[Scan]
initial_time=2016-01-27T19:13:09
final_time=2016-01-27T19:13:28
ip_count=19
run=1025
dataset=2
scan=86
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.18801E-1
ql1_imon=1.10196E-9
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=3.37124E-10
ql3_vset=
ql3_vmon=-9.13072E0
ql3_imon=2.09926E-9
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=4.83251E-10
mult1=-9.98405E-9
mult2=-2.70366E-9
rf_tmon=-5.20556E-3
rf_agc=3.25481E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=3.67868E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65749E0
bslens_imon=2.59081E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19547E1
lens5a_imon=1.95856E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=2.80611E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0457E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05098E1
cs_ea1_imon=2.64394E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36093E0
lens1_imon=2.55408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64861E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03788E1
cs_ea2_imon=1.4965E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=2.92251E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=3.94881E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=2.8699E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15287E1
os_ea1_imon=1.902E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.09947E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23251E0
cs_ionrep_imon=1.20046E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=2.89152E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=8.95095E-10
tplens_vset=1.4E-1
tplens_vmon=1.63041E0
tplens_imon=-3.03495E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26219E1
iondef3_imon=1.48438E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.58135E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.60823E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25332E0
ionrepsh_imon=1.74076E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33425E1
lens5b_imon=2.18776E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.2489E-1
os_ea2_imon=-5.5693E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00667E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71522E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61197E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.65589E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.87638E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.30406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.22767E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72644E1
iondef1_imon=1.0686E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67782E1
iondef4_imon=1.0953E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=1.95823E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=2.28918E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.74734E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56441E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-8.7158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-4.67935E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.62645E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.60904E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.82207E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.53939E0
defgridb_imon=6.01769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33801E1
os_fil1_imon=4.34975E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.26296E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60525E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30827E1
cs_fil1_imon=9.96498E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63057E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62549E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.87019E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.01008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-1.89112E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.27097E-2
chamber_ion_pmon=2.15238E-9
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=4.46988E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.19206E-1	-7.99322E-1	-9.13069E0	-9.1419E0	4.81606E-3	9.34362E-2	2.73204E1	-3.26862E1	-3.26325E1	2.68142E1	2.15505E-9	2.52139E-3	2.52139E-3	6.32418E-3	2.25569E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.19159E-1	-7.99251E-1	-9.13038E0	-9.14183E0	4.74453E-3	9.35793E-2	2.72934E1	-3.26831E1	-3.26092E1	2.68261E1	2.15349E-9	2.51847E-3	2.51847E-3	6.31817E-3	2.25867E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.18992E-1	-7.99274E-1	-9.13053E0	-9.14211E0	4.81606E-3	9.36031E-2	2.72847E1	-3.26635E1	-3.26476E1	2.67951E1	2.15745E-9	2.5216E-3	2.5216E-3	6.31761E-3	2.26093E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.19135E-1	-7.99656E-1	-9.13045E0	-9.14214E0	4.79221E-3	9.33886E-2	2.72546E1	-3.26693E1	-3.26164E1	2.6786E1	2.15277E-9	2.52222E-3	2.52222E-3	6.29581E-3	2.25455E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.19016E-1	-7.99584E-1	-9.1301E0	-9.1418E0	5.14984E-3	9.34839E-2	2.73122E1	-3.26638E1	-3.25959E1	2.68076E1	2.15894E-9	2.51771E-3	2.51771E-3	6.31837E-3	2.27097E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.18849E-1	-7.9937E-1	-9.13026E0	-9.14218E0	5.07832E-3	9.35316E-2	2.73099E1	-3.26579E1	-3.26344E1	2.67902E1	2.15624E-9	2.52061E-3	2.52061E-3	6.30202E-3	2.26832E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.18563E-1	-7.98988E-1	-9.13074E0	-9.14223E0	4.673E-3	9.32932E-2	2.72811E1	-3.26771E1	-3.26122E1	2.67848E1	2.15613E-9	2.51771E-3	2.51771E-3	6.30192E-3	2.27097E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18825E-1	-7.99417E-1	-9.13088E0	-9.1418E0	4.86374E-3	9.35078E-2	2.73105E1	-3.26476E1	-3.2599E1	2.67992E1	2.15808E-9	2.51847E-3	2.51847E-3	6.33977E-3	2.26639E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.19111E-1	-7.99274E-1	-9.13112E0	-9.14173E0	4.93526E-3	9.38416E-2	2.73201E1	-3.26693E1	-3.26296E1	2.68593E1	2.156E-9	2.5147E-3	2.5147E-3	6.32418E-3	2.25369E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18872E-1	-7.99203E-1	-9.13076E0	-9.14192E0	4.64916E-3	9.37223E-2	2.72715E1	-3.26795E1	-3.26218E1	2.67169E1	2.15613E-9	2.52318E-3	2.52318E-3	6.32936E-3	2.25524E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.1923E-1	-7.99346E-1	-9.13081E0	-9.1419E0	4.88758E-3	9.34601E-2	2.72644E1	-3.26691E1	-3.26048E1	2.69119E1	2.15441E-9	2.52707E-3	2.52707E-3	6.32896E-3	2.26445E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09472E0	-8.18801E-1	-7.99203E-1	-9.13057E0	-9.14197E0	5.10216E-3	9.35793E-2	2.72979E1	-3.26753E1	-3.26681E1	2.67295E1	2.15238E-9	2.51662E-3	2.51662E-3	6.3074E-3	2.26113E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18944E-1	-7.9906E-1	-9.13095E0	-9.14183E0	5.14984E-3	9.34124E-2	2.72973E1	-3.26681E1	-3.25966E1	2.67746E1	2.15894E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.2631E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18944E-1	-7.99513E-1	-9.13105E0	-9.14199E0	4.95911E-3	9.34124E-2	2.73442E1	-3.26536E1	-3.2638E1	2.68707E1	2.15706E-9	2.52209E-3	2.52209E-3	6.31288E-3	2.25133E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.1892E-1	-7.99561E-1	-9.13086E0	-9.14202E0	5.31673E-3	9.38177E-2	2.72756E1	-3.26567E1	-3.26349E1	2.67463E1	2.15433E-9	2.52243E-3	2.52243E-3	6.31012E-3	2.2755E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.18896E-1	-7.99727E-1	-9.13069E0	-9.14199E0	5.07832E-3	9.37939E-2	2.73309E1	-3.26825E1	-3.2599E1	2.68496E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.18849E-1	-7.9937E-1	-9.13098E0	-9.14187E0	4.60148E-3	9.37939E-2	2.73228E1	-3.26856E1	-3.26331E1	2.67856E1	2.15425E-9	2.52318E-3	2.52318E-3	6.31288E-3	2.24937E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.19111E-1	-7.99441E-1	-9.13103E0	-9.14183E0	4.95911E-3	9.37462E-2	2.72868E1	-3.26602E1	-3.2613E1	2.67866E1	2.15546E-9	2.52342E-3	2.52342E-3	6.3074E-3	2.26766E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.19039E-1	-7.99084E-1	-9.13112E0	-9.14161E0	5.19753E-3	9.37939E-2	2.73387E1	-3.2647E1	-3.26068E1	2.68508E1	2.15706E-9	2.51552E-3	2.51552E-3	6.30192E-3	2.25133E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.18801E-1	-7.98988E-1	-9.13072E0	-9.14171E0	4.81606E-3	9.36985E-2	2.72644E1	-3.2675E1	-3.26219E1	2.67782E1	2.15238E-9	2.5199E-3	2.5199E-3	6.32386E-3	2.27097E-2