[Scan]
initial_time=2016-01-27T19:09:25
final_time=2016-01-27T19:09:45
ip_count=19
run=1025
dataset=1
scan=78
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79847E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-6.29199E-10
ql2_vset=
ql2_vmon=-1.09673E-3
ql2_imon=3.96955E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.64101E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=8.85856E-10
mult1=-9.99324E-9
mult2=-2.81442E-9
rf_tmon=-3.35283E-3
rf_agc=3.46494E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=4.6742E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.71315E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19995E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53424E1
cs_ef1b_imon=2.8025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=2.65369E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01059E0
lens1_imon=1.45666E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.98162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.54373E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84178E1
cs_ef1a_imon=2.92792E-5
olens2_vset=0.0E0
olens2_vmon=1.40667E-3
olens2_imon=4.00603E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=2.87278E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.155E1
os_ea1_imon=1.86476E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22968E0
cs_ionrep_imon=1.2036E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=2.89476E-5
olens4_vset=-3.0E1
olens4_vmon=-2.9998E1
olens4_imon=1.13904E-10
tplens_vset=0.0E0
tplens_vmon=-1.60132E0
tplens_imon=-2.91808E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99864E1
iondef3_imon=8.58857E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98627E1
iondef2_imon=9.52651E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.36878E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25151E0
ionrepsh_imon=1.73415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33274E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74555E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.11512E-1
os_ea2_imon=-4.82936E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7115E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62999E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5778E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=2.86773E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.29645E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01689E1
cs_anode2_imon=2.23812E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57506E1
iondef1_imon=5.19428E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51536E1
iondef4_imon=5.40653E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27961E1
olens3_imon=2.19786E-9
olens1_vset=0.0E0
olens1_vmon=1.09673E-3
olens1_imon=3.80182E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15237E0
cs_ionaccel_imon=-1.73293E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47378E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.54368E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.20112E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.33916E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.41592E0
defgridb_imon=6.02604E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3377E1
os_fil1_imon=4.69814E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.15484E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60925E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=9.97146E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62678E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62176E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.22148E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.05853E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45405E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.26059E-2
chamber_ion_pmon=2.15624E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.83028E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.97E2	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80025E1	-9.77516E-4	-8.79999E1	5.24521E-4	4.95911E-3	9.33409E-2	1.58113E1	-1.99029E1	-1.99582E1	1.49894E1	2.15349E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.25867E-2
