[Scan]
initial_time=2016-01-27T19:13:36
final_time=2016-01-27T19:13:55
ip_count=19
run=1025
dataset=2
scan=87
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.0883E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=9.8176E-10
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.89714E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=1.81582E-9
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=4.61638E-10
mult1=-1.07879E-8
mult2=-2.69067E-9
rf_tmon=-5.16732E-3
rf_agc=3.26907E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=3.86369E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19642E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=2.79381E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.021E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.051E1
cs_ea1_imon=2.63599E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38082E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64811E1
os_ef1alow_imon=2.99399E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.54161E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=2.91649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=4.03285E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=2.8866E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15506E1
os_ea1_imon=1.89697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6334E1
os_ef1bup_imon=3.10068E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=1.19156E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=2.8873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=8.88407E-10
tplens_vset=1.4E-1
tplens_vmon=1.62963E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25749E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27017E1
iondef2_imon=1.59222E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.69084E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2167E0
ionrepsh_imon=1.76495E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.19498E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.1184E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.29209E-1
os_ea2_imon=-4.79397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70823E1
cs_ef2a_imon=3.19208E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63029E0
os_ef2alow_imon=-2.51203E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.47419E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10857E1
os_restr2_imon=2.87235E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.23013E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72138E1
iondef1_imon=1.09458E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=1.95997E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=2.48039E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.68144E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56295E1
einzel_imon=7.79557E-6
window_vset=0.0E0
window_vmon=2.25795E-1
window_imon=-8.82134E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86425E1
mask2_imon=-6.45817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.56568E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.42599E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.04539E-5
defgridb_vset=9.9999E2
defgridb_vmon=5.68759E0
defgridb_imon=6.26318E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33822E1
os_fil1_imon=3.7832E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.7334E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60498E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30884E1
cs_fil1_imon=9.98181E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62714E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62364E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95238E-2
os_fil2_imon=-2.33904E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.36562E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.31484E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-2.02047E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.26512E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21702E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34007E-3
inlet_lpb_pmon=2.26573E-2
chamber_ion_pmon=2.15665E-9
chamber_cvt_pmon=2.51755E-3
foreline_cvt_pmon=2.51755E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=9.9999E2
res40_vmon=3.96276E-1
