[Scan]
initial_time=2016-01-27T19:12:16
final_time=2016-01-27T19:12:35
ip_count=19
run=1025
dataset=2
scan=84
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09402E0
qbias_imon=-1.08828E-4
ql1_vset=
ql1_vmon=-8.19206E-1
ql1_imon=1.267E-9
ql2_vset=
ql2_vmon=-7.98607E-1
ql2_imon=2.49839E-10
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=2.74947E-9
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=3.91865E-10
mult1=-9.80672E-9
mult2=-2.75461E-9
rf_tmon=-4.92241E-3
rf_agc=3.361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=3.4647E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19664E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5349E1
cs_ef1b_imon=2.79025E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02222E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05234E1
cs_ea1_imon=2.66297E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38638E0
lens1_imon=2.5738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.52272E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84286E1
cs_ef1a_imon=2.90089E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.08363E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=2.89008E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=1.88105E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26231E0
cs_ionrep_imon=1.17989E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93535E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.90377E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=9.90975E-10
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.52488E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26644E1
iondef2_imon=1.56778E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98591E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.49081E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31218E0
ionrepsh_imon=1.74514E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33483E1
lens5b_imon=2.18243E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.87773E-1
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06054E2
lens4b_imon=2.00385E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.18957E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62459E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36757E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=2.86521E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.32199E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01947E1
cs_anode2_imon=2.24209E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.07643E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=1.91792E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=2.33912E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-1.78699E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.63738E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.32874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.2148E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.39002E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.41335E0
defgridb_imon=6.27969E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33815E1
os_fil1_imon=4.72216E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44916E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60617E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30873E1
cs_fil1_imon=9.96167E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62372E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91204E-2
os_fil2_imon=-2.44372E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.89945E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33127E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21762E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.27097E-2
chamber_ion_pmon=2.158E-9
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.10348E-1
res40_imon=-2.26631E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.19373E-1	-7.98726E-1	-9.13038E0	-9.14204E0	4.86374E-3	9.38416E-2	2.72184E1	-3.26549E1	-3.26384E1	2.68176E1	2.15887E-9	2.52027E-3	2.52027E-3	6.30182E-3	2.2677E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.19397E-1	-7.98821E-1	-9.13064E0	-9.1418E0	5.34058E-3	9.39846E-2	2.73457E1	-3.26547E1	-3.26397E1	2.67433E1	2.15907E-9	2.52131E-3	2.52131E-3	6.33388E-3	2.26008E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.19635E-1	-7.9906E-1	-9.13084E0	-9.14207E0	4.76837E-3	9.39608E-2	2.73445E1	-3.26793E1	-3.26144E1	2.68893E1	2.1549E-9	2.52521E-3	2.52521E-3	6.29035E-3	2.26226E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.19468E-1	-7.99084E-1	-9.13053E0	-9.14221E0	4.98295E-3	9.377E-2	2.72468E1	-3.2635E1	-3.26879E1	2.66833E1	2.15636E-9	2.51709E-3	2.51709E-3	6.32858E-3	2.26577E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.19206E-1	-7.98655E-1	-9.1305E0	-9.14207E0	4.8399E-3	9.35793E-2	2.73122E1	-3.26585E1	-3.26785E1	2.68334E1	2.15332E-9	2.51552E-3	2.51552E-3	6.3074E-3	2.2572E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.18968E-1	-7.99036E-1	-9.13057E0	-9.14199E0	5.05447E-3	9.38416E-2	2.74078E1	-3.26422E1	-3.25683E1	2.68118E1	2.15716E-9	2.52384E-3	2.52384E-3	6.33977E-3	2.27607E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.19278E-1	-7.98845E-1	-9.13084E0	-9.14209E0	5.05447E-3	9.36985E-2	2.71837E1	-3.26783E1	-3.26158E1	2.68376E1	2.15894E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.27492E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.19468E-1	-7.98535E-1	-9.13069E0	-9.14204E0	4.98295E-3	9.39369E-2	2.73033E1	-3.26284E1	-3.262E1	2.68322E1	2.15566E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.27492E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.19492E-1	-7.99298E-1	-9.13069E0	-9.14218E0	5.03063E-3	9.36508E-2	2.73051E1	-3.26797E1	-3.26567E1	2.68064E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.19445E-1	-7.99346E-1	-9.13074E0	-9.14195E0	5.126E-3	9.36508E-2	2.74257E1	-3.26548E1	-3.26376E1	2.67625E1	2.15533E-9	2.52599E-3	2.52599E-3	6.32356E-3	2.25867E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.19325E-1	-7.9906E-1	-9.13086E0	-9.14207E0	5.126E-3	9.34124E-2	2.7233E1	-3.26416E1	-3.26597E1	2.67848E1	2.16078E-9	2.52809E-3	2.52809E-3	6.3074E-3	2.25968E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.1954E-1	-7.9906E-1	-9.13079E0	-9.14214E0	5.14984E-3	9.35793E-2	2.73964E1	-3.26482E1	-3.26554E1	2.67962E1	2.15238E-9	2.52757E-3	2.52757E-3	6.32936E-3	2.25917E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.19206E-1	-7.98941E-1	-9.13086E0	-9.14209E0	4.95911E-3	9.36031E-2	2.72084E1	-3.26783E1	-3.26266E1	2.6983E1	2.15706E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.26703E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09348E0	-8.19683E-1	-7.98988E-1	-9.13074E0	-9.14247E0	5.05447E-3	9.377E-2	2.73592E1	-3.26197E1	-3.26266E1	2.67081E1	2.15987E-9	2.51771E-3	2.51771E-3	6.32386E-3	2.27295E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09364E0	-8.19349E-1	-7.99251E-1	-9.13048E0	-9.14197E0	5.43594E-3	9.38416E-2	2.72533E1	-3.26647E1	-3.26148E1	2.68426E1	2.15913E-9	2.51886E-3	2.51886E-3	6.33863E-3	2.24845E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.19373E-1	-7.98893E-1	-9.13079E0	-9.14197E0	5.29289E-3	9.38177E-2	2.72901E1	-3.26458E1	-3.26182E1	2.67637E1	2.15199E-9	2.51952E-3	2.51952E-3	6.29603E-3	2.26431E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.19397E-1	-7.9906E-1	-9.13086E0	-9.14204E0	5.126E-3	9.34601E-2	2.72174E1	-3.26699E1	-3.26272E1	2.68215E1	2.15519E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.25917E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.19588E-1	-7.99251E-1	-9.13103E0	-9.1423E0	5.48363E-3	9.34124E-2	2.72906E1	-3.26614E1	-3.2571E1	2.6804E1	2.15706E-9	2.51552E-3	2.51552E-3	6.32386E-3	2.269E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.19111E-1	-7.99012E-1	-9.131E0	-9.14223E0	5.17368E-3	9.36031E-2	2.7373E1	-3.2647E1	-3.2647E1	2.68105E1	2.15275E-9	2.52342E-3	2.52342E-3	6.31269E-3	2.26766E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09402E0	-8.19206E-1	-7.98607E-1	-9.13062E0	-9.14211E0	5.07832E-3	9.3627E-2	2.73016E1	-3.26644E1	-3.26319E1	2.68094E1	2.158E-9	2.5188E-3	2.5188E-3	6.31837E-3	2.27097E-2