[Scan]
initial_time=2016-01-27T19:09:52
final_time=2016-01-27T19:10:12
ip_count=19
run=1025
dataset=1
scan=79
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.44831E-2
qbias_imon=-3.80422E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.07407E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=3.95179E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-1.59007E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.94809E-10
mult1=-9.69223E-9
mult2=-2.73059E-9
rf_tmon=-8.59804E-3
rf_agc=2.90016E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=4.37641E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65356E0
bslens_imon=2.79022E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20086E1
lens5a_imon=1.97867E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=2.80563E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02249E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04865E1
cs_ea1_imon=2.64692E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02648E0
lens1_imon=1.44769E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64498E1
os_ef1alow_imon=2.99295E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03869E1
cs_ea2_imon=1.54403E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=2.9012E-5
olens2_vset=0.0E0
olens2_vmon=1.07288E-3
olens2_imon=3.61967E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11459E1
os_restr1_imon=2.88973E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=1.90517E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26329E0
cs_ionrep_imon=1.19295E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01612E1
cs_anode1_imon=2.89842E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99976E1
olens4_imon=9.67503E-11
tplens_vset=0.0E0
tplens_vmon=-1.61514E0
tplens_imon=-1.66709E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99708E1
iondef3_imon=8.94574E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98585E1
iondef2_imon=9.45255E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98389E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.55868E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23308E0
ionrepsh_imon=1.73836E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3368E1
lens5b_imon=2.1673E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.13335E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.245E-1
os_ea2_imon=-5.86251E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71055E1
cs_ef2a_imon=3.18269E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60017E0
os_ef2alow_imon=-2.53983E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47998E-1
os_ef2bup_imon=-5.22273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10903E1
os_restr2_imon=2.87583E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.31741E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02006E1
cs_anode2_imon=2.23465E-5
iondef1_vset=1.6E1
iondef1_vmon=1.57518E1
iondef1_imon=5.25042E-6
iondef4_vset=1.53E1
iondef4_vmon=1.51277E1
iondef4_imon=5.39417E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27963E1
olens3_imon=2.14524E-9
olens1_vset=0.0E0
olens1_vmon=1.38283E-3
olens1_imon=3.0942E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17011E0
cs_ionaccel_imon=-1.7579E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.83033E-6
window_vset=0.0E0
window_vmon=2.06681E-1
window_imon=-1.1393E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.8661E1
mask2_imon=-7.01421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.73746E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.60302E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.99236E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.52671E0
defgridb_imon=6.08615E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33795E1
os_fil1_imon=4.87211E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.42642E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.97468E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62708E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62214E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.98098E-2
os_fil2_imon=-2.39696E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.98741E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.42256E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32156E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.25917E-2
chamber_ion_pmon=2.15894E-9
