[Scan]
initial_time=2016-01-27T19:10:19
final_time=2016-01-27T19:10:38
ip_count=19
run=1025
dataset=1
scan=80
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.85858E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-6.03867E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.11201E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.61648E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=8.29041E-10
mult1=-9.42733E-9
mult2=-2.76652E-9
rf_tmon=-3.71933E-3
rf_agc=3.44631E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=4.78411E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.39106E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.99076E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=2.79674E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02316E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05159E1
cs_ea1_imon=2.64236E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99585E0
lens1_imon=1.61239E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03844E1
cs_ea2_imon=1.52427E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=2.92035E-5
olens2_vset=0.0E0
olens2_vmon=1.45435E-3
olens2_imon=3.78549E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11069E1
os_restr1_imon=2.88179E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14893E1
os_ea1_imon=1.89201E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63431E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=1.19404E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.90125E-5
olens4_vset=-3.0E1
olens4_vmon=-2.99978E1
olens4_imon=9.79066E-11
tplens_vset=0.0E0
tplens_vmon=-1.63199E0
tplens_imon=-2.77651E-7
iondef3_vset=-2.0E1
iondef3_vmon=-1.99798E1
iondef3_imon=8.77616E-6
iondef2_vset=-2.0E1
iondef2_vmon=-1.98693E1
iondef2_imon=9.33184E-6
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=4.80056E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23499E0
ionrepsh_imon=1.73415E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2213E-1
os_ea2_imon=-6.10355E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58254E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=2.86954E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.24857E-5
iondef1_vset=1.6E1
iondef1_vmon=1.58492E1
iondef1_imon=5.1872E-6
iondef4_vset=1.53E1
iondef4_vmon=1.49265E1
iondef4_imon=5.35968E-6
olens3_vset=-1.28E1
olens3_vmon=-1.27964E1
olens3_imon=2.17502E-9
olens1_vset=0.0E0
olens1_vmon=1.33514E-3
olens1_imon=3.59523E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.77618E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.13005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.39413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.56922E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.76436E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33789E1
os_fil1_imon=5.5751E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.90567E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60741E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30834E1
cs_fil1_imon=9.96516E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63423E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62368E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90173E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.77932E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46544E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21691E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.27026E-2
chamber_ion_pmon=2.15716E-9
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.54487E-1
res40_imon=-2.23388E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.72E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80023E1	-5.72205E-4	-8.79999E1	-4.76837E-5	5.00679E-3	9.32455E-2	1.57141E1	-1.98588E1	-1.99496E1	1.49703E1	2.15533E-9	2.52492E-3	2.52492E-3	6.31278E-3	2.27607E-2