2.0E0	1.702E3	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80025E1	-5.72205E-4	-8.79998E1	1.66893E-4	4.93526E-3	9.32932E-2	1.57218E1	-1.98549E1	-2.00441E1	1.4804E1	2.15716E-9	2.52061E-3	2.52061E-3	6.29665E-3	2.25867E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80027E1	-5.48363E-4	-8.8E1	2.14577E-4	5.07832E-3	9.32693E-2	1.57985E1	-1.98753E1	-1.99452E1	1.51207E1	2.158E-9	2.51771E-3	2.51771E-3	6.34588E-3	2.27492E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80026E1	-4.76837E-4	-8.79997E1	5.48363E-4	5.22137E-3	9.33886E-2	1.58413E1	-1.98428E1	-1.9924E1	1.48562E1	2.15745E-9	2.5165E-3	2.5165E-3	6.3023E-3	2.27376E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80024E1	-7.15256E-4	-8.79997E1	3.09944E-4	5.03063E-3	9.33647E-2	1.575E1	-1.98597E1	-2.00135E1	1.4813E1	2.15332E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.25329E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80022E1	-9.29832E-4	-8.79996E1	5.96046E-4	5.05447E-3	9.34839E-2	1.58287E1	-1.98645E1	-1.99432E1	1.51434E1	2.15706E-9	2.51662E-3	2.51662E-3	6.28552E-3	2.27295E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80025E1	-7.39098E-4	-8.79995E1	3.8147E-4	5.03063E-3	9.35316E-2	1.58642E1	-1.98495E1	-1.98963E1	1.51596E1	2.15894E-9	2.52647E-3	2.52647E-3	6.31288E-3	2.269E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80026E1	-1.19209E-3	-8.79999E1	2.38419E-4	5.14984E-3	9.36747E-2	1.58017E1	-1.98302E1	-1.99882E1	1.48797E1	2.15987E-9	2.51334E-3	2.51334E-3	6.32386E-3	2.25524E-2
1.2E1	4.0E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80022E1	-1.00136E-3	-8.79994E1	5.48363E-4	5.00679E-3	9.3174E-2	1.5778E1	-1.98174E1	-1.99437E1	1.51674E1	2.15425E-9	2.52428E-3	2.52428E-3	6.32936E-3	2.27097E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80023E1	-1.00136E-3	-8.79998E1	1.43051E-4	5.03063E-3	9.3317E-2	1.58222E1	-1.98637E1	-1.9994E1	1.48905E1	2.15808E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.26445E-2
1.4E1	6.9E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80024E1	-8.10623E-4	-8.79996E1	2.38419E-4	5.29289E-3	9.32932E-2	1.58616E1	-1.98918E1	-1.99484E1	1.48562E1	2.15706E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.25917E-2
1.5E1	1.9E1	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80023E1	-6.4373E-4	-8.8E1	2.6226E-4	5.14984E-3	9.33647E-2	1.57729E1	-1.98903E1	-2.00483E1	1.51217E1	2.15332E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.25329E-2
1.6E1	1.25E2	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80026E1	-9.53674E-4	-8.80002E1	2.86102E-4	4.79221E-3	9.3317E-2	1.58371E1	-1.98783E1	-1.99486E1	1.47989E1	2.15613E-9	2.52428E-3	2.52428E-3	6.29645E-3	2.2631E-2
1.7E1	1.84E2	1.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80024E1	-1.14441E-3	-8.79999E1	3.8147E-4	5.29289E-3	9.35078E-2	1.58026E1	-1.98747E1	-1.99378E1	1.49848E1	2.15238E-9	2.5188E-3	2.5188E-3	6.31288E-3	2.25524E-2
1.8E1	8.21E2	0.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80026E1	-8.10623E-4	-8.8E1	-9.53674E-5	5.38826E-3	9.32693E-2	1.56851E1	-1.97641E1	-1.98801E1	1.51416E1	2.159E-9	2.51847E-3	2.51847E-3	6.31278E-3	2.26832E-2
1.9E1	8.74E2	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80023E1	-8.10623E-4	-8.79997E1	7.15256E-5	5.26905E-3	9.3317E-2	1.58262E1	-1.98623E1	-2.00033E1	1.50891E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.26252E-2
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80022E1	-9.53674E-4	-8.79996E1	1.66893E-4	4.86374E-3	9.30309E-2	1.58822E1	-1.986E1	-1.99414E1	1.49261E1	2.15992E-9	2.51417E-3	2.51417E-3	6.32356E-3	2.25674E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80023E1	-1.09673E-3	-8.79995E1	7.15256E-5	4.93526E-3	9.32455E-2	1.57837E1	-1.98284E1	-1.9975E1	1.4771E1	2.15782E-9	2.52179E-3	2.52179E-3	6.3245E-3	2.26431E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80023E1	-1.26362E-3	-8.79997E1	3.33786E-4	5.126E-3	9.34601E-2	1.57955E1	-1.98476E1	-1.98635E1	1.48962E1	2.15716E-9	2.5131E-3	2.5131E-3	6.31817E-3	2.25482E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80025E1	-1.09673E-3	-8.79997E1	3.8147E-4	4.69685E-3	9.36031E-2	1.57506E1	-1.98627E1	-1.99864E1	1.51536E1	2.15624E-9	2.51954E-3	2.51954E-3	6.28056E-3	2.26059E-2