[Scan]
initial_time=2016-01-27T19:10:56
final_time=2016-01-27T19:11:15
ip_count=19
run=1025
dataset=2
scan=81
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08754E-4
ql1_vset=
ql1_vmon=-8.20994E-1
ql1_imon=3.47555E-9
ql2_vset=
ql2_vmon=-7.99179E-1
ql2_imon=2.05398E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=8.22572E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-5.61237E-11
mult1=-1.00775E-8
mult2=-2.8264E-9
rf_tmon=-4.50642E-3
rf_agc=3.26186E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.57404E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64629E0
bslens_imon=2.60898E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20059E1
lens5a_imon=1.97531E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53535E1
cs_ef1b_imon=2.80015E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02249E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04552E1
cs_ea1_imon=2.6449E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40444E0
lens1_imon=2.84057E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64586E1
os_ef1alow_imon=2.98067E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03651E1
cs_ea2_imon=1.5259E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84411E1
cs_ef1a_imon=2.90585E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.50909E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11744E1
os_restr1_imon=2.88068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15596E1
os_ea1_imon=1.90953E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63697E1
os_ef1bup_imon=3.09946E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24539E0
cs_ionrep_imon=1.17315E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91911E2
cs_nozzle_imon=1.93665E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01664E1
cs_anode1_imon=2.89712E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20616E0
olens4_imon=1.95017E-9
tplens_vset=1.4E-1
tplens_vmon=1.64031E0
tplens_imon=-3.5802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.51885E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.58162E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98373E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=2.42281E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32929E0
ionrepsh_imon=1.74339E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3368E1
lens5b_imon=2.1824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74831E1
cs_ef2b_imon=3.132E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.57504E-1
os_ea2_imon=-5.42618E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71291E1
cs_ef2a_imon=3.19408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62274E0
os_ef2alow_imon=-2.39519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.23791E-1
os_ef2bup_imon=-5.31104E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.86659E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.3117E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.25523E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73604E1
iondef1_imon=1.08689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66827E1
iondef4_imon=1.0805E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.25529E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=8.28862E-11
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12007E0
cs_ionaccel_imon=-1.75766E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47317E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56299E1
einzel_imon=7.77508E-6
window_vset=0.0E0
window_vmon=2.25275E-1
window_imon=-9.95979E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.39134E-4
mask2_vset=0.0E0
mask2_vmon=-1.86612E1
mask2_imon=-6.00039E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=7.49916E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.65001E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.92187E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65551E0
defgridb_imon=5.89148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33812E1
os_fil1_imon=5.62129E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.61217E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60576E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30893E1
cs_fil1_imon=9.97371E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6278E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62458E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94496E-2
os_fil2_imon=-2.42053E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.12522E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.39976E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30978E-1
