[Scan]
initial_time=2016-01-27T19:11:49
final_time=2016-01-27T19:12:08
ip_count=19
run=1025
dataset=2
scan=83
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.19612E-1
ql1_imon=1.44178E-9
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.9279E-10
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=3.27944E-9
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=3.3474E-10
mult1=-9.98405E-9
mult2=-2.83497E-9
rf_tmon=-4.16143E-3
rf_agc=3.34448E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=3.26824E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63268E0
bslens_imon=2.559E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.99574E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05204E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53697E1
cs_ef1b_imon=2.80199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=2.67777E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38241E0
lens1_imon=2.71195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.98534E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03795E1
cs_ea2_imon=1.54627E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84517E1
cs_ef1a_imon=2.90988E-5
olens2_vset=9.7E-1
olens2_vmon=9.70602E-1
olens2_imon=4.14193E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11271E1
os_restr1_imon=2.88769E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15213E1
os_ea1_imon=1.87303E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.09425E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26253E0
cs_ionrep_imon=1.1976E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93344E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01656E1
cs_anode1_imon=2.90544E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=1.09043E-9
tplens_vset=1.4E-1
tplens_vmon=1.67909E0
tplens_imon=-2.63683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.48404E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.58624E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98502E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.67999E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.39984E0
ionrepsh_imon=1.76005E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33582E1
lens5b_imon=2.17824E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74365E1
cs_ef2b_imon=3.12259E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29514E-1
os_ea2_imon=-5.52208E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00734E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70802E1
cs_ef2a_imon=3.19805E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59885E0
os_ef2alow_imon=-2.56867E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.31414E-1
os_ef2bup_imon=-5.21474E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10719E1
os_restr2_imon=2.86789E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.28503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01724E1
cs_anode2_imon=2.23112E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.0954E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68053E1
iondef4_imon=1.09519E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=1.90281E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=2.35605E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13583E0
cs_ionaccel_imon=-1.72875E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47332E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56257E1
einzel_imon=7.69467E-6
window_vset=0.0E0
window_vmon=2.13581E-1
window_imon=-9.60541E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82599E2
mask1_imon=2.39173E-4
mask2_vset=0.0E0
mask2_vmon=-1.86492E1
mask2_imon=-6.02041E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92573E3
multa_neg_imon=7.73506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93683E3
defgrida_imon=6.95292E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.39787E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.65911E0
defgridb_imon=5.97263E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3382E1
os_fil1_imon=4.88055E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.77131E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60535E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.97043E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63618E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6235E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.8669E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.19978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.28781E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3143E-1