res40_imon=-2.46337E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.19135E-1	-7.99298E-1	-9.13041E0	-9.14195E0	4.48227E-3	9.30548E-2	2.73175E1	-3.26667E1	-3.26189E1	2.67908E1	2.15624E-9	2.51525E-3	2.51525E-3	6.31278E-3	2.26445E-2
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.18777E-1	-7.99251E-1	-9.13093E0	-9.14216E0	5.03063E-3	9.32217E-2	2.73157E1	-3.26655E1	-3.26561E1	2.68028E1	2.15808E-9	2.52061E-3	2.52061E-3	6.31278E-3	2.24905E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.18801E-1	-7.99036E-1	-9.13088E0	-9.14204E0	4.45843E-3	9.31501E-2	2.73725E1	-3.26722E1	-3.26142E1	2.68282E1	2.15817E-9	2.52765E-3	2.52765E-3	6.31269E-3	2.26008E-2
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18825E-1	-7.98965E-1	-9.1305E0	-9.14187E0	5.14984E-3	9.32693E-2	2.73658E1	-3.26723E1	-3.26296E1	2.68292E1	2.15574E-9	2.52222E-3	2.52222E-3	6.32483E-3	2.25663E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.18801E-1	-7.98917E-1	-9.1306E0	-9.1418E0	5.07832E-3	9.3174E-2	2.73087E1	-3.26506E1	-3.2635E1	2.67337E1	2.15613E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.25917E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.18491E-1	-7.99179E-1	-9.1306E0	-9.14197E0	4.93526E-3	9.32932E-2	2.73093E1	-3.26609E1	-3.26392E1	2.68376E1	2.15332E-9	2.5199E-3	2.5199E-3	6.29645E-3	2.25329E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18729E-1	-7.98869E-1	-9.13093E0	-9.14185E0	4.48227E-3	9.36747E-2	2.73128E1	-3.26868E1	-3.2636E1	2.6785E1	2.15624E-9	2.52492E-3	2.52492E-3	6.33977E-3	2.26252E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.18634E-1	-7.99131E-1	-9.13079E0	-9.14197E0	4.86374E-3	9.38177E-2	2.72811E1	-3.26494E1	-3.2608E1	2.68334E1	2.15987E-9	2.52428E-3	2.52428E-3	6.31288E-3	2.27295E-2
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.18634E-1	-7.98965E-1	-9.13053E0	-9.14226E0	4.98295E-3	9.377E-2	2.73273E1	-3.26705E1	-3.26344E1	2.67818E1	2.15706E-9	2.52428E-3	2.52428E-3	6.30192E-3	2.2631E-2
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.18396E-1	-7.99036E-1	-9.13076E0	-9.14216E0	4.74453E-3	9.34124E-2	2.72898E1	-3.26472E1	-3.25965E1	2.68256E1	2.159E-9	2.52923E-3	2.52923E-3	6.29128E-3	2.25867E-2
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.18729E-1	-7.98869E-1	-9.13072E0	-9.14216E0	5.03063E-3	9.34124E-2	2.73387E1	-3.26518E1	-3.26314E1	2.68779E1	2.15894E-9	2.52209E-3	2.52209E-3	6.32386E-3	2.26506E-2
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.1892E-1	-7.99084E-1	-9.13098E0	-9.14209E0	4.74453E-3	9.36985E-2	2.73271E1	-3.26664E1	-3.26358E1	2.68016E1	2.15613E-9	2.51334E-3	2.51334E-3	6.29645E-3	2.27097E-2
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.18491E-1	-7.98988E-1	-9.13074E0	-9.14204E0	4.72069E-3	9.38892E-2	2.73039E1	-3.26679E1	-3.26048E1	2.6804E1	2.14958E-9	2.5199E-3	2.5199E-3	6.33486E-3	2.26113E-2
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.18658E-1	-7.99298E-1	-9.13055E0	-9.14197E0	4.98295E-3	9.37462E-2	2.72992E1	-3.26396E1	-3.26042E1	2.67729E1	2.15706E-9	2.52428E-3	2.52428E-3	6.29098E-3	2.25133E-2
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.18658E-1	-7.98965E-1	-9.13086E0	-9.14216E0	4.64916E-3	9.35078E-2	2.73669E1	-3.26823E1	-3.26009E1	2.68045E1	2.15624E-9	2.52169E-3	2.52169E-3	6.3074E-3	2.26445E-2
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.18443E-1	-7.99251E-1	-9.131E0	-9.14214E0	4.8399E-3	9.36031E-2	2.72775E1	-3.26374E1	-3.26146E1	2.6792E1	2.158E-9	2.5199E-3	2.5199E-3	6.3074E-3	2.25917E-2
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.18753E-1	-7.99227E-1	-9.13095E0	-9.14197E0	4.79221E-3	9.39369E-2	2.72396E1	-3.26803E1	-3.26661E1	2.68383E1	2.15791E-9	2.52473E-3	2.52473E-3	6.32418E-3	2.26569E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18682E-1	-7.9937E-1	-9.13067E0	-9.14197E0	5.24521E-3	9.36747E-2	2.736E1	-3.26685E1	-3.26396E1	2.68124E1	2.15716E-9	2.52599E-3	2.52599E-3	6.31817E-3	2.27607E-2
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.18491E-1	-7.99084E-1	-9.13095E0	-9.14171E0	5.19753E-3	9.377E-2	2.72986E1	-3.26732E1	-3.26054E1	2.6777E1	2.15533E-9	2.51739E-3	2.51739E-3	6.30202E-3	2.27802E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.18229E-1	-7.98965E-1	-9.13117E0	-9.14166E0	5.00679E-3	9.38416E-2	2.72138E1	-3.27017E1	-3.25749E1	2.68286E1	2.15665E-9	2.51755E-3	2.51755E-3	6.34007E-3	2.26573E-2