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.53414E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.01E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80023E1	-1.04904E-3	-8.80003E1	1.43051E-4	4.86374E-3	9.33886E-2	1.58017E1	-1.98711E1	-1.99143E1	1.50941E1	2.15647E-9	2.51783E-3	2.51783E-3	6.31779E-3	2.27264E-2
2.0E0	1.836E3	1.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80025E1	-9.29832E-4	-8.80001E1	-2.38419E-5	5.19753E-3	9.33886E-2	1.58162E1	-1.98434E1	-1.99248E1	1.50873E1	2.158E-9	2.52867E-3	2.52867E-3	6.32386E-3	2.26113E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80025E1	-1.26362E-3	-8.80002E1	2.86102E-4	5.14984E-3	9.31025E-2	1.57879E1	-1.98417E1	-1.99614E1	1.51898E1	2.15533E-9	2.52276E-3	2.52276E-3	6.32356E-3	2.25674E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80022E1	-1.19209E-3	-8.79997E1	1.19209E-4	5.31673E-3	9.31501E-2	1.57098E1	-1.98597E1	-1.996E1	1.48773E1	2.15716E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.27607E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80023E1	-7.62939E-4	-8.79997E1	4.05312E-4	5.53131E-3	9.31501E-2	1.58173E1	-1.98741E1	-2.00063E1	1.51145E1	2.15425E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.27295E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80025E1	-1.0252E-3	-8.80001E1	5.48363E-4	5.62668E-3	9.35555E-2	1.57801E1	-1.98519E1	-1.9975E1	1.49908E1	2.15624E-9	2.52061E-3	2.52061E-3	6.3074E-3	2.27996E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80025E1	-6.4373E-4	-8.79998E1	6.4373E-4	5.14984E-3	9.34601E-2	1.57536E1	-1.98783E1	-1.99402E1	1.50124E1	2.158E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.2631E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80025E1	-1.12057E-3	-8.79998E1	1.43051E-4	5.26905E-3	9.33409E-2	1.5782E1	-1.99095E1	-1.99042E1	1.51452E1	2.15706E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27295E-2
1.2E1	4.3E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80021E1	-9.29832E-4	-8.80002E1	2.38419E-5	5.48363E-3	9.34124E-2	1.58678E1	-1.98446E1	-1.99648E1	1.50857E1	2.15425E-9	2.5199E-3	2.5199E-3	6.30192E-3	2.269E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80022E1	-6.91414E-4	-8.80003E1	4.05312E-4	4.91142E-3	9.35316E-2	1.58095E1	-1.98699E1	-2.00015E1	1.51704E1	2.15441E-9	2.51632E-3	2.51632E-3	6.31817E-3	2.26445E-2
1.4E1	6.7E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80023E1	-9.53674E-4	-8.8E1	3.09944E-4	5.24521E-3	9.35078E-2	1.58101E1	-1.98134E1	-1.99991E1	1.52467E1	2.158E-9	2.51662E-3	2.51662E-3	6.32936E-3	2.25524E-2
1.5E1	1.6E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80022E1	-9.29832E-4	-8.79999E1	1.19209E-4	5.05447E-3	9.36031E-2	1.57602E1	-1.98398E1	-1.99816E1	1.51482E1	2.15791E-9	2.52697E-3	2.52697E-3	6.33538E-3	2.26971E-2
1.6E1	1.46E2	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80022E1	-9.05991E-4	-8.8E1	1.90735E-4	5.34058E-3	9.35793E-2	1.57997E1	-1.988E1	-1.99455E1	1.51722E1	2.158E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.269E-2
1.7E1	1.68E2	0.0E0	6.87E2	4.7E2	-7.45602E-2	-8.80022E1	-1.09673E-3	-8.79998E1	3.57628E-4	5.34058E-3	9.33886E-2	1.5789E1	-1.986E1	-1.99944E1	1.4975E1	2.15808E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.27413E-2
1.8E1	6.98E2	1.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80024E1	-8.58307E-4	-8.8E1	3.09944E-4	5.38826E-3	9.32693E-2	1.58705E1	-1.99598E1	-1.99708E1	1.49289E1	2.15992E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.24905E-2
1.9E1	8.8E2	1.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80023E1	-9.05991E-4	-8.79999E1	2.14577E-4	5.00679E-3	9.35316E-2	1.58149E1	-1.98603E1	-1.99708E1	1.51211E1	2.15613E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.2631E-2
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80023E1	-8.34465E-4	-8.79998E1	7.15256E-5	5.07832E-3	9.33647E-2	1.58438E1	-1.9863E1	-1.99368E1	1.48361E1	2.158E-9	2.52428E-3	2.52428E-3	6.3074E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80023E1	-8.82149E-4	-8.79998E1	4.76837E-5	4.79221E-3	9.34839E-2	1.56905E1	-1.98224E1	-1.99804E1	1.51434E1	2.15396E-9	2.51549E-3	2.51549E-3	6.32784E-3	2.26276E-2
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80022E1	-8.82149E-4	-8.79995E1	3.09944E-4	4.673E-3	9.3317E-2	1.58421E1	-1.98782E1	-1.99768E1	1.48683E1	2.158E-9	2.52757E-3	2.52757E-3	6.29645E-3	2.25917E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.44831E-2	-8.80022E1	-7.86781E-4	-8.79997E1	1.19209E-4	4.74453E-3	9.33886E-2	1.57518E1	-1.98585E1	-1.99708E1	1.51277E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31288E-3	2.25917E-2