2.0E0	1.786E3	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80023E1	-1.0252E-3	-8.79998E1	2.6226E-4	5.19753E-3	9.32455E-2	1.58228E1	-1.98459E1	-1.99475E1	1.49929E1	2.15716E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.26639E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80025E1	-7.86781E-4	-8.79995E1	4.76837E-5	5.17368E-3	9.32932E-2	1.58168E1	-1.98889E1	-1.99502E1	1.50908E1	2.1549E-9	2.51384E-3	2.51384E-3	6.3131E-3	2.26839E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80026E1	-9.05991E-4	-8.79996E1	1.90735E-4	5.38826E-3	9.32932E-2	1.56971E1	-1.98501E1	-1.99642E1	1.49331E1	2.15636E-9	2.51919E-3	2.51919E-3	6.29684E-3	2.25819E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80022E1	-4.29153E-4	-8.80002E1	5.48363E-4	5.24521E-3	9.35793E-2	1.56658E1	-1.98411E1	-1.9985E1	1.49896E1	2.15145E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.25329E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80025E1	-5.96046E-4	-8.8E1	4.29153E-4	5.17368E-3	9.35078E-2	1.59735E1	-1.98525E1	-1.9972E1	1.50064E1	2.15349E-9	2.52276E-3	2.52276E-3	6.30202E-3	2.25867E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80024E1	-5.96046E-4	-8.80001E1	1.43051E-4	5.14984E-3	9.34362E-2	1.58437E1	-1.98609E1	-2.00129E1	1.50394E1	2.15519E-9	2.52209E-3	2.52209E-3	6.28006E-3	2.2769E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80025E1	-9.29832E-4	-8.8E1	9.53674E-5	5.05447E-3	9.35793E-2	1.57312E1	-1.98222E1	-1.99608E1	1.49894E1	2.16081E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.26506E-2
1.2E1	3.7E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80023E1	-5.96046E-4	-8.80001E1	-2.14577E-4	5.38826E-3	9.33409E-2	1.5914E1	-1.98597E1	-1.996E1	1.50791E1	2.15808E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.26832E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.23189E-2	-8.80021E1	-4.76837E-4	-8.79998E1	2.14577E-4	5.36442E-3	9.36985E-2	1.56494E1	-1.98822E1	-1.99193E1	1.50433E1	2.15519E-9	2.52099E-3	2.52099E-3	6.3074E-3	2.25917E-2
1.4E1	7.3E1	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80025E1	-6.4373E-4	-8.79998E1	9.53674E-5	5.17368E-3	9.36031E-2	1.59247E1	-1.98696E1	-1.99669E1	1.48835E1	2.15005E-9	2.52553E-3	2.52553E-3	6.32328E-3	2.27718E-2
1.5E1	2.7E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80024E1	-5.24521E-4	-8.80001E1	2.14577E-4	5.03063E-3	9.3627E-2	1.56737E1	-1.98368E1	-2.00255E1	1.50521E1	2.15277E-9	2.52222E-3	2.52222E-3	6.31902E-3	2.28168E-2
1.6E1	1.53E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80024E1	-5.00679E-4	-8.80001E1	6.67572E-4	5.126E-3	9.36747E-2	1.58191E1	-1.98765E1	-1.9945E1	1.49325E1	2.15519E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.27295E-2
1.7E1	1.89E2	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80026E1	-7.86781E-4	-8.79999E1	5.24521E-4	5.19753E-3	9.34601E-2	1.58628E1	-1.98411E1	-1.99909E1	1.51563E1	2.15613E-9	2.52099E-3	2.52099E-3	6.29098E-3	2.27492E-2
1.8E1	7.32E2	1.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80023E1	-1.14441E-3	-8.8E1	3.8147E-4	5.126E-3	9.34601E-2	1.57224E1	-1.98765E1	-2.00871E1	1.48478E1	2.15808E-9	2.51203E-3	2.51203E-3	6.32896E-3	2.26832E-2
1.9E1	8.83E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80026E1	-8.58307E-4	-8.8E1	6.67572E-4	5.14984E-3	9.35555E-2	1.57915E1	-1.9844E1	-1.9957E1	1.4995E1	2.15624E-9	2.52276E-3	2.52276E-3	6.29128E-3	2.25289E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80024E1	-5.72205E-4	-8.79998E1	4.76837E-4	5.38826E-3	9.37939E-2	1.58728E1	-1.9844E1	-1.99614E1	1.51221E1	2.15332E-9	2.51225E-3	2.51225E-3	6.33486E-3	2.25329E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80026E1	-4.76837E-4	-8.79999E1	6.19888E-4	4.98295E-3	9.37462E-2	1.56281E1	-1.98489E1	-1.99426E1	1.48424E1	2.15349E-9	2.52276E-3	2.52276E-3	6.31278E-3	2.26252E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.10051E-2	-8.80026E1	-4.29153E-4	-8.79999E1	1.43051E-4	5.10216E-3	9.34839E-2	1.59554E1	-1.98712E1	-1.99272E1	1.51374E1	2.15613E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.26506E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80026E1	-5.72205E-4	-8.8E1	3.33786E-4	5.07832E-3	9.35316E-2	1.58492E1	-1.98693E1	-1.99798E1	1.49265E1	2.15716E-9	2.51417E-3	2.51417E-3	6.31278E-3	2.27026E-2