[Scan]
initial_time=2016-01-27T19:11:22
final_time=2016-01-27T19:11:42
ip_count=19
run=1025
dataset=2
scan=82
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.20613E-1
ql1_imon=1.89755E-9
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=2.70104E-10
ql3_vset=
ql3_vmon=-9.13069E0
ql3_imon=4.37078E-9
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=2.60758E-10
mult1=-9.75243E-9
mult2=-2.71262E-9
rf_tmon=-4.84889E-3
rf_agc=3.26907E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=2.648E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65029E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53615E1
cs_ef1b_imon=2.80806E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02008E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.65228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3584E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=2.97314E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03525E1
cs_ea2_imon=1.53241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.92031E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=4.01986E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=2.86992E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15188E1
os_ea1_imon=1.9044E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63832E1
os_ef1bup_imon=3.09199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21788E0
cs_ionrep_imon=1.17386E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93526E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.87409E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=1.23111E-9
tplens_vset=1.4E-1
tplens_vmon=1.65559E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25954E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.09443E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26036E0
ionrepsh_imon=1.74796E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33693E1
lens5b_imon=2.19675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74698E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2449E-1
os_ea2_imon=-5.67882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00538E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70557E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6413E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.2483E-1
os_ef2bup_imon=-5.33741E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11008E1
os_restr2_imon=2.87235E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.24264E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73279E1
iondef1_imon=1.0691E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66592E1
iondef4_imon=1.10693E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.80556E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=2.09856E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.69187E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=1.81775E-1
window_imon=-1.04895E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86628E1
mask2_imon=-7.70926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.00291E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.24359E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65511E0
defgridb_imon=6.04019E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33778E1
os_fil1_imon=4.46088E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.884E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6064E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30863E1
cs_fil1_imon=9.96622E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63582E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62325E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.82575E-2
os_fil2_imon=-2.41433E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.4082E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.38824E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-1.89305E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.43889E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2171E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.26639E-2
chamber_ion_pmon=2.159E-9
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.76206E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.20804E-1	-7.98917E-1	-9.13033E0	-9.14204E0	4.62532E-3	9.377E-2	2.72186E1	-3.26266E1	-3.26392E1	2.6758E1	2.15257E-9	2.52707E-3	2.52707E-3	6.31817E-3	2.25674E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.20708E-1	-7.98965E-1	-9.13022E0	-9.14209E0	5.05447E-3	9.33886E-2	2.73712E1	-3.26578E1	-3.26413E1	2.67164E1	2.15701E-9	2.51787E-3	2.51787E-3	6.30464E-3	2.26041E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.20851E-1	-7.98845E-1	-9.13038E0	-9.1418E0	4.88758E-3	9.34601E-2	2.72036E1	-3.26738E1	-3.25829E1	2.6818E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.20732E-1	-7.99131E-1	-9.13072E0	-9.1418E0	5.22137E-3	9.35078E-2	2.74125E1	-3.26514E1	-3.26703E1	2.69397E1	2.15624E-9	2.52707E-3	2.52707E-3	6.3074E-3	2.27996E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.20518E-1	-7.99394E-1	-9.13029E0	-9.14166E0	4.98295E-3	9.34601E-2	2.72282E1	-3.26849E1	-3.26152E1	2.67902E1	2.15332E-9	2.52647E-3	2.52647E-3	6.3074E-3	2.2631E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.20327E-1	-7.9875E-1	-9.13069E0	-9.14187E0	4.81606E-3	9.35555E-2	2.72727E1	-3.26386E1	-3.26266E1	2.68058E1	2.15624E-9	2.52923E-3	2.52923E-3	6.32356E-3	2.27026E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.20374E-1	-7.98965E-1	-9.13033E0	-9.14202E0	5.26905E-3	9.37223E-2	2.73027E1	-3.265E1	-3.2623E1	2.6831E1	2.15425E-9	2.52099E-3	2.52099E-3	6.29645E-3	2.25524E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.20374E-1	-7.98821E-1	-9.13055E0	-9.14187E0	5.10216E-3	9.35793E-2	2.72769E1	-3.26416E1	-3.26488E1	2.68779E1	2.15987E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.26113E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.20541E-1	-7.98941E-1	-9.13055E0	-9.14187E0	4.86374E-3	9.3627E-2	2.72426E1	-3.26422E1	-3.26224E1	2.67385E1	2.15519E-9	2.52318E-3	2.52318E-3	6.30192E-3	2.25917E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.20565E-1	-7.99298E-1	-9.13084E0	-9.14211E0	5.126E-3	9.34362E-2	2.73505E1	-3.26585E1	-3.2616E1	2.68589E1	2.15706E-9	2.52538E-3	2.52538E-3	6.33486E-3	2.26506E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.20422E-1	-7.99155E-1	-9.13076E0	-9.14209E0	5.34058E-3	9.35793E-2	2.73393E1	-3.2659E1	-3.26048E1	2.67486E1	2.15624E-9	2.51954E-3	2.51954E-3	6.30202E-3	2.26832E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.20398E-1	-7.98917E-1	-9.13055E0	-9.14204E0	4.76837E-3	9.35316E-2	2.73563E1	-3.26909E1	-3.25823E1	2.67689E1	2.15624E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.2819E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.19993E-1	-7.99084E-1	-9.13062E0	-9.14242E0	5.4121E-3	9.35793E-2	2.72823E1	-3.26543E1	-3.26446E1	2.69283E1	2.1549E-9	2.51838E-3	2.51838E-3	6.33021E-3	2.27249E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.20327E-1	-7.98941E-1	-9.13062E0	-9.14209E0	5.62668E-3	9.35078E-2	2.73163E1	-3.26455E1	-3.26366E1	2.6993E1	2.15519E-9	2.51443E-3	2.51443E-3	6.3074E-3	2.27492E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.20327E-1	-7.99346E-1	-9.13064E0	-9.14209E0	4.88758E-3	9.36985E-2	2.73942E1	-3.26661E1	-3.2606E1	2.70455E1	2.15441E-9	2.51847E-3	2.51847E-3	6.33436E-3	2.2819E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.20494E-1	-7.98798E-1	-9.13048E0	-9.14228E0	5.10216E-3	9.37223E-2	2.73424E1	-3.26573E1	-3.26434E1	2.70737E1	2.15238E-9	2.51662E-3	2.51662E-3	6.32386E-3	2.26703E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.20446E-1	-7.98368E-1	-9.13033E0	-9.14216E0	5.24521E-3	9.35316E-2	2.71753E1	-3.26494E1	-3.26212E1	2.68761E1	2.15349E-9	2.52384E-3	2.52384E-3	6.30202E-3	2.27413E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.20804E-1	-7.98965E-1	-9.13026E0	-9.14187E0	5.45979E-3	9.37939E-2	2.73216E1	-3.26844E1	-3.26773E1	2.6829E1	2.15238E-9	2.52209E-3	2.52209E-3	6.3074E-3	2.2631E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.20708E-1	-7.9906E-1	-9.1301E0	-9.14202E0	4.88758E-3	9.36031E-2	2.72827E1	-3.2672E1	-3.26124E1	2.68845E1	2.15533E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.25867E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.20613E-1	-7.99012E-1	-9.13069E0	-9.14197E0	5.05447E-3	9.34839E-2	2.73279E1	-3.26621E1	-3.25954E1	2.66592E1	2.159E-9	2.51954E-3	2.51954E-3	6.31817E-3	2.26639E-2