cs_fil2_imon=-2.46526E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.66458E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21823E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.25329E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.26235E-1
res40_imon=-2.50592E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=254
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.219E-1	-7.9875E-1	-9.13169E0	-9.14195E0	5.36442E-3	9.35078E-2	2.73107E1	-3.26921E1	-3.26148E1	2.68007E1	2.15483E-9	2.5216E-3	2.5216E-3	6.32784E-3	2.27376E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.21853E-1	-7.98726E-1	-9.13155E0	-9.14218E0	4.86374E-3	9.35555E-2	2.73908E1	-3.26909E1	-3.26132E1	2.68388E1	2.15546E-9	2.5199E-3	2.5199E-3	6.31022E-3	2.26906E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.21161E-1	-7.99417E-1	-9.13141E0	-9.14226E0	4.98295E-3	9.37939E-2	2.72489E1	-3.26359E1	-3.26984E1	2.66188E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.20899E-1	-7.99036E-1	-9.13167E0	-9.14192E0	5.07832E-3	9.35078E-2	2.73375E1	-3.26324E1	-3.26845E1	2.66779E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31817E-3	2.26832E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.20851E-1	-7.99179E-1	-9.13179E0	-9.14187E0	5.31673E-3	9.38177E-2	2.72903E1	-3.26673E1	-3.26354E1	2.68719E1	2.15726E-9	2.52659E-3	2.52659E-3	6.31798E-3	2.26387E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.20827E-1	-7.99298E-1	-9.13174E0	-9.14202E0	4.93526E-3	9.36508E-2	2.72378E1	-3.26675E1	-3.26212E1	2.68869E1	2.15624E-9	2.5131E-3	2.5131E-3	6.32896E-3	2.27219E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.20827E-1	-7.99394E-1	-9.13181E0	-9.14176E0	5.36442E-3	9.3317E-2	2.72939E1	-3.26107E1	-3.25841E1	2.66999E1	2.15987E-9	2.52538E-3	2.52538E-3	6.32386E-3	2.26506E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.20851E-1	-7.99704E-1	-9.1316E0	-9.14168E0	5.29289E-3	9.34124E-2	2.73045E1	-3.2626E1	-3.2626E1	2.67806E1	2.15716E-9	2.52169E-3	2.52169E-3	6.32356E-3	2.26252E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.20637E-1	-7.99155E-1	-9.13148E0	-9.14176E0	4.98295E-3	9.38177E-2	2.73075E1	-3.26621E1	-3.26621E1	2.68671E1	2.15425E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.24742E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.20923E-1	-7.9937E-1	-9.13203E0	-9.14195E0	4.74453E-3	9.38416E-2	2.71482E1	-3.26868E1	-3.26054E1	2.67469E1	2.16081E-9	2.5188E-3	2.5188E-3	6.32936E-3	2.26113E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.20756E-1	-7.99513E-1	-9.13181E0	-9.14168E0	4.95911E-3	9.35555E-2	2.71741E1	-3.26803E1	-3.26537E1	2.68496E1	2.15441E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.25674E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.20708E-1	-7.99632E-1	-9.13193E0	-9.14168E0	4.86374E-3	9.32693E-2	2.71458E1	-3.26915E1	-3.26136E1	2.68794E1	2.15519E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.25329E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.20875E-1	-7.99537E-1	-9.13203E0	-9.14218E0	4.8399E-3	9.3317E-2	2.73273E1	-3.26753E1	-3.26152E1	2.68815E1	2.14825E-9	2.52131E-3	2.52131E-3	6.32858E-3	2.26766E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.20661E-1	-7.99322E-1	-9.13167E0	-9.14176E0	4.673E-3	9.32932E-2	2.74595E1	-3.26657E1	-3.26242E1	2.69169E1	2.15696E-9	2.51804E-3	2.51804E-3	6.31299E-3	2.26971E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.20899E-1	-7.98917E-1	-9.13148E0	-9.14197E0	5.22137E-3	9.34124E-2	2.73281E1	-3.26425E1	-3.27493E1	2.68238E1	2.16085E-9	2.51847E-3	2.51847E-3	6.29665E-3	2.26445E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.20875E-1	-7.98988E-1	-9.1316E0	-9.1418E0	4.76837E-3	9.30786E-2	2.73478E1	-3.26681E1	-3.26014E1	2.68482E1	2.158E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.26506E-2
2.0E1	0.0E0	1.0E0	8.08E2	5.58E2	-2.09665E0	-8.21161E-1	-7.99084E-1	-9.13122E0	-9.14183E0	5.00679E-3	9.33886E-2	2.73586E1	-3.26843E1	-3.26609E1	2.6865E1	2.15349E-9	2.52599E-3	2.52599E-3	6.31278E-3	2.27219E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.214E-1	-7.99251E-1	-9.13155E0	-9.14195E0	4.81606E-3	9.35078E-2	2.74559E1	-3.26837E1	-3.2635E1	2.67677E1	2.15696E-9	2.51693E-3	2.51693E-3	6.31299E-3	2.28179E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.21209E-1	-7.99084E-1	-9.13117E0	-9.14199E0	4.8399E-3	9.35316E-2	2.72264E1	-3.26458E1	-3.26158E1	2.68388E1	2.15533E-9	2.52169E-3	2.52169E-3	6.31817E-3	2.26639E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.20994E-1	-7.99179E-1	-9.13112E0	-9.14187E0	5.14984E-3	9.34124E-2	2.73604E1	-3.26506E1	-3.25912E1	2.66827E1	2.158E-9	2.5199E-3	2.5199E-3	6.31837E-3	2.25329E-2