cs_fil2_imon=-2.44878E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.65502E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21675E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.27607E-2
chamber_ion_pmon=2.15349E-9
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.61309E-1
res40_imon=-2.44575E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.20422E-1	-7.99298E-1	-9.13053E0	-9.14221E0	5.65052E-3	9.35793E-2	2.73088E1	-3.26511E1	-3.2648E1	2.67464E1	2.15726E-9	2.52448E-3	2.52448E-3	6.33919E-3	2.27528E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.20255E-1	-7.98869E-1	-9.13053E0	-9.14216E0	5.43594E-3	9.34601E-2	2.7255E1	-3.26608E1	-3.25953E1	2.69043E1	2.16173E-9	2.52585E-3	2.52585E-3	6.30182E-3	2.27172E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.20494E-1	-7.99084E-1	-9.13043E0	-9.14199E0	5.14984E-3	9.3627E-2	2.73804E1	-3.26312E1	-3.2604E1	2.67873E1	2.15624E-9	2.51417E-3	2.51417E-3	6.28056E-3	2.26445E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.20351E-1	-7.99108E-1	-9.13057E0	-9.14173E0	4.98295E-3	9.33886E-2	2.73009E1	-3.26597E1	-3.2623E1	2.68771E1	2.15624E-9	2.52707E-3	2.52707E-3	6.30202E-3	2.25097E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.20303E-1	-7.99274E-1	-9.13064E0	-9.14185E0	4.93526E-3	9.36985E-2	2.73381E1	-3.2638E1	-3.26332E1	2.68082E1	2.15533E-9	2.52707E-3	2.52707E-3	6.33977E-3	2.26832E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.20065E-1	-7.99251E-1	-9.1306E0	-9.14187E0	5.19753E-3	9.35078E-2	2.72732E1	-3.26461E1	-3.26242E1	2.68022E1	2.158E-9	2.51443E-3	2.51443E-3	6.32936E-3	2.25133E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.20065E-1	-7.98726E-1	-9.13019E0	-9.1419E0	5.22137E-3	9.34601E-2	2.73604E1	-3.26428E1	-3.25834E1	2.68034E1	2.15613E-9	2.51552E-3	2.51552E-3	6.31288E-3	2.27295E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.20303E-1	-7.98821E-1	-9.13031E0	-9.14197E0	5.10216E-3	9.3174E-2	2.72865E1	-3.2733E1	-3.26158E1	2.68112E1	2.159E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.26639E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09356E0	-8.20184E-1	-7.99179E-1	-9.13031E0	-9.14223E0	4.79221E-3	9.34839E-2	2.72348E1	-3.26603E1	-3.26266E1	2.67896E1	2.15314E-9	2.52027E-3	2.52027E-3	6.32418E-3	2.25369E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.20255E-1	-7.99298E-1	-9.13048E0	-9.14218E0	4.81606E-3	9.34839E-2	2.73345E1	-3.26621E1	-3.26719E1	2.68442E1	2.159E-9	2.51954E-3	2.51954E-3	6.31278E-3	2.25289E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.20208E-1	-7.99036E-1	-9.13045E0	-9.14207E0	5.05447E-3	9.32693E-2	2.72426E1	-3.26579E1	-3.25711E1	2.68563E1	2.15791E-9	2.52362E-3	2.52362E-3	6.3074E-3	2.26169E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.20184E-1	-7.9906E-1	-9.13067E0	-9.14185E0	5.10216E-3	9.30786E-2	2.73003E1	-3.26458E1	-3.26645E1	2.67115E1	2.16177E-9	2.52169E-3	2.52169E-3	6.32896E-3	2.25482E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.20136E-1	-7.98798E-1	-9.1305E0	-9.14199E0	4.95911E-3	9.31025E-2	2.73434E1	-3.26496E1	-3.26248E1	2.68267E1	2.15332E-9	2.52318E-3	2.52318E-3	6.29645E-3	2.2769E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.19898E-1	-7.98774E-1	-9.13055E0	-9.14223E0	5.17368E-3	9.32932E-2	2.72871E1	-3.26873E1	-3.262E1	2.67794E1	2.15073E-9	2.52276E-3	2.52276E-3	6.31817E-3	2.26059E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.19707E-1	-7.99179E-1	-9.1305E0	-9.14183E0	5.57899E-3	9.35793E-2	2.72886E1	-3.26667E1	-3.26496E1	2.68172E1	2.15706E-9	2.5199E-3	2.5199E-3	6.31288E-3	2.26506E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.19731E-1	-7.98965E-1	-9.13048E0	-9.14211E0	5.31673E-3	9.33886E-2	2.72997E1	-3.26657E1	-3.26242E1	2.67734E1	2.15624E-9	2.52061E-3	2.52061E-3	6.32896E-3	2.26252E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.19397E-1	-7.98965E-1	-9.13072E0	-9.14207E0	5.14984E-3	9.3627E-2	2.73759E1	-3.27056E1	-3.26113E1	2.67955E1	2.15613E-9	2.5188E-3	2.5188E-3	6.33486E-3	2.2572E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.19492E-1	-7.99465E-1	-9.1306E0	-9.1419E0	5.45979E-3	9.37223E-2	2.72318E1	-3.26446E1	-3.2596E1	2.68178E1	2.15716E-9	2.52061E-3	2.52061E-3	6.33977E-3	2.26252E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.19731E-1	-7.99179E-1	-9.13062E0	-9.14211E0	5.67436E-3	9.3627E-2	2.72992E1	-3.26779E1	-3.26461E1	2.68082E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.27492E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.19612E-1	-7.98821E-1	-9.13076E0	-9.14192E0	5.48363E-3	9.39369E-2	2.73393E1	-3.26614E1	-3.26349E1	2.68053E1	2.15349E-9	2.52276E-3	2.52276E-3	6.33977E-3	2.27607E-2