	1.57969E1	-1.9852E1	-1.99658E1	1.50352E1	2.15726E-9	2.52131E-3	2.52131E-3	6.29684E-3	2.281E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80026E1	-1.12057E-3	-8.80002E1	3.09944E-4	5.48363E-3	9.34124E-2	1.57835E1	-1.9867E1	-1.99478E1	1.48681E1	2.15275E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.26956E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80026E1	-1.07288E-3	-8.80001E1	2.6226E-4	5.19753E-3	9.33647E-2	1.58197E1	-1.98705E1	-2.00087E1	1.49337E1	2.15772E-9	2.52454E-3	2.52454E-3	6.3074E-3	2.2587E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80026E1	-1.0252E-3	-8.79998E1	2.14577E-4	5.31673E-3	9.34839E-2	1.57518E1	-1.98476E1	-1.99666E1	1.51668E1	2.15613E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.26113E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80024E1	-9.53674E-4	-8.80001E1	0.0E0	5.31673E-3	9.34362E-2	1.58191E1	-1.98799E1	-1.99715E1	1.49194E1	2.15165E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.26252E-2
1.2E1	3.9E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80021E1	-8.34465E-4	-8.79999E1	2.38419E-4	5.00679E-3	9.3174E-2	1.58044E1	-1.98623E1	-1.99478E1	1.49289E1	2.15095E-9	2.51919E-3	2.51919E-3	6.32858E-3	2.25819E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80025E1	-8.10623E-4	-8.79997E1	1.19209E-4	5.19753E-3	9.33886E-2	1.58509E1	-1.98428E1	-1.99543E1	1.51662E1	2.15706E-9	2.52318E-3	2.52318E-3	6.31837E-3	2.25524E-2
1.4E1	6.2E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80027E1	-8.34465E-4	-8.8E1	3.33786E-4	5.126E-3	9.3627E-2	1.5759E1	-1.98344E1	-1.99492E1	1.50467E1	2.16081E-9	2.52318E-3	2.52318E-3	6.33486E-3	2.2631E-2
1.5E1	2.0E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80023E1	-7.15256E-4	-8.8E1	6.67572E-4	5.03063E-3	9.33409E-2	1.58113E1	-1.98591E1	-1.99348E1	1.50304E1	2.15145E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.26506E-2
1.6E1	1.43E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80025E1	-6.67572E-4	-8.79999E1	2.38419E-4	5.22137E-3	9.34362E-2	1.58722E1	-1.98434E1	-1.99608E1	1.47938E1	2.15613E-9	2.52209E-3	2.52209E-3	6.29098E-3	2.2631E-2
1.7E1	1.71E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80024E1	-6.19888E-4	-8.79999E1	1.43051E-4	5.50747E-3	9.3317E-2	1.5866E1	-1.98489E1	-1.99943E1	1.47295E1	2.15894E-9	2.51662E-3	2.51662E-3	6.31288E-3	2.26703E-2
1.8E1	7.6E2	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80026E1	-6.19888E-4	-8.79997E1	4.05312E-4	5.45979E-3	9.34362E-2	1.57566E1	-1.98759E1	-1.99738E1	1.47734E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32386E-3	2.269E-2
1.9E1	8.8E2	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80023E1	-7.86781E-4	-8.79999E1	2.6226E-4	5.55515E-3	9.35078E-2	1.57963E1	-1.98302E1	-1.99882E1	1.51279E1	2.15332E-9	2.52209E-3	2.52209E-3	6.32936E-3	2.2631E-2
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80025E1	-5.96046E-4	-8.79999E1	4.76837E-5	5.17368E-3	9.32217E-2	1.5805E1	-1.98723E1	-1.99455E1	1.53097E1	2.15425E-9	2.5199E-3	2.5199E-3	6.32936E-3	2.2631E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80025E1	-7.39098E-4	-8.79997E1	-4.76837E-5	5.31673E-3	9.34362E-2	1.58047E1	-1.98476E1	-1.99792E1	1.50533E1	2.159E-9	2.52169E-3	2.52169E-3	6.31278E-3	2.27026E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80024E1	-8.10623E-4	-8.79998E1	2.86102E-4	5.38826E-3	9.36747E-2	1.58067E1	-1.98682E1	-1.9952E1	1.4956E1	2.16085E-9	2.51632E-3	2.51632E-3	6.3074E-3	2.26832E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80026E1	-9.29832E-4	-8.79999E1	3.8147E-4	5.17368E-3	9.36747E-2	1.58341E1	-1.98699E1	-1.99402E1	1.50485E1	2.15706E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.25524E-2